• 제목/요약/키워드: MgO Thin Film

검색결과 297건 처리시간 0.029초

레이저 어블레이션에 의한 초전도 이중모드 공진기 제작 (Fabrication of Superconducting Dual Mode Resonator using Laser Ablation)

  • 박주형;양승호;이상렬;안달;석중현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.41-44
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    • 1998
  • Dual mode resonators were fabricated using high temperature superconductor. The deposited material was $Y_1Ba_2Cu_3O_{7-x}$(YBCO) on MgO(100) substrate using pulsed laser deposition. Dual mode resonators were patterned by standard photolithography process and wet etching. At the back-side of the substrate, the ground plane with the metal layer of Ti and Ag was fabricated. The transition temperatures of YBCO films were 85-88 K, and network analyzer was used for testing the performance of the resonators. The input/output feedline angles of each resonator were $60^{\circ}$and $100^{\circ}$. The resonant frequency of resonators was 10 GHz. In this paper, dual mode resonator was fabricated for the application of satellite communication.

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H 형태 공진기를 이용한 소형화된 HTS 안테나의 제작 및 특성 해석 (Fabrication and Characterization of Miniaturized HTS Microstrip Antennas Using "H"-type Resonator)

  • 정동철;윤창훈;황종선;최창주
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제52권7호
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    • pp.282-287
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    • 2003
  • ″H″ type resonator has the advantage for the miniaturization of high-T7 superconducting (HTS) microstrip antenna in comparison with the conventional microstrip antenna such as rectangular type or circular type. In this paper we designed miniaturized HTS antennas using this "H"-type resonator and reported the characteristics of our antennas including return loss, bandwidth, radiation patterns, efficiency and so on. To fabricate the "H" type antenna, HTS YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) thin films were deposited on MgO substrates using rf-magnetron sputtering. For comparison between normal conducting antennas and superconducting antennas, the gold antennas with the same dimension were also fabricated. An aperture coupling was used for impedance matching between 50 $\Omega$ feed line and HTS radiating patch. The ″H" type superconducting antenna showed the performance of 1.38 in SWR, 26 % in efficiency, and 13.8 dB in the return loss superior to the normal conducting counterpart.

Modification of polyamide reverse osmosis membranes seeking for better resistance to oxidizing agents

  • Silva, Lucinda F.;Michel, Ricardo C.;Borges, Cristiano P.
    • Membrane and Water Treatment
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    • 제3권3호
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    • pp.169-179
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    • 2012
  • One of the major limitations in the use of commercial aromatic polyamide thin film composite (TFC) reverse osmosis (RO) membranes is to maintain high performance over a long period of operation, due to the sensitivity of polyamide (PA) skin layer to oxidizing agents, such as chlorine, even at very low concentrations in feed water. This article reports surface modification of a commercial TFC RO membrane (BW30-Dow Filmtec) by covering it with a thin film of poly(vinyl alcohol) (PVA) crosslinked with glutaraldehyde (GA) to improve its resistance to chlorine. Crosslinking reaction was carried out at 25 and $40^{\circ}C$ by using PVA 1.0 wt.% solutions at different GA/PVA mass ratio, namely 0.0022, 0.0043 and 0.013. Water swelling measurements indicated a maximum crosslinking density for PVA films prepared at $40^{\circ}C$ and GA/PVA 0.0043. ATR-FTIR and TGA analysis confirmed the reaction between GA and PVA. SEM images of the original and modified membranes were used to evaluate the surface coating. Chlorine resistance of original and modified membranes was evaluated by exposing it to an oxidant solution (NaClO 300 mg/L, NaCl 2,000 mg/L, pH 9.5) and measuring water permeability and salt rejection during more than 100 h period. The surface modification effectively was demonstrated by increasing the chlorine resistance of PA commercial membrane from 1,000 ppm.h to more than 15.000 ppm.h.

14 GHz 헤어핀형 초전도 대역통과 필터 (Superconducting Bandpass Fitter Using Hairpin-type Microstrip Line with Narrow Bandwidth Centered at 14 GHz)

  • 송석천;김철수;이상렬;윤형국;윤영중
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1852-1854
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    • 1999
  • In order to enhance satellite communication system performance, filters are required with the characteristics of sharp skirt, low insertion loss, and high power handling capability. But the performance of microwave passive filters is significantly declined by the conduction losses, especially in case of planar structures using film conductors. By using high temperature superconducting(HTS) film material as the conductor, higher performance could be expected. We have designed and developed narrow bandpass filters using haripin-type superconducting microstrip line for satellite communication. High quality superconducting YBCO thin films have been grown on MgO substrates by pulsed laser deposition(PLD) The deposited YBCO films were patterned by conventional wet-etching process. The transition temperatures of these films had shown 86 - 89 K. The film thicknesses were about 500 nm. Experimental results are presented for the insertion loss and return loss of the filter at 60 K.

