• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.77-77
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• 1998

Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.108-108
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• 2009

Precipitation hardening nickel base alloys strengthened by intermetallic compounds are extensively used to manufacture on the components of the hot section of gas turbine engines. To ensure structural stability and maintenance of strength properties for a long time, nickel alloys are normally subjected to complex alloying with elements to form ${\gamma}'$(gamma prime). Such alloys have a limited weldability, are normally welded in high temperature. However, laser welding have a merit that applies in room temperature as easy control of welding parameter and heat input. In this study, $CO_2$ laser welding is applied on STS304 plate with good ductility and precipitation hardening nickel base alloy (GTD111DS) used blade material. Also, several welding parameters are applied on powder, power and travel speed. There are no cracks in Rene 80 and IN 625 powder when STS304 plate is used. But IN 625 powder has no cracks and Rene 80 have some cracks in welds with GTD111DS substrate. Adjusting of welding parameter is tried to apply Rene 80 having a good strength compare to IN 625. In the result of adjusted welding parameter, optimized welding parameters are set with low power, low feed rate and high welding speed. Tensile strength of GTD111DS substrate with Rene 80 powder is same and over than the one of base metal in room temp and high temp($760^{\circ}C$).

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.14 no.2
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• pp.169-178
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• 2016

The properties of wastes for melting need to be considered to minimize the maintenance of refractory and to discharge the molten slags smoothly from a plasma torch melter. When the nonflammable wastes from nuclear facilities such as concrete debris, glass, sand, etc., are melted, they become acid slags with low basicity since the chemical composition has much more acid oxides than basic oxides. A molten slag does not have good characteristics of discharge and is mainly responsible for the refractory erosion due to its low liquidity. In case of a stationary plasma torch melter with a slant tapping port on the wall, a fixed amount of molten slags remains inside of tapping hole as well as the melter inside after tapping out. Nonmetallic slags keep the temperature higher than melting point of metal because metallic slags located on the bottom of melter by specific gravity difference are simultaneously melted when dual mode plasma torch operates in transferred mode. In order to minimize the refractory erosion, the compatible refractories are selected considering the temperature inside the melter and the melting behavior of slags whether to contact or noncontact with molten slags. An acidic refractory shall not be installed in adjacent to a basic refractory for the resistibility against corrosion.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.532-538
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• 2006

The carbonization and activation conditions for the PAN-based ACF of various grade were investigated to obtain the optimun activation condition with high surface area. And the surface properties and the absorption performance of toxic gas for terror were examined toward the PAN-ACF with the highest surface area. In the test results the surface area increased with increase of the activation temperature, but decreased with increase of the carbonization temperature. After carbonization condition ($900^{\circ}C$-15min) and activation condition ($900^{\circ}C$-30 min), we got the ACF with the highest surface area of $1204m^2/g$. In the absorption test of iodine and toxic gas for terror, this ACF showed more excellent absorption performance than the existing carbon-based adsorbent. Also, in order to give the function characteristic for a selective absorption, the stable nanoparticles of the Ag, Pt, Cu, Pd were prepared and impregnated on the PAN-based ACF in replacement of the existing method supporting metal catalysis. And were analyzed the surface characteristics and the $SO_{2}$ adsorption characteristics. In the $SO_{2}$ absorption performance test of the PAN-ACF with the impregnated nanoparticles, it wasn't change breakthrough time of Ag, Pt, Cu nanoparticle supported the PAN-ACF comparing with breakthrough time (326 sec) of the non supported PAN-ACF but Pd nanoparticle supported the PAN-ACF achieved excellent $SO_{2}$ absorption performance which has break-through time 925 sec.

• Applied Chemistry for Engineering
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• v.28 no.5
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• pp.576-580
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• 2017

In the present paper, the thermal deactivation characteristics of plate-type commercial $V_2O_5-WO_3/TiO_2$ SCR catalyst were investigated. For this purpose, the plate-type catalyst was calcined at different temperatures ranging from $500^{\circ}C$ to $800^{\circ}C$ for 3 hours. Structural and morphological changes were characterized byXRD, specific surface area, porosity, SEM-EDS and also NOx conversion with ammonia according to the calcine temperature. The NOx conversion decreased with increasing calcine temperature, especially when the catalysts were calcined at temperatures above $700^{\circ}C$. This is because the crystal phase of $TiO_2$ changed from anatase to rutile, and the $TiO_2$ grain growth and $CaWO_4$ crystal phase were formed, which reduced the specific surface area and pore volume. In addition, $V_2O_5$, which is a catalytically active material, was sublimated or vaporized over $700^{\circ}C$, and a metal mesh used as a support of the catalyst occurred intergranular corrosion and oxidation due to the formation of Cr carbide.

• Journal of the Institute of Convergence Signal Processing
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• v.19 no.2
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• pp.61-67
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• 2018

Welding preheating means that the surface of the base material to which the metal is welded before the main welding is heated to a constant temperature. It prevents the cracks of the adjacent influences such as reduction of material hardening degree by controlling the cooling rate, suppression of segregation of impurities, prevention of thermal deformation, and moisture removal. For this reason, it is a necessary operation for high quality welding. Induction heating is an efficient heating method that converts electric energy into heat energy by applying electromagnetic induction phenomenon. Compared with combustion heat generated by gas and liquid, it is clean, stable, and economical as well as rapid heating. It can be heated regardless of the shape, depth and material of the heating body by modifying the shape of the frequency and the coil with a simple structure. In this paper, we implemented a low frequency welding preheating system using induction heating technique and observed the temperature changes of coil resistance, inductance and automotive transmission parts according to the height of each transmission in winding coil for three kinds of automotive transmission parts. We confirmed that the change of current is a very important factor in the low frequency heating.

