• 한국진공학회지
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• 제9권2호
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• pp.102-109
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• 2000

chemical mechanical Polishing (CMP)공정 중 제거된 막과 연마재의 지꺼기를 제거하기 위하여 일반적으로 사용하는 scrubbing과 같은 기계적인 세정법으로는 기가급 소자 제조시에 요구되는 $10^{10}/\textrm{cm}^2$ 이하의 오염도에 도달하기 어렵다. 따라서 이러한 기계적인 세정법에 이어 충분히 제거되지 못한 금속오염물을 제거하기 위한 2차 세정이 요구된다. 본 논문에서는 리모트 플라스마 세정법과 UV/$O_3$ 세정법을 사용하여 oxide CMP 후에 웨이퍼 표면에 많이 존재하는 K, Fe, Cu등의 금속오염물을 제거하는데 대한 연구결과를 보고하고자 한다. 리모트 수소 플라스마 세정결과에 의하면, 세정시간이 짧을 수록, rf-power가 증가할수록 세정 효과가 우수한 것으로 나타났으며, CMP 공정 후 웨이퍼 표면에 특히 많이 존재하는 금속 불순물인 K, Fe, Cu 등의 오염 제거를 위한 최적 공정 조건은 세정시간이 1분, rf-power가 100 W인 것으로 나타났다. AFM 분석 결과에 의하면 rf-power의 증가에 따라 표면 거칠기가 미소하게 증가하는데 , 이것은 플라스마에 의한 손상 때문인 것으로 보이나 그 정도는 무시할만하다. 한편, UV/$O_3$ 세정의 경우에는 세정공정시간이 30 sec일때 가장 우수한 세정효과가 얻어졌다. 리모트 수소 플라스마 및 UV/$O_3$ 세정방법에 의한 Si 웨이퍼 표면의 금속 불순물 제거기구는 Si표면 금속오염의 하단층에 생성된 $SiO_2H^+$/ 및 $e^-$와 반응하여 $SiO^*$상태로 휘발될 때 금속불순물이 $SiO^*$에 묻어서 함께 제거되는 것으로 사료된다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제31회 춘계학술대회
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• pp.54-61
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• 2000

A method and results of classification of 4 types metallic wear debris were presented by using their color features. The color image of wear debris was used (or the initial data, and the color properties of the debris were specified by HSI color model. Particle was characterized by a set of statistical features derived from the distribution of HSI color model components. The initial feature set was optimized by a principal component analysis, and multidimensional scaling procedure was used for the definition of classification plane. It was found that five features, which include mean values of H and S, median S, skewness of distribution of S and I, allow to distinguish copper based alloys, red and dark iron oxides and steel particles. In this work, a method of probabilistic decision-making of class label assignment was proposed, which was based on the analysis of debris-coordinates distribution in the classification plane. The obtained results demonstrated a good availability for the automated wear particle analysis.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.465-466
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• 2002

In any mechanical system consisting of gears, shafts and/or bearings, the majority of metallic particles deposited into and carried by the lubrication system originate from the deterioration of oil-wetted working surfaces, even in proper lubrication system, due to failure mechanism (s) such as wear, fatigue and fretting corrosion. Determination of the point at which transition from normal to abnormal or to actual damage occurs has become a focus of attention in research activities for years, because it has been recognized that reliable, economic operation can be achieved through appropriate preventative measures. Known collectively from 'all size wear debris analysis' as early failure detection, the methods of testing for damage differ considerably, range from a micron or a submicron size debris analysis to Magnetic Chip Detector (MCD) ferrous debris analysis. This paper will be focused on the utilization of the low-cost analysis techniques for evaluation of industrial machinery condition.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2011년도 춘계학술대회 논문집
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• pp.1388-1398
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• 2011

Air pollution in subway tunnel is primarily caused from the wear of metallic materials. As undesirable substance, PM(Particulate Matter) can especially harm the health of passengers and workers as well as clog the main parts of rolling stock such as inverters. To improve the air quality in subway tunnel, SMRT(Seoul Metropolitan Rapid Transit Corporation) has developed anti-pollution devices such as Magnetic Dust Collector, Vacuum Cleaner For Rail Road and Particulate Removing Sprinkler Vehicle. Introducing these mechanical devices, this paper is mainly devoted to explaining the characteristics of collected dust according to the result of particle-size analysis and componential analysis.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 The IMAPS-Korea Workshop 2001 Emerging Technology on packaging
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• pp.104-109
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• 2001

A 355 nm (3.5 eV) neodymium:yttrium aluminum gamet laser, produced by a harmonic generator, was used to create silver metallic particles as seeds for nucleation in photosensitive glass containing Ag+ and Ce3+ ions. The pulse width and frequency of the laser were 8 ns and 10 Hz, respectively. Heat treatment was conducted at 570 C for 1 h, following laser irradiation, to produce crystalline growth, after which a LiAlSi3O8 crystal phase appeared in the laser-irradiated Li2O A1203 SiO2 glass. For the Present study, we compared the effect of laser-induced crystallization on glass crystallization with that of spontaneous crystallization by heat treatment.

