• Title/Summary/Keyword: Mg-SiC

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펄스 레이저 방식으로 증착된 $MgTiO_3$ 박막의 전기적 특성 분석

  • 안순홍;노용한;강신충;이재찬
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.71-71
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    • 2000
  • 본 연구에서는 차세대 마이크로파 유전체 소자로서의 응용을 목적으로 펄스 레이저 방식에 의하여 증착된 MgTiO3 박막의 전기적 특성을 종합적으로 연구 분석하였다. 이를 바탕으로 MgTiO3 박막의 유전손실 등과 같은 열화를 야기시키는 박막 내부 또는 박막과 기판간의 결함의 특성을 파악하여 열화 메카니즘을 분석하였다. MgTiO3는 마이크로파 영역에서의 우수한 유전특성과 같은 낮은 유전손실을 가지며, 온도 안정성 또한 우수하다. 현재까지 벌크 세라믹 MgTiO3 의 응용 광범위하게 연구되어 왔으나 박막의 제조공정 및 전기적 특성 분석은 미흡한 형편이다. 따라서 벌크 세라믹과는 특성이 상이한 박막의 전기적 특성분석 및 연구가 필요하다. 분석을 위한 소자의 기본 구조로서 Metal-Insulator-Semiconductor(MIS) 구조를 채택하였다. MgTiO3 박막을 증착하기 위한 기판으로는 n형 Si(100)기판과 p형 Si(100)기판을 사용하였고, Si 기판 위에 급속 열처리기 (RTP)를 이용하여 SiO2를 ~100 두께로 성장시킨 것과 성장시키지 않은 것으로 구분하여 제작하였다. MgTiO3 박막은 펄스 레이저 증착 방식(PLD)에 의하여 약 2500 두께로 증착되었으며, 200mTorr 압력의 산소 분위기 하에서 기판의 온도를 40$0^{\circ}C$~55$0^{\circ}C$까지 5$0^{\circ}C$간격으로 변화시키며 제작하였다. 상하부의 전극 금속으로는 Al을 이용하였으며, 열증발 증착기로 증착하였다. 증착된 MgTiO3 박막의 결정구조를 확인하기 위하여 XRD 분석을 수행하였으며, 박막의 전기적 특성을 분석하기 위해 Boonton7200 C-V 측정기와 HP4140P를 이용한 경우에는 C-V 곡선에 이력현상이 나타났으나, MgTiO3/SiO2를 이용한 경우에는 이력현상이 나타나지 않았고, 유전율은 감소하는 것으로 나타났다. I-V 측정 결과, 절연층으로 MgTiO3/SiO2를 이용한 경우에는 MgTiO3만을 절연층으로 사용한 경우에 비해 동일한 전계에서 낮은 누설전류 값을 가짐을 알 수 있었다. 또한 박막의 증착온도가 증가함에 따라서 C-V 곡선의 위치가 양의 방향으로 이동함을 확인하였다. 위의 현상은 기판의 종류에 관계없이 발생하는 것으로 보아 벌크 또는 계면에 존재하는 결함에 의한 것으로 추정된다. 현재 C-V 곡선의 이동 원인과 I-V 곡선의 누설전류 메카니즘을 분석 중에 있으며 그 결과를 학회에서 발표할 예정이다.

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Joining of Presureless Sintered SiC Ceramics using $MgO-Al_2O_3-SiO_2$ System ($MgO-Al_2O_3-SiO_2$계를이용한 상압소결 SiC의 접합)

  • 이홍림;남서우;한봉석;박병학;한동빈
    • Journal of the Korean Ceramic Society
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    • v.34 no.7
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    • pp.781-789
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    • 1997
  • Pressure sintered SiC specimens were joined using MgO-Al2O3-SiO2 (MAS) glass which has a thermal expansion coefficient similar to that of SiC. MAS melt showed excellent behavior of wetting on the SiC substrate over 148$0^{\circ}C$, and the wettability was much influenced by the joining atmosphere. The joining was conducted at 150$0^{\circ}C$ for 30 min in Ar atmosphere. The flexural strength of the joined specimen shows 342~380 MPa up to 80$0^{\circ}C$, which is almost the same as that of as-recieved SiC specimen. However, the flexural strength of the joined specimen decreased to about 80 MPa at 90$0^{\circ}C$ due to softening of the glass melt. The analyses od XRD and WDS show that the reaction between the SiC specimen and the MAS melt produces the oxycarbide glass, which had a high strength and a good stability at high temperatures.

