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http://dx.doi.org/10.5757/ASCT.2016.25.5.92

Practical Surface Sculpting Method for the Fabrication of Predefined Curved Structures using Focused Ion Beam  

Kim, Heung-Bae (Department of Mechanical Engineering, Myongji College)
Publication Information
Applied Science and Convergence Technology / v.25, no.5, 2016 , pp. 92-97 More about this Journal
Abstract
Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.
Keywords
Focused ion beam; Microfabrication; Nanofabrication;
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