• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1195-1198
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• 2003

Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

• 동력기계공학회지
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• 제10권2호
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• 한국기계가공학회지
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• 제5권2호
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• 한국정밀공학회지
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• 제20권7호
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• pp.99-104
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• 2003

A precision displacement measurement system of 3-DOF micro motions is proposed in this paper. The measurement system is composed of two diode lasers, two quadratic PSDs, two beam splitters and a sphere whose surface is highly reflective. In this measurement system, the sphere reflector is mounted on the platform of positioning devices whose 3-DOF translational motions are to be measured, and the sensitive areas of two PSDs are oriented toward the center point of the sphere reflector. Each laser beam emitted from two diode laser sources is reflected at the surface of sphere and arrives at two PSDs. Each PSD serves as a 2-dimensional sensor, providing the information on the 3-dimensional position of the sphere. In this paper, we model the relationship between the outputs of two PSDs and 3-DOF translational motions of the sphere mounted on the object. Based on a deduced measurement model, we perform measurement simulation and evaluate the performance of the proposed measurement system: linearity, sensitivity, and measurement error. The simulation results show that the proposed measurement system can be valid means of precision displacement measurement of 3-dimensional micro motions.

• 비파괴검사학회지
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• 제26권3호
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• pp.162-168
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• 2006

Speckle interferometry with phase-shifting method has been applied to measurement of micro-scale displacement through optical signal processing. Four-step phase-shifting method by PZT is used to measure out-of-plane displacement in spot-welded cantilever and results of optical experiments are comparable to those of FEM. Phase-shifting method using Fourier transform by PZT is applied to measurement of in-plane displacement on rectangular steel plate with a circular hole. The results of optical experiment agree well with theoretical calculation. New phase-shifting method in speckle interferometry has been implemented with a quarter wave plate. In-plane displacement of specimen is measured by the new phase-shifting method. Results of optical experiment show that the quarter wave plate can be used for phase-shifting method that is cheap and easy to use in speckle interferometry.

• 한국정밀공학회지
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• 제16권2호통권95호
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• pp.74-81
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• 1999

The integrated chip of optical micro-encoder was fabricated and the feasibility as displacement measurement device was confirmed. The geometry of micro-encoder was designed to utilize the optical interference effect on the second order of diffracted beams. The hybrid-type micro-encoder consisted with light emitting diode, photodiode, polyimide wave-guide and micro-lens provides stable micro-encoding results for high speed displacements. The measurement shows the resolution of displacement of 1.00 +/- 0.02 ${\mu}m$ for the grating with scale pitch of 2.0${\mu}m$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.115-118
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• 2005

A workpiece with a large surface area is likely to be uneven due to form error and waviness. These geometric disturbances can cause inaccurate micro shapes to be formed when micro features are micro-grooved into the surface and cause the resulting workpiece to fail to function as desired. Thus, real-time measurement and compensation is required to guarantee the form accuracy of micro features while machining a workpiece with a large surface area. In this study, a method is suggested for real-time measurement of geometric error for the micro grooving of a large flat surface using a laser displacement sensor. The measurements are demonstrated for the workpieces with large surface areas and the experimental results show that the waviness and form error are well detected.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2090-2092
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• 2004

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.

• 한국안전학회지
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• 제34권4호
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• pp.15-21
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• 2019

In order to secure the safety of various machinery, it is very important to develop a technique for accurately and quickly measuring the cracks generated in the mechanical equipment and evaluating the mechanical characteristics. The evaluation of the mechanical properties is accompanied by an appropriate strain measurement according to the material and crack occurrence of the target structure. Especially, when micro cracks are generated, the evaluation method is very important. Digital image correlation is an optical full field displacement measuring method which is using currently with speckles in the interested area. However the evaluation method and conditions of image distributions have to be considered carefully to measure the crack occurrence because the images of the speckle patterns affect the quality of displacement results. In this study, the speckle pattern density is characterized to improve the accuracy of the measurement method. And also the micro crack initiation is detected by the measured displacement in the adopted speckle pattern distribution. It is shown that the proposed method is useful to determine the density pattern distribution for the accurate measurement and crack detection.

• 한국정밀공학회지
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• 제23권4호
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• pp.22-28
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• 2006