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Microstructures and Mechanical Properties of SiCp/ Al-Si-Mg Alloy Composites Fabricated by Rheo-compocasting and Hot Extrusion (Rheo-compocasting 및 열간압출에 의하여 제조한 Al-Si-Mg / SiC 입자강화 복합재료의 조직 및 기계적 특성)

  • Lee, Hag-Ju;Hong, Chun-Pyo
    • Journal of Korea Foundry Society
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    • v.12 no.4
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    • pp.335-345
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    • 1992
  • Aluminum alloy matrix composites reinforced with various amounts of SiC particles have been produced by rheo-compocasting followed by hot extrusion. A relatively uniform distribution of SiC particles in the composites was obtained. The amounts of pore and SiC particles cluster were relatively small in the composites. Particle free zones were observed in the hot extruded composites when the amount of SiC particles was less than 20 vol%. However, the width of particle free zone decreases with the increase of SiC particle content. Eutectic Si phase play an important role for improving bonding between SiC particle and matrix. Tensile and yield strength increased with the increase of SiC particle content. the strenthening effect of SiC particle addition was effective even at relatively high temperature of 573 K.

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Anneal Characteristics of LiF:Mg,Cu,Na,Si Teflon TLDs (LiF:Mg,Cu,Na,Si Teflon TLD의 열처리 특성)

  • Nam, Young-Mi;Chung, Woon-Hyuk;Lee, Dae-Won;Kim, Hyun-Ja;Kim, Gi-Dong
    • Journal of Radiation Protection and Research
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    • v.22 no.3
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    • pp.135-141
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    • 1997
  • The study of anneal characteristics is important for TL dosimeter to reuse. To obtain the annealing condition of the recently developed, new TL dosimeter, LiF:Mg,Cu,Na,Si Teflon Tills in a disk type (diameter 4.5 mm, thickness about $90mg/cm^2$), we studied for pre-irradiation annealing, readout procedure and post-readout annealing, in order. The gamma irradiations were carried out with a $^{60}Co$, dose of 0.1 Gy. We have used the method that observe the variation of thermoluminescent(TL) intensity of these Teflon TLDs over repeated cycles by changing both anneal temperature and anneal time with the TLD reader and the oven. There is a 5% loss in sensitivity over the ten repeated readouts by the annealing condition:pre-irradiation annealing at $80^{\circ}C$ for one hour, readout to $280^{\circ}C$ and post-readout annealing at $270^{\circ}C$ for 20 seconds.

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Effects of Bi on Mg2Si Modification and Mechanical Properties of Mg-Al-Si Alloy (Mg-Al-Si 합금에서 Mg2Si의 개량화 및 기계적 특성에 미치는 Bi의 영향)

  • Jun, Joong-Hwan
    • Journal of the Korean Society for Heat Treatment
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    • v.24 no.2
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    • pp.82-86
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    • 2011
  • The influences of Bi addition on morphological modification of $Mg_2Si$ phase and mechanical properties were investigated in Mg-7%Al-0.5%Si casting alloy. It was found that the addition of 0.3%Bi changed the $Mg_2Si$ morphology from coarse Chinese script type to polygonal type, and significantly decreased the size to ~5 ${\mu}m$ or less with the increase of number density. The modification of $Mg_2Si$ phase by the addition of Bi resulted in the improvement of tensile properties of the Mg-Al-Si alloy at RT and $175^{\circ}C$.

Properties of Pb(Zr, Ti)$\textrm{O}_3$ Ferroelectric Thin Films on MgO/Si Substrate by RF Sputtering (RF 스퍼터링에 의해 MgO/Si 기판위에 증착된 Pb(Zr, Ti)$\textrm{O}_3$ 강유전체 박막의 특성연구)

  • Jang, Ho-Jeong;Seo, Gwang-Jong;Jang, Ji-Geun
    • Korean Journal of Materials Research
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    • v.8 no.12
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    • pp.1170-1175
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    • 1998
  • PZT films without lower electrode were deposited on the highly doped Si(100) substrate with MgO buffer layer (Mgo/si) by RF magnetron sputtering method followed by the rapid thermal annealing at $650^{\circ}C$ . We investigated the dependences of the crystalline and electrical properties on the MgO thickness and the RTA post annealing. The PZT films on bare Si (without MgO) showed pyrochlore crystal structure while those on MgO(50 )/Si substrates showed the typical perovskite crystal structures. From SEM and AES analysis, the thickness of PZT films was about 7000 showing relatively smooth interface. The depth profiles indicated that atomic species were distributed homogeneously in the PZT/MgO/Si substrate. The dielectric constant($\varepsilon_{r}$ ) and remanent polarization(2Pr) were about 300 and $14\mu$C/$\textrm{cm}^2$;, respectively. The leakage current was about $3.2\mu$/A$\textrm{cm}^2$.

