• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.225-229
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• 2005

We have designed micro-fuel processor system, which consists of a steam reforming area and a PROX(preferential oxidation) area. Micro-fuel processor system generates $H_2$ rich gas from a methanol. In our experiment, we have integrated micro-fuel processor system using low temperature cofired ceramics (LTCC) process because LTCC is superior to other materials principally due to their high thermal and chemical stability, simpler fabrication processes, and lower materials cost. Therefore, we have studied and integrated micro-fuel processor system containing embedded heaters, cavities, and 3D structures of micro-channel with LTCC. Also we have optimized the LTCC process.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.9
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• pp.910-914
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• 2007

We present a simple and an inexpensive method for the fabrication of a nano-fluidic filter and a nano-pore micromixer using self-assembly of nano-spheres and surface tension. Colloid-plug was formed by surface tension of liquid in a microchannel to fabricate nanofluidic filter. When colloid is evaporated, nano-spheres in a colloid are orderly stacked by a capillary force. Orderly stacked nano-spheres form 3-D nano-mesh which can be used as a mesh structure of a fluidic filter. We used silica nano-sphere whose diameter is $567{\pm}85nm$, and silicon micro-channel of $50{\mu}m$-diameter. Fabricated nano-fluidic filter in a micro-channel has median pore diameter of 158nm which was in agreement with expected diameter of the nano-pore of $128{\pm}19nm$. A nano-pore micromixer consists of $200\;{\mu}m-wide,\;100\;{\mu}m-deep$ micro-channel and self-assembled nano-spheres. In the nano-pore micromixer, two different fluids had no sooner met together than two fluids begin to mix at wide region. From the experimental study, we completely apply self-assembly of nano-spheres to nano-fluidic devices.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.597-602
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• 2000

In a MEMS(micro-electro mechanical system), the fluid may slip near the surface of a solid and have a discontinuous temperature profile. A numerical prediction in this slip flow region can provide a reasonable guide for the design and fabrication of micro devices. The compressible Navier-Stokes equation with Maxwell/smoluchowski boundary condition is solved for two simple systems; couette flow and pressure driven flow in a long channel. We found that the couette flow could be regarded as an incompressible system in low speed regions. For the pressure driven flow system, we observed nonlinear distribution of pressure in the long channel and numerical results showed a good agreement with the experimental results.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1821-1824
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• 2008

A novel in-mold packaging process has been developed to manufacture devices with closed channels. In this unified process, fabrication of open channels and forming the rigid cover on top of them are sequentially integrated in the same mold. The entire process is comprised of two phases. In the first phase, the open channels are fabricated under an exquisitely controlled temperature and pressure using the conventional micro injection molding technology. In the second phase, the closed channels are fabricated by conducting the injection molding process using the molded structure with the open channels as a mold insert. As a result, the in-mold technology can eliminate the bonding processes such as heating, ultrasonic or chemical processes for cohesion between the channel and the cover, which have been required in conventional methods.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.5
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• pp.311-317
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• 2009

Due to extremely small device size and velocity scale, mixing in microchannel take place very slowly by way of molecular diffusion transport. Mixing enhancement becomes a central issue in microfluidics for biomedical and chemical applications. In this work, The optimization results and validation through experiment and fabrication. In this efficient micromixer design, it is essential to evaluate mixing efficiency with good precision. Mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS). Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.159-164
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• 2005

For increasing productivity of micro electrochemical machining (MECM), the application of multiple electrodes was introduced. The electrodes were fabricated by reverse electrical discharge machining (REDM). By REDM micro electrodes with various shapes can be machined easily. According to capacitance and applied voltage, machining characteristics of reverse EDM were investigated and the optimal conditions for stable machining were suggested. By using multiple electrodes and a channel-shape electrode, holes and channels were machined on stainless steel by ECM.

• Progress in Medical Physics
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• v.25 no.2
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• pp.116-121
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• 2014

Next future, The bio technology will be a rapidly developing. This paper is the scattering beam measurement of the red blood cell (RBC) and the fabrication of the micro cell biochip using the bio micro electro mechanical system (Bio-MEMS) process technology. The Major process method of Bio-MEMS technology was used the buffered oxide etchant (BOE), electro chemical discharge (ECD) and ultraviolet sensitive adhesives (UVSA). All experiments were the 10 times according to the process conditions. The experiment and research are required the ultraviolet expose, the micro fluid current, the cell control and the measurement of the output voltage Vpp (peak to peak) waveform by scattering angles. The transmitting and receiving of the laser beam was used the single mode optical fiber. The principles of the optical properties are as follows. The red blood cells were injected into the micro channel. The single mode optical fiber was inserting in the guide channel. The He-Ne laser beam was focusing in the single mode optical fiber. The transmission He-Ne laser beam is irradiating to the red blood cells. The manufactured guide channel consists of the four inputs and the four outputs. The red blood cell was allowed with the cylinder pump. The output voltage Vpp waveform of the scattering beam was measured with a photo detector. The receiving angle of the output optical fiber is $0^{\circ}$, $5^{\circ}$, $10^{\circ}$, $15^{\circ}$. The magnitude of the output voltage Vpp waveform was measured in the decrease according to increase of the reception angles. The difference of the output voltage Vpp waveform is due differences of the light transmittance of the red blood cells.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1493-1496
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• 2005

In this paper, we describe a simple, precise and low cost method of fabricating PDMS stamp for UV embossing. It is important to improve the replication quality of stamp because the accuracy of fabricated structure is related to that of the stamp in UV embossing. The PDMS stamp has been fabricated by the replica molding technology with ultrasonic vibration to eliminate micro-air bubbles during the fabrication process of PDMS stamp. Also, this fabrication to use ultrasonic vibration promotes PDMS solution to fill into micro channel and edge parts. We report the fabrication of an optical core using UV embossing with fabricated PDMS stamp. This fabricated core is $7\;\mu{m}\;at\;depth,\;6\;\mu{m}\;at\;width.\;This\;measured\;value\;has\;the\;difference\;below\;1\;\mu{m}$compared to the original stamp. The surface roughness of core is about 14 nm root mean square. This is satisfactory value to use low-loss optical waveguide. Our successful demonstration of precise replica technology presents an alternative approach for the stamp of UV embossing.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.286-289
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• 2003

We investigated the influence of the properties of substrate material on the separation efficiency in microchip electrophoresis. We fabricated the various microchips and studied separation efficiency in microchannels composed of a single material such as quartz, glass, polydimethylsiloxane (PDMS), and polymethylmetha crylate (PMMA), as well as hybrid micro channels composed of different materials. New fabrication process for glass chip was suggested and some treatment is added to improve fabrication process in other chip. Separation efficiency was compared by measuring migration times and bandwidths of EOF and analytes in each microchip. The efficiency is the function of migration time, which is affected by the electroosmotic flow (EOF), and bandwidth of an analyte. EOF is highly dependent upon the characteristics of a microchannel wall surface. Migration time was more reproducible in silica chips than that of PDMS chip and more band broadening was observed in the microchip composed of hybrid material due to non-uniformity of surface charge density at the walls of the channel.