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Photocatalytic Decomposition of Gaseous Ozone over $TiO_2$Thin Film

  • Cho, Ki-Chul;Hwang, Kyung-Chul;Yeo, Hyun-Gu;Taizo Sano;Koji Takeuchi;Sadao Matsuzawa
    • Journal of Korean Society for Atmospheric Environment
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    • 제19권E3호
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    • pp.121-127
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    • 2003
  • The characteristics of heterogeneous photocatalytic decomposition were investigated at low concentration level of $O_3$on TiO$_2$for various operating parameters such as: loaded catalyst weight (0∼4 mg/$\textrm{cm}^2$), initial concentration of $O_3$(0.06∼10.0 ppm), gas flow rate (1.0 ∼ 2.5ι/min), and relative humidity (0∼80%). This study was conducted using a flow-type reactor at room temperature. Three kinds of pure TiO$_2$(P25, ST -01, and E- 23) were employed as photocatalyts. It was found that $O_3$removal ratio was identical, regardless of the loaded TiO$_2$weight in the range from 0.5 to 4.0 mg/$\textrm{cm}^2$. It was also found that higher initial ozone concentration results in greater oxidation rate of ozone and experimental data show kinetically a good agreement with Langmur-Hinshelwood kinetic model. We also observed that the removal ratio of $O_3$increases linearly with the increasing flow rate and also with the increasing relative humidity for each catalyst.

Suppression of Charge Recombination Rate in Nanocrystalline SnO2 by Thin Coatings of Divalent Oxides in Dye-Sensitized Solar Cells

  • Lee, Chae-Hyeon;Lee, Gi-Won;Kang, Wee-Kyung;Lee, Doh-Kwon;Ko, Min-Jae;Kim, Kyoung-Kon;Park, Nam-Gyu
    • Bulletin of the Korean Chemical Society
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    • 제31권11호
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    • pp.3093-3098
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    • 2010
  • The core-shell $SnO_2$@AO (A=Ni, Cu, Zn and Mg) films were prepared and the effects of coatings on photovoltaic properties were investigated. Studies on X-ray photoelectron spectroscopy, energy dispersive X-ray analysis and transmission electron microscopy showed the formation of divalent oxides on the surface of $SnO_2$ nanoparticles. It was commonly observed that all the dye-sensitized core-shell films exhibited higher photovoltage than the bare $SnO_2$ film. Transient photovoltage measurements confirmed that the improved photovoltages were related to the decreased time constants for electron recombination.

유/무기 복합 박막을 이용한 유기발광 소자의 보호층에 관한 연구 (Study on the Hybrid Passivation layer of OLEDs using the Organic/Inorganic Thin Film)

  • 배성진;이주원;이영훈;강남수;김동영;황성우;김재경;주병권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 학술대회 및 기술세미나 논문집 디스플레이 광소자
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    • pp.78-80
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    • 2006
  • The hybrid thin-film (HTF) passivation layer composed of the Ultra Violet (UV) curable acrylate layer and MS-31 (MgO:$SiO_2$=3:1wt%) layer was adopted in organic light emitting device (OLEO) to protect organic light emitting materials from penetrations of oxygen and water vapors. The results showed that the HTF layer possessed a very low WVTR value of lower than $0.007gm/m^{2+}day$ at $37.8^{\circ}C$ and 100% RH. This value was within the limited range of the sensitivity of WVTR measurements. And the lifetime of the HTF passivated device became almost three times longer than that of the bare device. The HTF on the OLEO was found to be very effective in protect what from the penetrations of oxygen and moisture.

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작업가스비에 따른 BST 박막의 특성 (Study on working gas ratio dependance of BST thin film)

  • 최명률;권학용;박인철;김홍배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.393-396
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    • 2004
  • 본 논문에서는 완충층용 MgO 박막을 P-type(100)Si 기판위에 작업가스 $Ar:O_2=80:20$, RF 파워 50W, 기판온도 $400^{\circ}C$, 10mtorr의 작업진공에서 $500{\AA}$ 증착하였다. 제작된 MgO/Si 기판위에 RF Magnetron sputtering법으로 작업가스 $Ar:O_2$의 비율을 90:10, 80:20, 70:30으로 변화하면서 $BST(Ba_{0.5}Sr_{0.5}TiO_3)$ 박막을 약 $2000{\AA}$ 증착하였다. XRD 측정결과 작업가스비의 변화에 관계없이(110)BST와 (111)BST 피크만이 관찰되었으며 작업가스 $Ar:O_2=80:20$에서 가장 양호한 결정성을 나타내었다. I-V 측정결과 인가전계 ${\pm}100kV/cm$에서 $10^{-7}A/cm^2$이하의 양호한 누설전류 특성을 보여주고 있으며 C-V 측정결과 작업가스 $Ar:O_2$의 비율 90:10, 80:20, 70:30에서의 비유전율은 각각 283, 305, 296으로서 작업가스비 80:20에서 제작된 박막의 특성이 가장 우수하였다. 작업가스비 80:20에서 제작된 박막의 SEM 측정결과 결정이 성장되었음을 확인할 수 있었고 그레인의 크기는 약 10nm였다.

