• Title/Summary/Keyword: Metal Flow Line

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Improvement of Pad Lifetime using POU (Point of Use) Slurry Filter and High Spray Method of De-Ionized Water (POU 슬러리 필터와 탈이온수의 고분사법에 의한 패드수명의 개선)

  • 박성우;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.707-713
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    • 2001
  • As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

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An Automated Nesting and Process Planning System of Irregularly Shaped-Sheet Metal Product With Bending and Piercing Operation for Progressive Working (굽힘 및 피어싱 공정을 갖는 불규칙형상 제품의 프로그레시브 가공을 위한 네스팅 및 공정설계 자동화 시스템)

  • Choi, Jae-Chan;Kim, Byung-Min;Kim, Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.6
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    • pp.22-32
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    • 1998
  • This paper describes a research work of developing a computer-aided design of irregularly shaped-sheet metal product with bending and piercing operation for progressive working. An approach to the CAD system is based on the knowledge-based rules. Knowledge for the CAD system is formulated from plasticity theories, experimental results and the empirical knowledge of field experts. The system has been written in AutoLISP on the AutoCAD with a personal computer and is composed of five main modules, which are input and shape treatment, flat pattern-layout, production feasibility check, blank-layout, and strip-layout module. Based on knowledge-based rules, the system is designed by considering several factors, such as radius and angle of bend, material and thickness of product, complexities of blank geometry and punch profile, and availability of press. This system is capable of unfolding a formed sheet metal part to give flat pattern and automatically account for the adjustment of bend allowances to match tooling requirements by checking dimensions and the best utilization ratio of blank-layout within bending production feasibility area which is beyond ${\pm}30^{\circ}$ degrees intersecting angle between grain flow and bending edge line and which is suitable to progressive bending operation. Also the strip-layout drawing generated by a bending and a piercing operation according to punch profiles divided into automatically for external area of irregularly shaped-sheet metal product is displayed in graphic forms.

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A Study on the Exhaust Reduction of Diesel Particulates Using Ceramic Fiber Filters (세라믹 섬유필터를 이용한 디젤 입자상물질 배출저감에 관한 기초연구)

  • 주용남;홍민선;문수호;이동섭;임우택
    • Journal of Korean Society for Atmospheric Environment
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    • v.19 no.3
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    • pp.297-306
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    • 2003
  • Works were focused on back pressure characteristics of ceramic fiber filter on DPF (Diesel Particulate Filter) system and experiments were performed to select appropriate filter which can filter particulates. Filters were installed on metal -support tube which has openings for exhaust gas flow. Ceramic fiber filters with high specific surface area and adequate high temperature strength are commercially available for filtration of diesel particulates and in -situ hot regeneration. Thus, ceramic blanket and ceramic board which are used as insulating media were applied to filter and filtration apparatus was installed on exhaust gas line connected to 2.0 L diesel engine. Alternating filter structure to adapt DPF system, collection efficiency test of diesel particulates was measured. In case of ceramic blanket, pressure drop was low, caused by the destruction of soft structures. Also, particulate collection efficiency was decreased depending on loading time. In case of ceramic board, structure design was altered to reduce back pressure on DPF system. Structure design was altered to induce Z-flow by making 10 mm and 5 mm holes on the surface of media. Alteration of 5 mm hole showed that media have low back pressure but particulate collection efficiency was 77%, while 10 mm hole showed that of 90%.

Optic Module for Laser Integrated Machine (레이저 복합가공기용 광학모듈의 제작)

  • Shin, Dong-Sig;Lee, Jae-Hoon;Suh, Jeong
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1475-1480
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    • 2007
  • In the last few years, lasers have found new applications in production engineering as tools for surface treatment, cutting, welding, drilling and marking. So far, the laser has mainly been used in special laser processing machines ('laser-only') directly integrated into a production line or serving as stand-alone stations in the workshop. By combining conventional metal cutting technologies with laser processes in one machine, complete processing of a workpiece with different technologies in one setting can be realized. The main advantages are a reduction of the material flow between the production machines, which leads to a reduction in processing time and logistics, and an enhancement of manufacturing quality due to the processing in one setting. In addition to this approach new processing technologies such as laser-assisted machining are possible.

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Geophysical Surveys for Mapping of the AMD Contaminant Channels at an Abandoned Mine (폐광산의 AMD 오염영역탐지를 위한 지구물리탐사)

  • 김지수;최상훈;한수형
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2000.11a
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    • pp.258-261
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    • 2000
  • Geophysical surveys (electrical resistivity, self-potential, and magnetic methods) and streamwater sample analysis have been carried out at a site of tailings of waste deposits in an abandoned mine, Jangpoong, which is situated in Kowesan-Gun, Chungbuk-Do. The research was aimed at investigating the suitability of the various geophysical methods for detection of AMD (acid mine drainage) paths, and ultimately mapping of preferred AMD flow channels by incorporating the water sample analysis. Electrical resistivity section from the dipole-dipole line represents the low-resistivity zone trending northwest toward the stream nearby. The positions of the resistivity anomalies for AMD channels are well correlated to the ones from the various geophysical surveys. In addition they correspond to the sites of the higher peaks for the pH, EC, heavy metal content for the water sample data.

