• Journal of Institute of Control, Robotics and Systems
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• v.21 no.9
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• pp.875-880
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• 2015

Traditional semiconductor process control has been performed through statistical process control techniques in a constant process-recipe conditions. However, the complexity of the interior of the etching apparatus plasma physics, quantitative modeling of process conditions due to the many difficult features constraints apply simple SISO control scheme. The introduction of the Advanced Process Control (APC) as a way to overcome the limits has been using the APC process control methodology run-to-run, wafer-to-wafer, or the yield of the semiconductor manufacturing process to the real-time process control, performance, it is possible to improve production. In addition, it is possible to establish a hierarchical structure of the process control made by the process control unit and associated algorithms and etching apparatus, the process unit, the overall process. In this study, the research focused on the methodology and monitoring improvements in performance needed to consider the process management of future developments in the semiconductor manufacturing process in accordance with the age of the APC analysis in real applications of the semiconductor manufacturing process and process fault diagnosis and control techniques in progress.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.11 s.353
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• pp.14-18
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• 2006

Optical interferometer is used for various optical measurement fields in optical metrology and biomedical measurements. In an optical interferometer, optical delay line has to change the optical path length of a reference arm to match with that of a sample in and it's speed was limited by reference arm movement speed. In this paper, we proposed an all-fibered RSODRapid Scanning-speed Optical Delay) without any mechanical movement, and we applied this system to optical interferometer. Experimental setup is consist of pulse laser source (center wavelength 1304nm, pulse width 30ps, repetition rate 10GHz), two phase modulators and dispersive shifted fiber. As experimental results, we obtain the maximum time delay of 11ps at 10MHz repetition rate, and it is easily tuneable the time delay by modulation frequency and modulation voltage.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.8 s.111
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• pp.753-759
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• 2006

Generally, the Wheeler cap method is used to measure the efficiency of small antennas. This method often gives an unreliable efficiency when the antenna has a complicated operating principle. However, if the high-order circuit model which more closely represents the input impedance of the antenna is used in Wheeler cap method, then more accurate efficiency can be achieved. In this paper, we propose a novel method that can build the high-order circuit model using transformer circuits with the genetic algorithm(GA). To efficiently reduce the searching space in the GA and improve the convergence of the GA process, we suggest a novel scheme that finds appropriate initial values. Finally we verify the proposed method by measuring the efficiency of some passive RFID tag antennas.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.2
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• pp.64-72
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• 2014

In the past, prism patterns have been linear triangular shapeswith a $90^{\circ}$ angle; however, new micro prism patterns having acute angles or obtuse angles have recently been the subject of demandin the display, lighting and photovoltaic industries. Micro-cutting experiments for micro-prism patterns having $60^{\circ}$, $90^{\circ}$, and $120^{\circ}$ angles on an electroplated Ni mold were performed and it was found in this study that the specific cutting resistance increased with a decrease in the tool angles (prism pattern angles). The cause of this variation had been thought to be the increase of the ploughing force due to tip rounding and the friction force due to the edge effect. However, the depth of the cut was large enough that it was possible to neglect these effects. Therefore, this study introduced the concept of representative stress of indentation. The measured stress was varied according to the indentation depth eventhoughthetestedspecimenswereidentical ; the varied stress was termed the representative stress. According to indentation theory, the strain that the Ni mold experienced increased with a decrease in the tool angle. Based on the stress-strain relationship, higher strain means higher stress and higher specific cutting resistance. Therefore, the specific cutting resistance was higher at smaller tool angles that had higher strain and stress.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.5
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• pp.422-429
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• 2013

It is of great importance to localize leakages in complex pipelines for assuring their safety. A sensor array that can detect where leakages occur enables us to monitor a wide area with a relatively low cost. Beamforming is a fast and efficient algorithm to estimate where sources are, but it is generally made use of in free field condition. In practice, however, many pipelines are placed in a closed space for the purpose of safety and maintenance. This leads us to take reflected waves into account to the beamforming for interior leakage localization. Beam power distribution of reflected waves in a closed space is formulated, and spatial average is introduced to suppress the effect of reflected waves. Computer simulations and experiments ensure how the proposed method is effective to localize leakage in a closed space for structural health monitoring.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.39 no.2
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• pp.72-81
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• 2016