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펜타센의 박막두께 변화와 전극의 종류에 따른 펜타센 유기박막 트랜지스터의 특성 변화

  • 김태욱;민선민;노용한
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.112-112
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    • 2011
  • 유기박막 트랜지스터(Organic Thin Film Transistor: OTFT)는 낮은 공정비용과 기존의 고체 실리콘 트랜지스터로서 실혐 할 수 없는 플렉시블 디스플레이, 스마트카드, 태양전지 등의 매우 넓은 활용범위로 각광받고 있는 연구 분야 중 하나이다. 본 연구에서는 열 증발 증착장비(Thermal Evaporator)를 이용하여 펜타센을 활성층으로 사용한 유기박막 트랜지스터를 제작하였다. Heavily doped된 N형 실리콘 기판을 메탄올, 에탄올, 불산 처리를 하여 세척을 한 후 PECVD를 이용하여 SiO2를 200 nm 증착하였다. 그 후 열 증발 증착 장비를 사용하여 펜타센을 활성층으로 사용하였고, 분말 형태의 펜타센의 질량을 15~60 mg으로 조절하여 활성층의 두께를 조절하였다. 펜타센 증착 후 100도에서 열처리를 하고, 그 후 Shadow Mask를 이용하여 전극을 150nm 증착하였다. 이때 전극은 Au, Al, Ni 세가지 종류를 사용하였다. 펜타센의 질량을 조절하여 증착한 활성층의 두께는 60 mg일 때 약 60 nm, 45 mg일 때 약 45 nm로 1:1의 비율로 올라가는 것을 확인 할 수 있었고, 펜타센의 두께가 30 nm일 때 특성이 가장 잘 나오는 것을 볼 수 있었다. 펜타센의 두께가 두꺼울수록 게이트에서 인가되는 전압의 필드가 제대로 걸리지 않아 특성이 나쁘게 나온 것으로 보인다. 또한 활성층을 30 nm로 고정하고 전극의 종류를 바꿔가며 전기적 특성(캐리어 이동도, 문턱전압, 전달특성 등)을 측정 했을 때 전극으로 Al보다는 Au와 Ni를 사용했을 때 전기적 특성이 더 우수하게 나오는 것을 볼 수 있었다. 메탈과 펜타센과의 일함수 차이에 따른 결과로 보여진다.

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Irradiation enduced In-plane magnetization in Fe/MgO/Fe/Co multilayers

  • Singh, Jitendra Pal;Lim, Weon Cheol;Song, Jonghan;Kim, Jaeyeoul;Asokan, K.;Chae, Keun Hwa
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.188.1-188.1
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    • 2015
  • For present investigation Fe/MgO/Fe/Co multilayer stack is grown on Si substrate using e-beam evaporation in ultrahigh vacuum. This stack is irradiated perpendicularly by 120 MeV $Ag^{8+}$ at different fluences ranging from $1{\times}10^{11}$ to $1{\times}10^{13}ions/cm^2$ in high vacuum using 15UD Pelletron Accelerator at Inter University Accelerator Centre, New Delhi. Magnetic measurements carried out on pre and post irradiated stacks show significant changes in the shape of perpendicular hysteresis which is relevant with previous observation of re-orientation of magnetic moment along the direction of ion trajectory. However increase in plane squareness may be due to the modification of interface structure of stacks. X-ray reflectivity measurements show onset of interface roughness and interface mixing. X-ray diffraction measurements carried out using synchrotron radiation shows amorphous nature of MgO and Co layer in the stack. Peak corresponding body centered Fe [JCPDS-06-0696] is observed in X-ray diffraction pattern of pre and post irradiated stacks. Peak broadening shows granular nature of Fe layer. Estimated crystallite size is $22{\pm}1nm$ for pre-irradiated stack. Crystallite size first increases with irradiation then decreases. Structural quality of these stacks was further studied using transmission electron microscopic measurements. Thickness from these measurements are 54, 36, 23, 58 and 3 nm respectively for MgO, Fe, MgO, Fe+Co and Au layers in the stack. These measurements envisage poor crystallinity of different layers. Interfaces are not clear which indicate mixing at interface. With increase fluence mixing and diffusion was increased in the stack. X-ray absorption spectroscopic measurements carried out on these stacks show changes of Fe valence state after irradiation along with change of O(2p)-metal (3d) hybridized state. Valence state change predicts oxide formation at interface which causes enhanced in-plane magnetization.

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