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Mechanical Loss Model for a Metal Belt CVT (금속벨트 CVT 동력전달 손실모델)

  • Ryu, Wan-Sik;Kim, Pil-Gu;Kim, Hyun-Soo
    • Transactions of the Korean Society of Automotive Engineers
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    • v.14 no.3
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    • pp.81-87
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    • 2006
  • In this paper, the belt-pulley mechanical loss is investigated. A bondgraph model for the mechanical loss is developed from the viewpoint of the power flow by assuming that all power losses are attributed to the torque loss. The mechanical loss model consists of transient and steady state part. The coefficients of the power loss model are obtained from the experiments. It is found from the simulations and experiments that the steady state loss depends on the line pressure, input torque and rotational speed while the transient loss depends on the rotational speed, shift speed and the inertial torque.

Numerical Study on Defect Analysis of Hot Cross Wedge Rolling Process (열간전조공정의 공정결함 분석을 위한 해석적 연구)

  • Lee, Hyoung Wook
    • Journal of Institute of Convergence Technology
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    • v.3 no.2
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    • pp.17-21
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    • 2013
  • Hot cross wedge rolling process as an incremental forming has many advantages such as the material usage, the short process time, the automatic equipment line and the low forming load. However, it occurs some defects such as the surface groove, the axis warping and the Mannesmann hole. In this paper, the defect of the Mannesmann hole was carried out. Finite element analysis was utilized to reveal the stress distribution, the rotation of the specimen and the change of section profile. Cross wedge rolling experiment was also conducted on the generation of the Mannesmann hole. It was demonstrated according to the spreading angle with respect to the various types of material. In the view point of metal flow, the smaller forming angle and the larger spreading angle increase opportunities of the defect hole generations.

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Application of a Membrane Desolvator to the Analysis of Organic Solvents in Inductively Coupled Plasma Atomic Emission Spectrometry

  • Lee, J. S.;Lim, H. B.
    • Bulletin of the Korean Chemical Society
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    • v.20 no.9
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    • pp.1040-1044
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    • 1999
  • A micro porous PTFE membrane desolvator (MMD) was built and evaluated for the on-line removal of organic solvents to facilitate the determination of trace metal contaminants in the solvents by ICP-AES. Three organic solvents, isopropyl alcohol (IPA), methanol, and dimethy sulfoxide (DMSO) were studied. The MMD reduced organic solvent concentration in the sample aerosol stream by 82% to 89%, as indicated by monitoring C(I) emission. Net signal intensity of Fe, Al, and Cu was increasing with higher organic solvent concentration, with the rate of increase being solvent dependent. The signal intensities for Mg and Pb followed the trend with the C(I) signal. Changing the sweep gas flow rate affected the optimum signal intensity. Wine samples were analyzed by the method of standard addition. The concentrations of B, Al, and Mg were determined with a relative precision of less than 2.3%.

A Study on Managing of Metal Loss by Flow-Accelerated Corrosion in the Secondary Piping of CANDU Nuclear Plants (CANDU형 원전 2차 배관의 침부식 감육 관리방법에 관한 연구)

  • 심상훈;송정수;윤기봉;황경모;진태은;이성호
    • Journal of Energy Engineering
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    • v.11 no.1
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    • pp.18-25
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    • 2002
  • One of the most serious concern in nuclear power plant piping maintenance is thickness reduction due to flow-accelerated corrosion (FAC). Since the FAC occurs under specific conditions of pH, dissolved oxygen, temperature, flow velocity, steam quality of the fluid and materials and geometry of the piping, a systematic approach is required for managing the FAC problem. In this study, construction of a secondary piping database, analyzing the FAC rate using the database and predicting the residual life was performed for a domestic CANDU nuclear power plant. Also FAC mechanism and factors affecting FAC were reviewed. By showing a case study on analysis for a pipe line between a separator and a flash tank, a procedure for managing FAC problem is suggested. The procedure proposed in this paper can be widely applied to the secondary piping of other domestic nuclear polder plants.

Transparent Monopole Antenna on the Front Glass of an Automobile for FM Band (자동차 전면 글래스용 FM 대역 투명 모노폴 안테나)

  • Lee, Juhyung;Jung, Chang Won
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.7
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    • pp.477-483
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    • 2018
  • A transparent antenna designed on the front glass of an automobile operating in the FM broadcast band(88~108 MHz) is proposed. A transparent antenna designed on the front glass of the automobile to avoid space limitation is typically positioned as a roof-mounted shark-fin antenna. An antenna designed on the front glass can reasonably solve the problems of low reception sensitivity and radiated interference from antennas for other service bands. The front glass has a unique closed-line structure, and this structure causes the surface current to flow to the front glass's surroundings; thus, the first resonance is caused before the broadcast band. Through the use of this closed-line structure, the surface current distribution is controlled, and an antenna for which the first resonance is operating in the frequency-modulated(FM) band can be designed. Moreover, the use of a micro-metal-mesh film that is a transparent electrode, suitable for designing a radio frequency device, enables the antenna to minimize visual perception through its transparency. The measured reflection coefficient($S_{11}$) of the antenna is less than -6 dB, and the average peak gain is -0.9 dB in the FM band. Experiments show that the transparent antenna on the front glass offers both the space and design freedom required to develop future automotive antennas.