• 대한기계학회논문집A
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• 제29권7호
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• pp.998-1004
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• 2005

A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.

• JSTS:Journal of Semiconductor Technology and Science
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• 제7권3호
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• pp.133-139
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• 2007

Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.

• 대한기계학회논문집B
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• 제35권4호
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• pp.385-390
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• 2011

본 연구에서는 미세채널과 나노채널의 교차부에 불균형 동전기성을 이용한 미세혼합기를 개발하였다. 채널 내 용액의 혼합은 인가된 전압에 의한 전기삼투유동과 미세채널과 나노채널 교차 부에서의 불균형 동전기성에 의한 와류현상에 의해 이루어진다. 미세채널은 PDMS 을 이용하여 소프트리소그래피 공정으로 제작하였고, 나노채널은 미세채널의 특정위치에 전기적 충격에 의한 PDMS 의 파괴로 매우 간단하게 제작하였다. 혼합성능을 평가하기 위하여 형광물질인 Rhodamine B 용액을 이용하여 혼합 전과 후의 형광 분포를 분석하였으며, 약 90%의 혼합을 얻을 수 있었다. 본 연구의 미세혼합기는 복잡한 공정을 요구하지 않고 매우 간단하게 제작되었으며, 생화학시료 분석을 위한 미세시스템에 활용될 수 있다.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 학술대회
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• pp.14-17
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• 2008

Recently, several advanced flow visualization techniques such as Particle Image Velocimetry (PIV) including stereo PIV, holographic PIV, and dynamic PIV have been developed. These advanced techniques have strong potential as the experimental technology which can be used for verifying numerical simulation. In addition, there would be indispensable in solving complicated thermo-fluid flow problems not only in the industrial fields such as automotive, space, electronics, aero- and hydro-dynamics, steel, and information engineering, but also in the basic research fields of medical science, bio-medical engineering, environmental and energy engineering etc. Especially, NT Nano Technology) and BT (Bio Technology) strongly demand these advanced measurement techniques, because it is difficult for conventional methods to observe most complicated nano- and bio-fluidic phenomena. In this paper, the basic principle of these advanced visualization techniques and their practical applications which cannot be resolved by conventional methods, such as flow in automotive HVAC system, ship and propeller wake, three-dimensional flow measurement in micro-conduits, and flow around a circulating cylinder will be introduced.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년 추계학술대회논문집
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• pp.14-17
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• 2008

Recently, several advanced flow visualization techniques such as Particle Image Velocimetry (PIV) including stereo PIV, holographic PIV, and dynamic PIV have been developed. These advanced techniques have strong potential as the experimental technology which can be used for verifying numerical simulation. In addition, there would be indispensable in solving complicated thermo-fluid flow problems not only in the industrial fields such as automotive, space, electronics, aero- and hydro-dynamics, steel, and information engineering, but also in the basic research fields of medical science, bio-medical engineering, environmental and energy engineering etc. Especially, NT (Nano Technology) and BT (Bio Technology) strongly demand these advanced measurement techniques, because it is difficult for conventional methods to observe most complicated nano- and bio-fluidic phenomena. In this paper, the basic principle of these advanced visualization techniques and their practical applications which cannot be resolved by conventional methods, such as flow in automotive HVAC system, ship and propeller wake, three-dimensional flow measurement in micro-conduits, and flow around a circulating cylinder will be introduced.

• 센서학회지
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• 제19권4호
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1694-1695
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• 2011

최근 에너지에 대한 관심의 증대 및 센서 노드로의 개발을 위해 무전원 동력 장치(sustainable energy conversion system)에 대한 관심이 크게 증대되고 있다. 본 연구에서는 수압(hydraulic pressure)을 이용하여 전기를 발생시키는 새로운 개념의 나노유체 에너지 변환 시스템에 대한 연구를 진행하였다. 표면 패터닝 기법을 통해 제작된 나노 채널 및 일차원 마이크로 유체 기반의 플루이딕 소자를 이용하여 외부저항, 버퍼용액의 농도, 압력에 따른 streaming potential을 구하였다. electrokinetic 현상과 이에 따른 유체의 streaming potential을 이용하여 압력(pressure)을 전기적으로 변환시키는 에너지 변환용 나노 유체시스템을 본 논문을 통해 제안하고자 한다.

• 센서학회지
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• 제17권5호
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• pp.369-374
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• 2008

A novel fiber optic surface plasmon resonance (SPR) sensor using cyclic olefin copolymer (COC) prism with the spectral modulation is presented. The SPR sensor chip is fabricated using the SU-8 photolithography, Ni-electroplating and COC injection molding process. The sidewall of the COC prism is partially deposited with Au/Cr (45/2.nm thickness) by e-beam evaporator, and the thermal bonding process is conducted for micro fluidic channels and optical fibers alignment. The SPR spectrum for a phosphate buffered saline (0.1.M PBS, pH.7.2) solution shows a distinctive dip at 1300.nm wavelength, which shifts toward longer wavelength with respect to the bovine serum albumin (BSA)concentrations. The sensitivity of the wavelength shift is $1.16\;nm{\cdot}{\mu}g^{-1}{\cdot}{\mu}l^{-1}$. From the wavelength of SPR dips, the refractive indices (RI) of the BSA solutions can be theoretically calculated using Kretchmann configuration, and the change rate of the RI was found to be $2.3{\times}10^{-5}RI{\cdot}{\mu}g^{-1}{\cdot}l^{-1}$. The realized fiber optic SPR sensor with a COC prism has clearly shown the feasibility of a new disposable, low cost and miniaturized SPR biosensor for biochemical molecular analyses.

• Korean Chemical Engineering Research
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• 제57권5호
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• pp.730-734
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• 2019

열영동은 매질의 온도 구배에 의해 입자가 이동하는 현상이다. 본 논문에서는 미세유체 채널에서 입자의 열영동 현상에 대해서 논의한다. 흐름이 없는 비유동 채널에서 열원인 백금 와이어에 가해지는 전압에 비례해서 열영동에 의한 마이크로 입자의 이동이 더 크게 나타남을 확인하였다. 전압에 따른 백금 와이어 주변 온도 변화는 Callendar-van Dusen 식을 이용하여 예측하였다. 동일한 시스템에서 나노 입자의 열영동 현상을 관찰한 결과, 나노 입자도 마이크로 입자와 유사한 열영동 거동을 보임을 확인하였다. 마지막으로 Y 모양 미세유체 채널을 제작하고 백금 와이어 열원을 채널 내에 설치하여, 채널을 흐르는 현탁액 내의 입자의 열영동 현상을 구현하고, 이를 기반으로 현탁액의 흐름을 제어할 수 있음을 보인다.