• Title/Summary/Keyword: Metal line

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Metallizations and Electrical Characterizations of Low Resistivity Electrodes(Al, Ta, Cr) in the Amorphous Silicon Thin Film Transistor (비정질 실리콘 박막 트랜지스터 소자 특성 향상을 위한 저 저항 금속 박막 전극의 형성 및 전기적 저항 특성 평가)

  • Kim, Hyung-Taek
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.05a
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    • pp.96-99
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    • 1993
  • Electrical properties of the Thin Film Transistor(TFT) electrode metal films were investigated through the Test Elements Group(TEG) experiment. The main purpose of this investigation was to characterize the electrical resistance properties of patterned metal films with respect to the variations of film thickness and TEG metal line width. Aluminum(Al), Tantalum(Ta) and Chromium(Cr) that are currently used as TFT electrode films were selected as the probed metal films. To date, no work in the electrical characterizations of patterned electrodes of a-Si TFT was accomplished. Bulk resistance$(R_b)$, sheet resistance$(R_s)$, and resistivities($\rho$) of TEG patterned metal lines were obtained. Electrical continuity test of metal film lines was also performed in order to investigate the stability of metallization process. Almost uniform-linear variations of the electrical properties with respect to the metal line displacements was also observed.

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A Study on the corrosion property by post treatment in the metal dry etch (Metal 건식각 후처리에 따른 부식 특성에 관한 연구)

  • Mun, Seong-Yeol;Kang, Seong-Jun;Joung, Yang-Hee
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2007.10a
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    • pp.747-750
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    • 2007
  • This study proposes that chlorine residue after metal etch as the source of metal corrosion, and charges should be removed by optimizing etch, PR strip and cleaning condition. Charges distributed along the metal line acts as a source of tungsten (W) plug corrosion when associated with following cleaning solution. In cleaning process after metal etch and PR strip, chemical selection is significantly important in terms of metal corrosion. Optimal corrosion preventive PH, no metal attack (choice of optimal inhibitants), high by product removal efficiency and optimal de ionized water treatment condition is critical to the metal corrosion prevention.

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Effect of Shield Line on Noise Margin and Refresh Time of Planar DRAM Cell for Embedded Application

  • Lee, Jung-Hwan;Jeon, Seong-Do;Chang, Sung-Keun
    • ETRI Journal
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    • v.26 no.6
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    • pp.583-588
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    • 2004
  • In this paper we investigate the effect of a shield metal line inserted between adjacent bit lines on the refresh time and noise margin in a planar DRAM cell. The DRAM cell consists of an access transistor, which is biased to 2.5V during operation, and an NMOS capacitor having the capacitance of 10fF per unit cell and a cell size of $3.63{\mu}m^2$. We designed a 1Mb DRAM with an open bit-line structure. It appears that the refresh time is increased from 4.5 ms to 12 ms when the shield metal line is inserted. Also, it appears that no failure occurs when $V_{cc}$ is increased from 2.2 V to 3 V during a bump up test, while it fails at 2.8 V without a shield metal line. Raphael simulation reveals that the coupling noise between adjacent bit lines is reduced to 1/24 when a shield metal line is inserted, while total capacitance per bit line is increased only by 10%.

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Finite Element Analysis on Stress Distribution in Base Metal-Ceramic Crown Margin Designs (유한요소법을 이용한 비귀금속-도재관 변연부 형태에 따른 응력 분포 분석)

  • Lee, Myung-Kon;Shin, Jung-Woog;Kim, Myung-Duk
    • Journal of Technologic Dentistry
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    • v.22 no.1
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    • pp.79-88
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    • 2000
  • The objective of this finite element method study was to analyze the stress distribution induced in a maxillary central incisor Ni-Cr base metal coping ceramic crowns with various margin design. Margin designs of crown in this experiment were knife-edge metal margin on chamfer finishing line of tooth preparation(M1), butt metal margin on shoulder finishing line(M2), reinforced butt metal margin on shoulder finishing line(M3), beveled metal margin on bevelde shoulder finishing line(M4). Two- dimensional finite element models of crown designs were subjected to a simulated biting force of 100N which was forced over porcelain near the lingual incisal edge. Base on plane stress analysis, the maxium von Miss stresses(Mpa) in porcelain venner was 0.432, in metal coping was 0.579, in dentin abutment was 0.324 for M1 model, and M2 model revealed in porcelain was 0.556, in metal coping was 0.511, in dentin was 0.339, and M3 model revealed in porcelain was 0.556, in metal coping was 0.794, in dentin was 0.383 for M4 model. All values of each material in metal-ceramic crown were much below the critical failure values.

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Improvement of Migration Lifetime by Dual-sized Grain Structure in 1% Si-Al Metal Line (이중 결정립 구조 1%Si-Al 금속선에 의한 Migration 수명의 개선)

  • 김영철;김철주
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.6
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    • pp.1-7
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    • 1993
  • After the 1%S-Al metal is deposited, a thin oxide is formed thereon. Then, a single charged Argon(Ar$^{+}$) is ion implanted into the oxide layer, thereby causing the metal grain in the upper surface of the metal layer to become amorphous. Consequently, the grain size will be reduced and the rough surface of the metal layer flattened. However, the remainder of the metal layer beneath the upper surface thereof will still exhibit large grain size and low resistance, because the Argon ion is only implanted to characterized by a dual-sized grain structure which served to reduce interlayer stress, thereby decreasing the rate of stress migration, and to lower the resistivity of the metal line, thereby enhancing the electromigration characteristic thereof. Experiments have shown that the metal line exhibits a metal migration rate which is approximately 700% less than the control group and a standard deviation which is approximately 200% less than these group.p.

