• 제목/요약/키워드: MgO film

검색결과 509건 처리시간 0.031초

MOCVD법을 이용한 Bi-2212계 초전도박막 제조 및 특성에 관한 연구 (Preparation and Characterization of Bi-Sr-Ca-Cu-O Superconductor Thin Film by Metal Organic Chemical Vapor Deposition)

  • 장건익;김호인;박인길;김호기
    • 한국세라믹학회지
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    • 제31권10호
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    • pp.1123-1132
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    • 1994
  • Bi-Sr-Ca-Cu-O superconductor thin films were prepared on MgO and LaAlO3 substrates by MOCVD technique. The films deposited on MgO and LaAlO3 substrates became superconducting at 64 K and 70 K respectively. The measured critical current density of thin film deposited on LaAlO3 substrate was around 104 A/$\textrm{cm}^2$. After annealing at $700^{\circ}C$ for 3 hours, the critical transition temperature(Tc) of films deposited on LaAlO3 was changed from 70 K to 74 K.

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스파트링 방법으로 제작된 MgO와 그 전기적 특성에 관한 연구 (The Study on the MgO thin film prepared by magnetron sputtering and its electrical characteristics)

  • 박정후;조정수;박명호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1997년도 제13회 학술발표회 논문개요집
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    • pp.169-172
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    • 1997
  • MgO dielectric pprotection layer is ppreppared by R.F. reactive magnetron spputtering with Mg target under various conditions of spputtering ppressure, time and substrate tempperature. Discharge characteristics of ppDpp is also studied as a pparameter of MgO pprepparation conditions. As the working ppressure and substrate tempperature was increase, the discharge voltage was decreased. Two kinds of MgO ppreppared both spputtering and E-beam methods were stable after annealing at 35$0^{\circ}C$ for 120min. discharge voltage under 3 mixed gas(He+Xe0.2%+Ne30%) was V=130V, V=102V and ${\gamma}$ coefficient was twiced as much as that of dielectric layer.

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$RF-O_2$ Plasma 처리한 MgO 박막의 스퍼터링 수율 측정 (Measurement of Sputtering Yield of $RF-O_2$ Plasma treated MgO Thin Films)

  • 정원희;정강원;임연찬;오현주;박철우;최은하;서윤호;김윤기;강승언
    • 한국진공학회지
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    • 제15권3호
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    • pp.259-265
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    • 2006
  • [ $RF-O_2$ ] plasma 처리한 MgO 박막의 스퍼터링 수율을 집속이온빔 장치를 이용하여 측정하였다. 가속 전압 10 kV의 Ga 이온빔을 주사했을 때 plasma 처리하지 않은 MgO 박막의 스퍼터링 수율은 0.33 atoms/ion, $RF-O_2$ plasma 처리한 MgO 박막의 스퍼터링 수율은 0.20 atoms/ion 으로 $RF-O_2$ plasma 처리한 경우 스퍼터링 수율이 낮아졌다. 또한 XPS, AFM을 통해 plasma 처리로 인한 MgO 표면의 변화를 관찰하였다. MgO 박막에 $RF-O_2$ plasma 처리한 후 XPS O 1s spectra의 binding energy와 FWHM 값이 각각 2.36 eV와 0.6167 eV 작아졌고 표면거칠기의 RMS 값 또한 0 32 nm 작아졌다.

Epitaxial Growth of MgO and CoFe/MgO on Ge(001) Substrates by Molecular Beam Epitaxy

  • Jeon, Kun-Rok;Park, Chang-Yup;Shin, Sung-Chul
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2009년도 정기총회 및 동계학술연구발표회
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    • pp.190-190
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    • 2009
  • We report the epitaxial growth of MgO and CoFe/MgO on Ge (001) substrates using molecular beam epitaxy. It was found that the epitaxial growth of a MgO film on Ge could be realized at a low growth temperature of $125{\pm}5^{\circ}C$ and the MgO matches the Ge with a cell ratio of $\sqrt{2}$:1 which renders MgO rotated by $45^{\circ}$ relative to Ge. In-situ and ex-situ structural characterizations reveal the epitaxial crystal growth of bcc CoFe/MgO on Ge with the in-plane crystallographic relationship of CoFe(001)[100] || MgO(001)[110] || Ge(001)[100], exhibiting sharp interfaces in the (001) matching planes. The saturation magnetization of the sample is $1430{\pm}20$ emu/cc, which is comparable to the value of bulk CoFe.

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Preparation and Electric Properties of PbTiO$_3$Thin Films by Low-pressure Thermal Plasma Deposition

  • Nagata, Shingo;Wakiya, Naoki;Shinozaki, Kazuo;Mizutani, Nobuyasu
    • The Korean Journal of Ceramics
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    • 제7권1호
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    • pp.20-25
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    • 2001
  • PbTiO$_3$ thin films were prepared by low-pressure thermal plasma deposition on (100)Pt/(100)MgO substrates. Mist of source material in which metal alkoxides are dissolved in 2-methoxyethanol was introduced into plasma through heating furnace and deposited onto substrates at $600^{\circ}C$. As-deposited PbTiO$_3$/Pt/MgO thin film prepared at 1.33$\times$10$^4$ Pa was grown epitaxially, but was consisted of many rectangular shaped grains, with many grain boundaries and it was impossible to measure electric properties. As-deposited film prepared at 1.00$\times$10$^4$ Pa showed weak peaks of X-ray diffraction and the film was not grown epitaxially. On the other hand, the film after annealed at $700^{\circ}C$ showed strong diffraction peaks and epitaxial growth was also observed. For annealed film, moreover, no clear grain boundaries were observed. The value of ${\varepsilon}_r$, tan${\delta}$, Pr and Ec of annealed film were 160, 3.2%, 10.4${\mu}$C.cm$^-2$ and 51.2kV.cm$^-1$, respectively. Since the composition, Pb/Ti, measured by EDS attaching to SEM changed point by point, the distribution of composition in annealed film was investigated and found out several relations between composition and electric properties. At stoichiometric composition, Pr and Ec showed the lowest value and they gradually became large as composition deviated from stoichiometric one. Moreover, the value of ${\varepsilon}_r$ became gradually large as the ratio of Ti became high.