• Korean Journal of Food Science and Technology
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• v.35 no.3
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• pp.423-428
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• 2003

Stabilities of W/O emulsions containing eugenolchitosan (EuCs) prepared from chitosan and eugenol were compared to determine the optimal conditions for the ratio of water (core phase) to corn oil (continuous phase), the concentration of EuCs, storage temperature, and the extent of homo-mixing. The optimal ratio of water to corn oil was 2:3 (w/w). The effects of EuC concentrations, and singular vs. binary system of emulsifiers on the storage stability of the emulsion were investigated with EuCs and polyoxyethylene sorbitan monolaurate. The emulsion was stable, showing more than 95% emulsion stability index (ESI) value, when the concentration of EuCs was more than 0.18% (w/v). ESI value of binary emulsifier system was almost equal to that of singular emulsifier system at the concentration of 0.18% (w/v). At this singular emulsifier system, the W/O emulsion formed by EuCs had ESI value of 100%. The optimal concentration of EuCs was determined as 0.18% (w/v). The highest stability of the emulsion was obtained from the homo-mixing at 11,000 rpm for 10 sec and the storage temperature ranging $25{\sim}65^{\circ}C$. EuCs produced from this study was mutagenecity-negative on Ames test and contained no heavy metal ions.

• KSBB Journal
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• v.17 no.6
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• pp.571-576
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• 2002

Recombinant E. coli DH5 ${\alpha}$/pSB311 was made by cloning the genes encoding bacterial luciferase and aldehyde substrate proteins from Photohabdus luminescense, to complement defects of Lumistox, which is normally used in bioassays to monitor toxic substances in water environmental systems. The conditions for stable light production by the recombinant strains were investigated with respect to cell growth stage, cell number, and buffer conditions. The optimum growth stage was a middle-exponential stage with an OD$_{660nm}$ value of 0.6-0.7. ADout 10$^{6}$-10$^{7}$ cells per test tube was optimum for stable light emission. The effect of buffer was not significant if an optimum viable cell number was maintained. The bioluminescence of the recombinant E. coli harboring the lux operon of Photohabdus luminescense was not affected by temperature, while the bioluminescence of Lumistox was temperature sensitive. The recombinant E. coli was more sensitive to heavy metals (Cd, Cu, Hg, Zn) than Lumistox, because it does not require high concentrations of NaCl in the buffer.

• Journal of the Korean Electrochemical Society
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• v.10 no.1
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• pp.48-51
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• 2007

In order to investigate the effects of particle size and specific surface area(BET area) of spinel powder, $LiMn_2O_4$ were synthesized using metal oxide precursor by co-precipitation method(CoP) and solid state reaction (SSR) .X-ray diffraction(XRD) patterns revealed that the both prepared powder has a well developed spinel structure with Fd3m space group. The $LiMn_2O_4$ prepared by co-precipitation showed spherical morphology with narrow size distribution. However, the $LiMn_2O_4$ prepared by solid state reaction showed relatively smaller particles with irregular shape. The measured BET areas of the powers are $0.8m^2g^{-1}$ (CoP) and $3.6m^2g^{-1}$(SSR). The electrochemical performance of the Prepared $LiMn_2O_4$ powders was evaluated using coin type cells(CR2032) at elevated temperature ($55^{\circ}C$). The $LiMn_2O_4$ prepared by co-precipitation showed the better cycling performance(82.3%capacity retention at $50^{th}$ cycle) than that of the $LiMn_2O_4$(68.3%) prepared by solid state reaction at elevated temperature.

• Journal of the Korean Magnetics Society
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• v.17 no.1
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• pp.34-37
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• 2007

The crystallographic and magnetic properties of $Fe_{0.9}Zn_{0.1}Cr_2S_4$ have been studied by X-ray diffractometer(XRD), vibrating sample magnetometer(VSM) and $M\"{o}ssbauer$ spectroscopy measurement. The crystal structure was determined by the normal cubic spinel of space group Fd3m and the lattice constant was $a_0=9.9967\;{\AA}$. The specific phenomenon which looks like cusp pattern at 77 K was observed in magnetization corves(ZFC : Zero Field Cooling) under 100 Oe applied field. $N\acute{e}el$ temperature($T_N$) was determined to be 153 K by VSM and $M\"{o}ssbauer$ spectra. The asymmetric 8-line profile has been observed at 4.2 K, which was attributed by the colossal electric quadupole interaction(${\Delta}E_Q$), ${\Delta}E_Q$ has 2.22 mm/s at 4.2 K. The ${\Delta}E_Q$ abruptly decreases around 77 K and then it disappears above 77 K with diminishing of 8-line pattern. The isomer shift $\delta$ at room temperature is 0.48 mm/s relative to Fe metal, which means that the charge state of Fe ions is ferrous in character.