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Coating effects of carbon nanotubes on metal meshes with various line-spaces and line-widths (다양한 선폭 및 선 간격을 갖는 금속 메쉬에 대한 탄소 나노튜브의 코팅 효과)

  • Hwang, Young-Jin;Kim, Bu-jong;Park, Jong-seol;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2015.07a
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    • pp.1147-1148
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    • 2015
  • This study demonstrates the coating effect of carbon nanotubes on metal meshes, which have been made with various line-spaces and line-width, for touch screen panels. The CNTs have been deposited on metal meshes via electrophoretic deposition (EPD). The sheet resistances, visible transmittances, visible reflectances have been measured before and after electrophoretic deposition. The experimental results confirm that CNT coating metal meshes with various line-spaces and line width can satisfy the requirements that are required for transparent electrodes of touch screen panels.

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A New Asymmetric Branch Line Hybrid Coupler without Ground Contact Problem of DGS (접지 접촉 문제가 없는 새로운 DGS 비대칭 브랜치 라인 하이브리드 결합기)

  • Lim, Jong-Sik;Cha, Hyeon-Won;Jeong, Yong-Chae;Park, Ung-Hee;Ahn, Dal
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.57 no.8
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    • pp.1416-1421
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    • 2008
  • A 10 dB branch line hybrid coupler included with defected ground structure (DGS) is proposed. In this contribution, a contact between the grounded metal housing and DGS is avoided, which has been a serious problem in applying DGS to high frequency circuits. An isolation between the metal housing and the DGS pattern is provided by inserting additional substrate between DGS and the metal package. Therefore, it is possible to design branch line hybrid couplers having highly asymmetric power dividing ratio using these DGS structure, which is demonstrated in this paper. The designed and fabricated branch line hybrid coupler using DGS is well packaged in a metal housing without touching the ground metal directly. The measurement is performed under realistic practical operating situations because it is packaged in a metal housing. The measured performances of the fabricated 10dB coupler shows a 1:9 asymmetric power dividing ratio at output ports, as predicted. In addition, the measured performances in terms of matching, isolation, and phase difference are in excellent agreement with the simulated characteristics.

Sequential conversion from line defects to atomic clusters in monolayer WS2

  • Gyeong Hee Ryu;Ren-Jie Chan
    • Applied Microscopy
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    • v.50
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    • pp.27.1-27.6
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    • 2020
  • Transition metal dichalcogenides (TMD), which is composed of a transition metal atom and chalcogen ion atoms, usually form vacancies based on the knock-on threshold of each atom. In particular, when electron beam is irradiated on a monolayer TMD such as MoS2 and WS2, S vacancies are formed preferentially, and they are aligned linearly to constitute line defects. And then, a hole is formed at the point where the successively formed line defects collide, and metal clusters are also formed at the edge of the hole. This study reports a process in which the line defects formed in a monolayer WS2 sheet expends into holes. Here, the process in which the W cluster, which always occurs at the edge of the formed hole, goes through a uniform intermediate phase is explained based on the line defects and the formation behavior of the hole. Further investigation confirms the atomic structure of the intermediate phase using annular dark field scanning transition electron microscopy (ADF-STEM) and image simulation.

A Study on the Weld Line Position Optimization for Hydroforming (Hydroforming을 위한 Weld line 최적배치에 관한연구)

  • 전병희
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.3
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    • pp.160-168
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    • 2000
  • Hydroforming is a metal forming process that enables circular metal tubes to be formed in to the parts with the complex cross section along the curved axial direction. Recently this hydroforming process is largely used for the production of the automotive parts. This paper presents the results of tube bending and hydroforming simulations in cases of the varying weld line positions of the tube. Ten cases of prebending and hydroforming simulations are carried out to find the optiaml weld line position.

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Analysis on the Stress and Economy of Feeder Supporting Metal Designed a Steel Pipe (강관을 이용한 급전선금구의 응력해석 및 경제성 분석)

  • Na, Hyun;Ahn, Young-Hoon;Lee, Ki-Won
    • Journal of the Korean Society for Railway
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    • v.11 no.5
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    • pp.499-503
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    • 2008
  • The catenary line and feeder line installed on same electrical pole in opened place of AC electrical rail-road. The Electrical pole has receive a different weight from the catenary line and feeder line. So we have designed the Feeder supporting metal with new shape and material based on this fact. And then we have examined the stability of Feeder supporting metal designed a steel pipe by FEM program. New steel pipe compared with existing steel pipe on a economy respect. That result give proof the stability and economy as feeder supporting steel. There-fore this device have a basic of Value Engineering, so we have the need of reflection to design as a device of new electrical pole.