• 마이크로전자및패키징학회지
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• 제7권2호
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• pp.43-46
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• 2000

Nd:YAG laser of 355 nm wavelength, which amounts to 3.5 eV, produced by a harmonic generator was used to create Ag metallic particles as seeds for nucleation in photosensitive glass containing $Ag^+$ and $Ce^{3+}$ . The pulse widths and frequency of the laser were 8ns and 10 Hz, respectively. For crystalline growth, heat-treatment following laser irradiation was carried out at $570^{\circ}C$ for 1h. Then, the $LiAlSi_3O^8$ crystal phase appeared in the laser irradiated lithium aluminum silicate glass. We present the effect of laser-induced nucleation compared with spontaneous nucleation by heat treatment fur crystallization in the glass.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2003년도 춘계학술대회 논문집
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• pp.379-380
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• 2003

연소나 폐기물 감량화 처리를 위해 이루어지는 소각과정에서 방출되는 대기오염물질은 소각재의 다양한 특성으로 인해 배출물의 특성파악이 매우 어렵고 그로 인해 제어에 많은 어려움을 겪고 있다. 연소 혹은 소각과정에서 에어로졸을 제어하는 것은 대기 중에서 발견되는 중금속성분을 근본적으로 줄이는 기본적인 조치로서 상당히 중요한 역할을 한다(Natusch and Wallace, 1974; Oppelt, 1986; Oberdorster et al., 1995). 본 연구에서는 소각공정에서 금속성 에어로졸 형태로 배연기체 중에 혼합되어 배출되는 여러 가지 금속성분 중 양적으로 많이 배출되는 납성분의 제어를 위한 기초연구를 수행하였다. (중략)

• 한국분말재료학회지
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• 제5권2호
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• pp.139-144
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• 1998

We have evaluated the role of Ag additions on the strength, fracture toughness, elastic modulus and resistance to thermal shock of $YBa_2Cu_3O_{7-x}$(YBCO) superconductor. Addition of 10 vol.% Ag improved strength and fracture toughness, whereas, decreased elastic modulus of YBCO. In addition, YBCO-Ag composites improved resistance to thermal shock probably due to enhanced strength, fracture toughness and thermal conductivity as a result of Ag addition. It is to be noted that YBCO-Ag made by mixing with $AgNO_3$ solution showed slightly higher strength, fracture toughness and resistance to thermal shock, compared to that made by mixing with metallic Ag powder. These improvements are believed to be due to the microstructure of more finely and uniformly distributed Ag particles.

• 한국분말재료학회지
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• 제9권5호
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• pp.322-328
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• 2002

Fe-Co nanocomposite powders with different composition were prepared by chemical vapor condensation (CVC) process and their characterizations were studied by means of X-ray diffraction, transmission electron microscopy, and vibrating sample magnetometer. The particles having the mean size of 5~25 nm consisted of metallic cores and oxide shells. The Co contents and particle size increased with increasing the carrier gas flow rate of Co precursor. The saturation magnetization and coercivity increased with increasing Co content. and the saturation magnetization maximized at the 40 wt.%Co. The Fe-Co nanocomposite powder oxidized at $400^{\circ}C$ showed the maximum coercivity of 1739 Oe.

• 한국분말재료학회지
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• 제11권4호
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• pp.328-332
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• 2004

Fe nanopowders were successfully synthesized by plasma arc discharge (PAD) process using Fe rod. The influence of chamber pressure on the microstructure was investigated by means of X-ray Diffraction (XRD), Field Emission Scanning Electron Microscope (FE-SEM), Transmission Electron Microscopy (TEM) and X-ray Photoelectron Spectroscopy (XPS). The prepared particles had nearly spherical shapes and consisted of metallic cores (a-Fe) and oxide shells (Fe$_{3}$O$_{4}$), The powder size increased with increasing chamber pressure due to the higher dissolution and ejection rate of H$_2$ and gas density in the molten metal.