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산화마그네슘 보호막의 이차전자방출과 방전특성에 미치는 산화티타늄첨가의 효과 (Effect of $TiO_2$ Addition on the Secondary Electron Emission and Discharge Properties of MgO Protective Layer)

  • 김영현;김락환;김희재;박종완
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.148-151
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    • 2000
  • $Mg_{2-2x}Ti_xO_2$ films were prepared by e-beam evaporation method to be used as possible substitutes for the conventional MgO protective layer. The oxygen content in the films and in turn, the ratio of metal to oxygen gradually increased with increasing the $TiO_2$ content in the starting materials. The pure MgO films exhibited the crystallinity with strong (111) orientation. The $Mg_{2-2x}Ti_xO_2$ films, however, had the crystallinity with (311) preferred orientation. When the $[TiO_2/(MgO+TiO_2)]$ ratios of 0.1 and 0.15 were used, the deposited films exhibited the secondary electron emission yields improved by 50% compared to that of the conventional MgO protective layer, which resulted in reduction in discharge voltage by 12%.

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Single-Crystal like MgB2 thin films grown on c-cut sapphire substrates

  • Duong, Pham Van;Ranot, Mahipal;Kang, Won Nam
    • 한국초전도ㆍ저온공학회논문지
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    • 제16권3호
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    • pp.7-9
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    • 2014
  • Single-crystal like $MgB_2$ thin film was grown on (000l) $Al_2O_3$ substrate by using hybrid physical-chemical vapor deposition (HPCVD) system. Single crystal properties were studied by X-ray diffraction (XRD) and the full width at half maximum (FWHM) of the (0001) $MgB_2$ peak is $15^{\circ}$, which is very close to that has been reported for $MgB_2$ single-crystal. It indicates that the crystalline quality of thin film is good. Temperature dependence on resistivity was investigated by physical property measurement system (PPMS) in various applied fields from 0 to 9 T. The upper critical field ($H_{c2}$) and irreversibility field ($H_{irr}$) were determined from PPMS data, and the estimated values are comparable with that of $MgB_2$ single-crystals. The thin film shows a high critical temperature ($T_c$) of 40.4 K with a sharp superconducting transition width of 0.2 K, and a high residual resistivity ratio (RRR=21), it reflects that $MgB_2$ thin film has a pure phase structure.

Interfacial Properties in Cu-phthalocyanine-based Hybrid Inorganic/Organic Multilayers

  • Lee, Nyun Jong;Ito, Eisuke;Bae, Yu Jeong;Kim, Tae Hee
    • Journal of Magnetics
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    • 제17권4호
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    • pp.261-264
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    • 2012
  • Interfacial properties of 5 nm MgO(001)/7 nm Fe(001)/1.8 nm MgO(001)/t nm Cu-phthalocyanine (CuPc) hybrid multilayers with t = 0, 1, 7, and 10 were investigated by using x-ray photoemission spectroscopy (XPS). Rather sharp interfacial properties were observed in the CuPc films grown on an epitaxial MgO/Fe/MgO(001) trilayer than a MgO/Fe(001) bilayer. This work suggests a new way to improve device performance of organic spintronic devices by utilizing an artificially grown MgO(001) thin layer.

The improvement of discharge characteristics and lifetime of PDP by MgO deposition on the phosphor

  • Ha, Chang-Hoon;Kim, Jae-Sung;Jeong, Dong-Cheol;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.232-235
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    • 2002
  • An alternate application of MgO film for the improvement of discharge characteristics and life time in an ac plasma display panel (PDP) is suggested. In this research, we deposited MgO on the phosphor to get the same address characteristics irrespective of each phosphor. To avoid the luminance and efficiency degradation by MgO deposition on the phosphor, we optimized the MgO thickness through experiments. The results showed that PDP with MgO coated phosphor has a uniform formative delay in address discharge and improved degradation characteristics.

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고효율 PDP를 위한 진공 인라인 실장에서의 MgO 보호막 영향분석 (MgO Thin Film Characterization in a Vacuum In-line Sealing Process for High-efficiency PDP)

  • 권상직;장찬규
    • 한국전기전자재료학회논문지
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    • 제18권11호
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    • pp.1019-1023
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    • 2005
  • We have examined the electrical and optical characteristics of the plasma display panel produced by vacuum in-line sealing technology. In the MgO layer deposited at room temperature, after sealing at the panel temperature of $430^{\circ}C$, the luminous efficiency decreased compared with that of the panel before sealing. Moreover, firing and sustain voltage of the sealed panel increased compared with that of the panel before sealing. This was resulted from that the MgO protective layer was cracked by the softening of the dielectric layer during the sealing process. In order to avoid the MgO crack during the vacuum in-line sealing, thermally stable MgO layer or lower temperature sealing is required.