There can be included a variety of uncertainties in all measurement results whether we can perceive or not on the causes. These uncertainties may end up in lowering the reliability of measurement results and also deteriorate the level of quality. For the purpose, we tried to combine the strengths of measurement uncertainty and measurement system analysis together to present a practical flowchart so as to verify those potential variation factors in general measurement processes. As a case study, we did an experiment and gathered data on the length between two holes of an engine cylinder head which is a core part for vehicles with a coordinate measuring machine and estimated nine uncertainty factors of it. Consequently, it was identified that the four primary factors among the nine which were related to the measurement standard, random errors or spread of the repeat measurements, differences between the coefficients of thermal expansion and the environment especially had been the influence around the laboratory. Since it is impossible to analyze the equipment and appraisal variations respectively through the only measurement uncertainty, we have used the measurement system analysis following the flowchart. Showing the result of being just about 0.5% lower for the appraisal variation, and the equipment variation occupied about 7% for the total Gage R&R. Through this research, we have come to a conclusion that much more detail analysis on variation factors can be possible to be identified in measurement processes by using the developed flowchart which is composed of measurement uncertainty and measurement system analysis. Therefore, we expect engineers who are involved in quality and measurements to utilize this developed method.

• Korean Journal of Optics and Photonics
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• v.17 no.1
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• pp.68-74
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• 2006

We have extracted an optical clock signal from a return-to-zero(RZ) pseudorandom bit sequence(PRBS) and non-return-to-zero(NRZ) PRBS data in a pulsation multi-section laser diode with DFB reflector. The ms timing jitter achieved less than 1 ps for the input 11.727 Gbit/s RZ PRBS and NRZ PRBS data. The PRE data wasconverted from the NRZ data using an NRZ to pseudo-return to zero(PRZ) converter module. The optical clock was extracted from the PRZ data which contains the clock components. Although the input PRZ data gives a timing jitter of 2 ps, the extracted clock has timing jitter of ${\~}$1 ps.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.2
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• pp.128-133
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• 2015

This paper describes the construction of a static 3D ultrasonography image by tracking the radiation beam position during the handy operation of a 1D array probe to enable point-of-care use. The theoretical model of the transformation from the translational and rotational information of the sensor mounted on the probe to the reference Cartesian coordinate system was given. The signal amplification and serial communication interface module was made using a commercially available sensor. A test phantom was also made using silicone putty in a donut shape. During the movement of the hand-held probe, B-mode movie and sensor signals were recorded. B-mode images were periodically selected from the movie, and the gray levels of the pixels for each image were converted to the gray levels of 3D voxels. 3D and 2D images of arbitrary cross-section of the B-mode type were also constructed from the voxel data, and agreed well with the shape of the test phantom.

• Korean Journal of Applied Biomechanics
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• v.21 no.5
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• pp.645-652
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• 2011

The purpose of this study was to analyze, in real time, the glide motion and release motion of domestic athletes and gold and bronze medalists employing the glide technique for the men's shot put at the Daegu World Athletic Championship in 2011. In the glide motion, the Korean athletes had a relatively high body center and shot put heights and lager stretching angles for their hips and knees. In the delivery phase, which shifts to the release phase, the Korean athletes showed slower vertical body center and shot put speeds, and they changed the phase, to the release phase by using a small body angle. In the release phase, the Korean athletes showed differences in their projection speeds and vertical body center speeds. The world-famous players showed high angle speeds, which refer to the composition of the rotation force at the moment of release (body, hip, and shoulder line). In the release phase, the Korean athletes did not have fully stretched hip and knee angles, which might have negatively influenced the vertical speed. Because the Korean athletes showed relatively low projection heights and projection angles. it was found that they need to enhance the muscular power of their, throwing arms and lower limbs.

• Korean Journal of Applied Biomechanics
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• v.21 no.5
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• pp.631-638
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• 2011

This study had two purposes. The first was to analyze the period of the final record set by the male shot-putters in the IAAF World Championships, Daegu 2011 from the point of view of kinematics. The other was to identify an efficient movement for shot putting based on the analysis. The research used the eight finalists of in the championship as subjects. We analyzed the seven most important kinematic factors in shot putting based on the type of technique: the execution time of the delivery phase, release velocity, release angle, release, center of mass (COM) velocity, and shot trajectories. The analytical results showed the following average figures for the record 12 meters: execution time of the delivery phase: (0.19 s), release height: (2.06 m), release angle: ($34.68^{\circ}$), release velocity: (13.25 m/s), angular velocity of shoulder: ($922.38^{\circ}/s$), and angular velocity of pelvis: ($479.50^{\circ}/s$). Further, the results showed that the highest COM velocity was 2.25 m/s and the shot trajectories were close to a straight line in the release phase.