• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 추계종합학술대회 논문집
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• pp.203-207
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• 1999

In this paper we report new integration technology developed for three-dimensional metallic microstructures in an arbitrary shape. We have developed the two fabrication methods: Multi-Exposure and Single-Development (MESD) and Sacrificial Metallic Mold(SMM) techniques. Three-dimensional photoresist mold can be formed by the MESD method while unlimited number of structural levels can be realized by the SMM technique. Using these two techniques we have fabricated solenoid inductors and levitated spiral inductors for RF applications. We have achieved peak Q- factors over 40 in the 2-10㎓ range, the highest number among the inductors reported to date. Finally, we propose "On-Chip Passives" as a post IC process for monolithic integration of inductors, tunable capacitors, microwave switches, transmission lines, and mixers and filters toward future single-chip transceiver integration.

• 한국재료학회지
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• 제15권4호
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• pp.281-284
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• 2005

Room and high temperature deformation behaviors of Cu-Zr-Ti-Pd bulk metallic glasses produced by copper mold casting were investigated. The addition of Pd was shown to enhance the glass forming ability and thermal stability of Cu-Zr-Ti base bulk metallic glass. The compressive strength of $Cu_{55}Zr_{30}Ti_{10}Pd_5$ bulk metallic glass was 2230 MPa with 1.8 plastic strain. The stress overshoot and yield drop phenomenon were observed below $487^{\circ}C$ and a drastic decrease in the flow stress was observed at $487^{\circ}C$. The stress overshoot is thought to be associated with stress-induced structural relaxation.

• 한국대기환경학회지
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• 제16권1호
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• pp.23-35
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• 2000

PM10, which is below 10 ${\mu}{\textrm}{m}$ in a diameter, has a high deposition in the lung or the bronchus by breathing and is generally composed of a lot of organic matters, viruses, algae, mold, and metallic elements that are very toxic to people. This study identified the characteristics of concentration of PM10 and air-borne jmetallic elements produced in the industrial city, Ulsan, and analyzed the correlatuion between sources and generation patterns of PM10 and metallic elements. We classified the five areas(green, residential, heavy traffic, mechanic, and petrochemcal and non-ferrous metal) which might have different characteristics of sources of PM10 and metallic elements. The average concentrations of PM10 in the five areas were as follows(petrochemical and non-ferrous metal(99.9$\mu\textrm{g}$/㎥)>mechanic(77.5 $\mu\textrm{g}$/㎥)>heavy traffic(47.1 $\mu\textrm{g}$/㎥)>residential(39.3 $\mu\textrm{g}$/㎥)>green(32.8 $\mu\textrm{g}$/㎥)). Those of petrochemical and non-ferrous metal areas were higher than other areas. In this study, the average concentration trend of metallic elements contained in PM10 are shown as follows: Fe>Zn>Pb>Cu>Mn>Cr>As>Cd>Sn>Hg, respectively. The metallic elements identified in PM10 showed the highest concentration in the petrochemical and non-ferrous areas. Metal combinations showed that a high correlation among concentrations of heavy metals were as follows: As, Cd and Fe in the residential area; Zn, Mn, Cu and Pb in the mechanical area; and Zn, Cu, As, Pb in the petrochemical and non-ferrous industrial area.

• 한국재료학회지
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• 제19권4호
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• pp.224-227
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• 2009

Nanofabrication is an essential process throughout industry. Technologies that produce general nanofabrication, such as e-beam lithography, dip-pen lithography, DUV lithography, immersion lithography, and laser interference lithography, have drawbacks including complicated processes, low throughput, and high costs, whereas nano-transfer printing (nTP) is inexpensive, simple, and can produce patterns on non-plane substrates and multilayer structures. In general nTP, the coherency of gold-deposited stamps is strengthened by using SAM treatment on substrates, so the gold patterns are transferred from stamps to substrates. However, it is hard to apply to transfer other metallic materials, and the existing nTP process requires a complicated surface treatment. Therefore, it is necessary to simplify the nTP technology to obtain an easy and simple method for fabricating metal patterns. In this paper, asnTP process with poly vinyl alcohol (PVA) mold was proposed without any chemical treatment. At first, a PVA mold was duplicated from the master mold. Then, a Mo layer, with a thickness of 20 nm, was deposited on the PVA mold. The Mo deposited PVA mold was put on the Si wafer substrate, and nTP process progressed. After the nTP process, the PVA mold was removed using DI water, and transferred Mo nano patterns were characterized by a Scanning electron micrograph (SEM) and Energy Dispersive spectroscopy (EDS).

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 추계학술대회논문집
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• pp.367-370
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• 2003

In this study, application of SAM (self-assembled monolayer) to nano replication process as an anti-adhesion layer was presented to reduce the surface energy between the nano mold and the replicated polymeric nano patterns. The electron beam lithography was used for master nano patterns and the electorforming process was used to fabricate the nickel nano stamper. Alkanethiol SAM as an anti-adhesion layer was deposited on metallic nano stamper using solution deposition method. To analyze wettability and adhesion force of SAM, contact angle and LFM (Lateral Force Microscopy) were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. It was found that the surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the quality of SAM on the nickel stamper maintained under the actual molding environments.