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Effect of $CaTiO_3$Additions on the Microwave Dielectric Properties of $Mg_2$$SiO_4$-$ZnAl_2$$O_4$Ceramics with Low Dielectric Constant (저유전율을 갖는 $Mg_2$$SiO_4$-$ZnAl_2$$O_4$계 세라믹스의 $CaTiO_3$첨가에 따른 고주파 유전특성)

  • 박일환;김현학;김경용;김병호
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.12
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    • pp.1017-1024
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    • 2000
  • Effect of the microwave dielectric properties and the microstructure on a mole fraction(x=0.1~0.9) of (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$ ceramics was investigated. When (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$(x=0.1~0.9) ceramics were sintered at 130$0^{\circ}C$, 135$0^{\circ}C$ and 140$0^{\circ}C$ for 2hr, the microwave dielectric properties were obtained $\varepsilon$r=6.8~8.3, Q.f$_{0}$=36000~77600. On the other hand, the temperature coefficients of resonant frequency($\tau$$_{f}$) were obtained in the properties of -62ppm/$^{\circ}C$ to -49ppm/$^{\circ}C$. In order to adjust the temperature coefficient of resonant frequency($\tau$$_{f}$), CaTiO$_3$was added in (1-x)Mg$_2$SiO$_4$-xZnAl$_2$O$_4$ceramics. 0.7Mg$_2$SiO$_4$-0.2ZnAl$_2$O$_4$-0.1CaTiO$_3$ceramics sintered at 135$0^{\circ}C$ for 2hr showed the excellent microwave dielectric properties of $\varepsilon$r=7.7, Q.f$_{0}$=32000, and $\tau$$_{f}$=-7.9 ppm/$^{\circ}C$.EX>.>.EX>.

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Microstructure and Precipitation Behaviour of Mg-6Zn-1.5Si Alloys (Mg-6Zn-2Cu 및 Mg-6Zn-1.5Si합금의 미세조직 및 석출거동)

  • Kim, Yu-Yeong;An, In-Seop;Nam, Tae-Hyeon
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.362-367
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    • 1998
  • Mg-6Zn-2Cu 및 Mg-6Zn-1.5Si(wt%)합금의 미세조직 및 석출거동을 조사하였다. 합금은 $4 x 10^{-4}$ 의 진공분위기에서 제조하였고 용체화처리는 $435^{\circ}C$에서 8시간 행하였다. Mg-6Zn합금에 1.5wt.%Si를 첨가한 합금에서는 입계 및 입내에 $10\mu\textrm{m}$-2$\mu\textrm{m}$크기의 구형의 $MgZn_{2}$$Mg_{2}$Si상이 존재한다. 시효경화거동은 용체화처리된 Mg-6Zn-2Cu 및 Mg-6Zn-1.5Si합금에서 조사되었다. 결정립 미세화에 의한 경도증가효과는 Mg-6Zn-2Cu합금계에서 크게 나타났으나, 시효에 의한 경도증가효과는 Mg-Zn-Si합금계에서 크게 나타났다. 시효처리 후 생성된 석출상들은 투과전자현미경 분석결과 Mg-6Zn-2Cu합금에서는$ Mg_{2}$$Zn_{3}$이었고 Mg-6Zn-1.5Si 합금에서는 $Mg_{2}$$Zn_{11}$ /이었다.

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A Study on the Development for the Vehicle Engine Mountion Bracket Using Squeeze Casting (스퀴즈 캐스팅 제조법에 의한 자동차 엔진 마운틴 브래킷 개발에 관한 연구)

  • Kim, S.H.
    • Journal of Power System Engineering
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    • v.7 no.4
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    • pp.44-48
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    • 2003
  • Alumium alloys casting are gaining increased acceptance in the automotive and electronic industeries and squeeze casting is the most efficient method of manufacturing such mass produced parts. This study has been investigated the microstructures and mechanical properties of Al-7.0Si-0.4Mg(AC4C)alloy fabricated by squeeze casting process for development of Engine Mountain Bracket. The microstructure of squeeze casted specimen were composed of eutectic structure Alumimim solid solution and $Mg_2Si$ precipitates. The tensile strength of as-solid solution treatment Al-7.0Si-0.4Mg alloy revealed 2985MPa. It was found that Al-7.0Si-0.4Mg alloy have good aging hardening effect results are presented to show the validity of the control method.

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Thermal Sprayed AlSiMg/TiC Composite Coatings : Fabrication of Powder and Characteristics of Coatings (I) (AlSiMg/TiC 복합 용사 피막 : 분말제조 및 피막 특성(I))

  • 양병모;변응선;박경채
    • Journal of Welding and Joining
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    • v.18 no.5
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    • pp.98-104
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    • 2000
  • Aluminum alloys are being employed in automobile parts as strive to reduce overall vehicle weight to meet demands for improved fuel economy and reduction in vehicle emissions. Al-based composites reinforced with ceramic ($Al_2O_3,\;SiC,\;TiC\;and\;B_4C$) applications in a variety of components in automotive engines, such as liners, where the tribological properties of the material are important. In this study, Al-base composites reinforced with TiC particle powders has been developed for producing plasma spray coatings. The composite plasma spray powders were prepared Al-13Si-3Mg(wt%) alloy with TiC(40, 60 and 80wt%) particles ($0.2~5{\mu}textrm{m}$) by drum type ball milling. The composite powders ($36~76{\mu}textrm{m}$) were sprayed with plasma torch. Plasma sprayed coatings were heat-treated at $500^{\circ}C$ for 3 hours. The wear resistances of the plasma sprayed coatings were found to decrease with increasing TiC content and improved with heat treatment. AlSiMg-40% TiC heat-treated coatings were showed the best wear resistance in this study.

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