• 소성∙가공
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• 제19권6호
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• pp.352-356
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• 2010

This paper was designed to fabricate the micro-spur gear by the LIGA and hybrid powder extrusion process. It is important to manufacture a micro-die with a high aspect ratio and determine appropriate extrusion conditions for a microforming. Ni has been used to fabricate micro-dies. LIGA process was capable to produce micro-extrusion dies with close tolerance, longer bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro-formability with average strain rate raging from $10^{-3}$ to $10^{-2} s^{-1}$ and constant temperature ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape ($\Phi3\times$h10mm) under compressive force of 10kN and, subsequently, the compacted powders were extruded by the hybrid powder extrusion process controlling of the temperature holing time for a improvement on formability of Al-22Zn powder. Micro-extrusion has succeeded in forming micro-gear shafts.

• 한국생산제조학회지
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• 제21권3호
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• pp.355-361
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• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, it has some intrinsic disadvantages such as backward flow, pulsation of flow, low repeatability and producibility, and high cost. To overcome these limitation, a PZT disc actuated micro pump including a novel ring-shaped multi-flap check valve is introduced. To enhance the performance of the micro pump, the static behaviour of flap valve module and the micro fluidic behavior of fluids are numerically modelled and analyzed. As results of the numerical analysis, the optimal dimension and configuration of the ring-shaped multi flap valve are $1{\times}0.05$ mm and 2 (inlet side)${\times}1$ (outlet side) type. The obtained maximum flow rates and flow resolution are about 90 ml/min and 30 ${\mu}l$/stroke respectively.

• Applied Science and Convergence Technology
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• 제25권5호
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• pp.92-97
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• 2016

Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 한국진공학회지
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• 제22권4호
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• pp.198-203
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• 2013

에너지 수확은 우리주변에 존재하는 버려지는 에너지를 유용한 전기에너지로 변환하는 기술이다. 마찰전기 소자는 접촉을 통한 정전기를 유도하는 원리로 동력학적 에너지를 전기에너지로 전환하는 소자이다. 본 연구에서는 소프트 식각 기술을 활용하여 제작 단계를 최소화한 마찰전기 에너지 수확소자를 개발하고, 그 전기적 특성을 측정하였다. 마찰전기를 통한 발전은 마이크로패턴을 통해 마이크로 거칠기를 가진 알루미늄 층과 PDMS 층 사이에서 발생한다. 이때 PDMS 층의 마이크로 패턴은 마스크리스 식각을 통해 만들어진 알루미늄 층의 마이크로 패턴을 소프트 식각법으로 바로 본뜨는 방식으로 제작되었다. 본 소자는 2 V와 20 nA의 발전 성능을 나타낸다.

• 소성∙가공
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• 제22권2호
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• pp.80-85
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• 2013

The surface integrity of micro-machined products affects the performance of products significantly. Micro-burrs resulting from micro-cutting degrades the surface quality. Therefore it is desired to eliminate them completely and many studies have been undertaken for this purpose. In this study, micro-end-milling was carried out on nickel alloy and brass materials commercially used for light guide plate mold in 3-D optical devices. After completing this micro-machining, the burr heights were measured with a microscope. Then, deburring was done on the machined edges using the MR jet polishing method. A jet angle of $0^{\circ}$ and deburring times of 1, 3, and 5 min. were chosen. It was found that burrs were completely eliminated after 5 min of MR fluid jet polishing.

• 센서학회지
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• 제24권6호
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• pp.379-384
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• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• Smart Structures and Systems
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• 제1권1호
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Corrosion Science and Technology
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• 제17권3호
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• pp.123-128
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• 2018

The fabrication of a controlled surface is of great interest because it can be applied to various engineering facilities due to the various properties of the surface, such as self-cleaning, anti-bio-fouling, anti-icing, anti-corrosion, and anti-sticking. Controlled surfaces with micro/nano structures were fabricated using an ion beam focused onto a polypropylene (PP) surface with a fluoridation process. We developed a facile method of fabricating hydrophobic surfaces through ion beam treatment with argon and oxygen ions. The fabrication of low surface energy materials can replace the current expensive and complex manufacturing process. The contact angles (CAs) of the sample surface were $106^{\circ}$ and $108^{\circ}$ degrees using argon and oxygen ions, respectively. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FT-IR) spectroscopy were used to determine the chemical composition of the surface. The morphology change of the surfaces was observed by scanning electron microscopy (SEM). The change of the surface morphology using the ion beam was shown to be very effective and provide enhanced optical properties. It is therefore expected that the prepared surface with wear and corrosion resistance might have a considerable potential in large scale industrial applications.

• 소성∙가공
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• 제18권1호
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• pp.45-51
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• 2009

Shape memory alloy has been used to improve the tensile strength of composite by the occurrence of compressive residual stress in matrix using its shape memory effect. In order to fabricate shape memory alloy composite, TiNi alloy fiber and Al2024 sheets were used as reinforcing material and matrix, respectively. In this study, TiNi/Al2024 shape memory alloy composite was made by using hot press method. In order to investigate bonding condition between TiNi reinforcement and Al matrix, the micro-structure of interface was observed by using optical microscope and diffusion layer of interface was measured by using Electron Probe Micro Analyser. And the mechanical properties of composite with three parameters(volume fraction of fiber, cold rolling amount and test temperature) were obtained by tensile test. The most optimum bonding condition for fabrication the TiNi/Al2024 composite material was obtained as holding for 30min. under the pressure of 60MPa at 793K. The strength of composite material increased considerably with the volume fraction of fiber up to 7.0%. And the tensile strength of this composite increased with the reduction ratio and it also depends on the volume fraction of fiber.