• 한국주조공학회지
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• 제20권2호
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• pp.80-88
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• 2000

Continuous casting equipment was designed to cast the metallic uranium rods, and a thermal analysis was carried out to calculate the temperature and solidification profiles. Fluid flow and heat transfer analysis model including the effects of phase change was used to simulate the continuous casting process by finite volume method. In the design of continuous casting equipment, the casting speed, pouring temperature and cooling conditions should be considered as significant factors. In this study, the effects of casting speed, pouring temperature, and air gap between the uranium and mold were investigate. The results represented that the temperature and solidification profiles of continuous casting equipment varied with the casting speed, pouring temperature, and air gap.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.237-240
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• 2005

The demand of micro electrical mechanical system (MEMS) bio/chemical sensor is rapidly increasing. To prevent the contamination of sensing area, a filtration system is required in on-chip total analyzing MEMS bio/chemical sensor. A nano-filter was mainly applied in some application detecting submicron feature size bio/chemical products such as bacteria, fungi and so on. We suggested a simple nano-filter fabrication process based on replication process. The mother pattern was fabricated by holographic lithography and reactive ion etching process, and the replication process was carried out using polymer mold and UV-imprinting process. Finally the nano-filter is obtained after removing the replicated part of metal deposited replica. In this study, as a practical example of the suggested process, a nano-dot array was replicated to fabricate nano-filter fur bacteria sensor application.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.413-413
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• 2014

In this paper, we present a fabrication method of functionalized gold nanostructures on flexible substrate that can be implemented for plasmonic sensing application. For biomolecular sensing, many researchers exploit unconventional lithography method like nanoimprint lithography (NIP), contact transfer lithography, soft lithography, colloidal transfer printing due to its usability and easy to functionalization. In particular, nanoimprint and contact transfer lithography need to have anti-adhesion layer for distinctive metallic properties on the flexible substrates. However, when metallic thin film was deposited on the anti-adhesion layer coated substrates, we discover much aggravation of the mold by repetitive use. Thus it would be impossible to get a high quality of metal nanostructure on the transferred substrate for developing flexible electronics based transfer printing. Here we demonstrate a method for nano-pillar mold and transfer the controllable nanoparticle array on the flexible substrates without an anti-adhesion layer. Also functionalization of gold was investigated by the different length of thiol applied for effectively localized surface plasmonic resonance sensing. First, a focused ion beam (FIB) and ICP-RIE are used to fabricate the nanoscale pillar array. Then gold metal layer is deposited onto the patterned nanostructure. The metallic 130 nm and 250 nm nanodisk pattern are transferred onto flexible polymer substrate by bi-layer functionalized contact imprinting which can be tunable surface energy interfaces. Different thiol reagents such as Thioglycolic acid (98%), 3-Mercaptopropionic acid (99%), 11-Mercaptoundecanoic acid (95%) and 16-Mercaptohexadecanoic acid (90%) are used. Overcoming the repeatedly usage of the anti-adhesion layer mold which has less uniformity and not washable interface, contact printing method using bi-layer gold array are not only expedient access to fabrication but also have distinctive properties including anti-adhesion layer free, functionalized bottom of the gold nano disk, repeatedly replicate the pattern on the flexible substrate. As a result we demonstrate the feasibility of flexible plasmonic sensing interface and anticipate that the method can be extended to variable application including the portable bio sensor via mass production of stable nanostructure array and other nanophotonic application.

• 한국주조공학회지
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• 제26권2호
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• pp.77-84
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• 2006

The effect of alloy composition on the glass forming ability (GFA) of the Ca-rich Ca-Mg-Zn alloys has been investigated in $Ca_{65}Mg_{5+x}Zn_{30-x}$ and $Ca_{55+x}Mg_{15}Zn_{30-x}$ (x=0, 5, 10, 15, 20) alloys. In a wide composition range of 15-25% Zn and 10-20% Mg bulk metallic glass (BMG) samples with the diameter larger than 6 mm are fabricated by conventional copper mold casting method in air atmosphere. Among the alloys investigated, the $Ca_{65}Mg_{15}Zn_{20}$ alloy exhibits the highest GFA enabling to form BMG sample with the diameter of at least 15 mm. The crystalline phase formed during solidification of $Ca_{65}Mg_{15}Zn_{20}$ ($D_{max}=15\;mm$) could be identified as a mixture of $Ca_3Zn$ and $CaMg_2$ cause by the redistribution of the constituent elements on long-range scale. The compressive fracture strength and fracture elongation of the $Ca_{65}Mg_{15}Zn_{20}$ BMG are 602 MPa and 2.08% respectively. The ${\sigma}$ parameter which has been recently proposed for evaluating GFA exhibits better correlation with GFA of Ca-Mg-Zn alloys than other parameters suggested so far such as ${\Delta}T_x$, $T_{rg}$, K, ${\gamma}$, and ${\Delta}T^*$ parameters.

• Korean Chemical Engineering Research
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• 제60권2호
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• pp.295-299
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• 2022

본 논문에서는 범퍼 스키드 플레이트 및 아웃사이드미러 하우징 부품에 적용되는 polypropylene (PP)와 acrylonitrile styrene acrylate (ASA) 소재를 활용하여 무도장 메탈릭 소재 구현에 대해 연구하였다. 금속 효과를 극대화하기 위해 알루미늄 입자의 종류, 크기, 함량을 최적화하였고 웰드 라인을 은폐하기 위해 종횡비가 상이한 하이브리드 알루미늄 입자를 사용하였다. 또한 부품 표면에 발생되는 플로우 마크를 개선하기 위해 유동성을 제어하였으며 사출 해석을 수행하였다.