• 제목/요약/키워드: Mechanical system design

검색결과 6,143건 처리시간 0.033초

패드 마모 균일성 향상을 위한 CMP 컨디셔닝 시스템 설계 변수 연구 (Design Variables of Chemical-Mechanical Polishing Conditioning System to Improve Pad Wear Uniformity)

  • 박병훈;박범영;전언찬;이현섭
    • Tribology and Lubricants
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    • 제38권1호
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    • pp.1-7
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    • 2022
  • Chemical-mechanical polishing (CMP) process is a semiconductor process that planarizes a wafer surface using mechanical friction between a polishing pad and a substrate surface during a specific chemical reaction. During the CMP process, polishing pad conditioning is applied to prevent the rapid degradation of the polishing quality caused by polishing pad glazing through repeated material removal processes. However, during the conditioning process, uneven wear on the polishing pad is inevitable because the disk on which diamond particles are electrodeposited is used. Therefore, the abrasion of the polishing pad should be considered not only for the variables during the conditioning process but also when designing the CMP conditioning system. In this study, three design variables of the conditioning system were analyzed, and the effect on the pad wear profile during conditioning was investigated. The three design variables considered in this study were the length of the conditioner arm, diameter of the conditioner disk, and distance between centers. The Taguchi method was used for the experimental design. The effect of the three design variables on pad wear and uniformity was assessed, and new variables used in conditioning system design were proposed.

전자제어식 디젤엔진에 있어서 반응치에 따른 요인배치법의 활용 방안에 대한 분석 (Analysis on Application Plan of Factorial Design in Relation to Responses for Electronically-controlled Diesel Engine)

  • 이정규;김민종;고성위;양주호;한규일;고대권;정석호
    • 동력기계공학회지
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    • 제22권1호
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    • pp.5-10
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    • 2018
  • In order to employ factorial design on electronically-controlled diesel engine, effects of 5 factors on specific fuel consumption, nitrogen oxides and carbon monoxide were examined by fractional and full factorial design in this research. There were different results between fractional and full factorial design, then effect of variables as ambient condition and measurement of fuel consumption were confirmed. It was shown that ambient condition affected uniformly trend of nitrogen oxides and carbon monoxide. However, both ambient condition and measurement of fuel consumption had nothing to do with trend of specific fuel consumption and therefore it must be careful to employ factorial design on specific fuel consumption as response.

기능분해와 TRIZ 이론을 이용한 철도 대차의 구성설계 (Configuration Design of a Train Bogie using Functional Decomposition and TRIZ Theory)

  • 이장용;한순흥
    • 대한산업공학회지
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    • 제29권3호
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    • pp.230-238
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    • 2003
  • The configuration design of a mechanical product can be efficiently performed when it is based on the functional modeling. There are methodologies, which decompose function from the abstract level to the concrete level and match the functions to physical parts. But it is difficult to carry out an innovative design when the function is matched only to a pre-detined part. This paper describes the configuration design process of a mechanical product with a design expert system, which uses function taxonomy and TRIZ theory. The expert system can propose a functional modeling of a new part. which is not in the existing parts list. The abstraction levels of design knowledge are introduced, which describe the operation of mechanical product in the levels of abstraction. This is the theoretical background of using knowledge of function and TRIZ for configuration design. The expert system is adequate to control this design knowledge. which expresses knowledge of functional modeling, mapping rules between functions and parts, selection of parts, and TRIZ theory. The hierarchy of functions and machine parts are properly expressed by classes and objects in the expert system. A design expert system has been implemented for the configuration design of a train bogie, and a new brake system of the bogie is introduced with the aid of TRIZ's 30 function groups.

장애인을 위한 자율주행 모빌리티 휠체어 개발 (Development of Autonomous Mobility Wheelchair for People with Disabilities)

  • 김근태;김현서;이규민;이창현;전성균
    • 한국정보처리학회:학술대회논문집
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    • 한국정보처리학회 2023년도 추계학술발표대회
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    • pp.1006-1007
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    • 2023
  • 휠체어의 사용자는 꾸준히 증가하며 휠체어 시장 또한 빠른 속도로 성장중이다. 하지만 휠체어 사용에 많은 문제점이 있고 자율주행 모빌리티 휠체어를 통해 이를 해결하고자 한다.

차량 동역학이 구현된 자율주행 시뮬레이터 검증 (Verification of autonomous driving simulator with analyzed vehicle dynamics)

  • 전현수;정관호;김승빈;안정호;정몽근
    • 한국정보처리학회:학술대회논문집
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    • 한국정보처리학회 2023년도 추계학술발표대회
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    • pp.880-881
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    • 2023
  • 본 연구는 차량 동역학이 적용된 자율주행 시뮬레이터에서 구현된 차량의 거동이 실제 차량과 유사한지 검증하는 것이다. 이를 위해 실제 차량모델에 외력을 가할 수 있는 기구를 개발하여 데이터를 획득하고 분석하고자 한다. 시뮬레이터에서 구현된 차량과 유사한 서스펜션 구조를 가진 차량 모델을 만들고 센서를 달아 차량의 운동 모델을 모사했으며, 캠과 감속기어를 활용해 외력을 모사하기 위한 기구를 제작하였다.

CBM+ 적용을 위한 설계초기단계 센서선정 추론 연구 (A Study of Sensor Reasoning for the CBM+ Application in the Early Design Stage)

  • 신백천;허장욱
    • 시스템엔지니어링학술지
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    • 제18권1호
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    • pp.84-89
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    • 2022
  • For system maintenance optimization, it is necessary to establish a state information system by CBM+ including CBM and RCM, and sensor selection for CBM+ application requires system process for function model analysis at the early design stage. The study investigated the contents of CBM and CBM+, analyzed the function analysis tasks and procedures of the system, and thus presented a D-FMEA based sensor selection inference methodology at the early stage of design for CBM+ application, and established it as a D-FMEA based sensor selection inference process. The D-FMEA-based sensor inference methodology and procedure in the early design stage were presented for diesel engine sub assembly.