• Particle and aerosol research
• /
• v.20 no.3
• /
• pp.103-114
• /
• 2024

Liquid-spray cleaning has recently been considered an eco-friendly cleaning method in the semiconductor industry because it efficiently cleans contaminated wafers without using any chemicals, relying instead on direct momentum transfer through dropwise impaction. Previous researches are mainly divided into two groups, such as modelling studies predicting the cleaning effect of single-droplet impact and experimental works for measuring particle removal efficiency (PRE) that essentially accompanies multiple droplet impacts. Here, we developed a Monte Carlo model to connect the single-droplet based model to the ensemble effect of multiple droplet impacts in real cleaning experiments, and thereby predict the PREs from the impaction conditions of droplets and the diameters of target particles. Additionally, we developed a two-fluid supersonic nozzle system, capable of spraying 10-60 ㎛ droplets under control of impact velocity, with aims to validate the model predictions of PREs for 15-130 nm contaminant particles on a Si wafer. We confirmed that the model predictions are in agreement with the experimental data within 7% and the cleaning time needs to be controlled for ensuring the efficient removal of particles.

• Tribology and Lubricants
• /
• v.40 no.2
• /
• pp.67-70
• /
• 2024

Chemical mechanical planarization (CMP) is an essential process for ensuring high integration when manufacturing semiconductor devices. CMP mainly requires the use of polyurethane-based polishing pads as an ultraprecise process to achieve mechanical material removal and the required chemical reactions. A diamond disk performs pad conditioning to remove processing residues on the pad surface and maintain sufficient surface roughness during CMP. However, the diamond grits attached to the disk cause uneven wear of the pad, leading to the poor uniformity of material removal during CMP. This study investigates the pad wear rate profile according to the swing motion of the conditioner during swing-arm-type CMP conditioning using deep learning. During conditioning, the motion of the swing arm is independently controlled in eight zones of the same pad radius. The experiment includes six swingmotion conditions to obtain actual data on the pad wear rate profile, and deep learning learns the pad wear rate profile obtained in the experiment. The absolute average error rate between the experimental values and learning results is 0.01%. This finding confirms that the experimental results can be well represented by learning. Pad wear rate profile prediction using the learning results reveals good agreement between the predicted and experimental values.

• Journal of Energy Engineering
• /
• v.10 no.4
• /
• pp.342-348
• /
• 2001

A new design concept for a decay heat removal system in a liquid metal reactor is proposed. The new design utilizes a thermosyphon to enhance the heat removal capacity and its heat transfer characteristics are analyzed against the current PSDRS (Passive Safety Decay heat Removal System) in the KAL IMER (Korea Advanced LIquid MEtal Reactor) design. The preliminary analysis results show that the new design with a thermosyphon yields substantial increase of 20∼40% in the decay heat removal capacity compared to the current design that do not have the thermosyphon. The new design reduces the temperature rise in the cooling air of the system and helps the surrounding structure in maintaining its mechanical integrity for long term operation at an accident. Also the analysis revealed the characteristics of the interactions among various heat transfer modes in the new design.

• Proceedings of the KSME Conference
• /
• 2000.11b
• /
• pp.720-725
• /
• 2000

To remove harmful gases from combustion exhaust gases. fundamental study on NOx removal using pulse corona discharge has been performed through experiments and simulations. The energy consumption should be decreased in order to apply non-thermal plasma technology to industry process. This work summarized the effects of $H_2O$ and Hydrocarbon additive in NOx removal efficiency. The Radical program is used to simulate high voltage discharge and the process of NOx removal. At last, experimental results were compared with simulation results to verify the reliability of this program.

• 제어로봇시스템학회:학술대회논문집
• /
• 1999.10a
• /
• pp.194-197
• /
• 1999

Automatic weld bead removal system is consisted of bead removal tool, bead profile measurement system and tool motion control system. In this paper, design of weld bead profile measurement system which is used for automatic weld bead removal system is described. The system measures the weld bead position, normal vector of the auto-body and weld bead profile. The optical sensor with structured laser beam is used as a sensor and comparison of the sensor that can be used for this purpose is discussed in detail. The measurement process and the related software developed for this purpose are also described. A median filter, average filter and long line filters are used and their effects in bead profile measurement are discussed. The measurement system is integrated into automatic bead removal system and is used to remove weld bead in rear pillar of automotive body. The whole system operates well in automotive body assembly line and thus the system is proved to be good for this purpose.

• Journal of the Korean Society of Combustion
• /
• v.22 no.4
• /
• pp.51-56
• /
• 2017

The decomposition of tetrafluoromethane has been investigated with the reaction mechanism proposed for freely propagating $CH_4/CF_4/O_2/N_2$ premixed flames on the oxygen enrichment. The factors affecting on the removal efficiency of tetrafluoromethane were analyzed. The increase in flame temperature due to oxygen enrichment has a great influence on the removal efficiency of tetrafluoromethane. At the same oxygen enrichment condition, the removal efficiency in the rich flame is higher than one in the lean flame. The increase of the F/H ratio leads to decrease the flame temperature and the removal efficiency of tetrafluoromethan is decreased at the flame temperature of 2600 K or lower, The elementary reactions that dominate the consumption of tetrafluoromethane are (R1) $CF_4+M=CF_3+F+M$ and (R2) $CF_4+H=CF_3+HF$. (R1) has the greatest effect on the consumption of tetrafluoromethane under the oxygen enhanced flames.

• Transactions of Materials Processing
• /
• v.26 no.4
• /
• pp.205-209
• /
• 2017

In this paper, finite element prediction of deformation of material due to springback after material removal by an axisymmetric forging fabrication at room temperature is conducted. An elastoplastic finite element method is employed considering die plastic deformation. The predictions of a springback analysis conducted after the final stroke of an axisymmetric cold forging process containing residual stresses are utilized to be mapped onto the final material after the material removal. It is assumed that material removal occurs at an instant, i.e., all the material to be removed disappears at once. The predictions are compared with experiments, revealing strong qualitative agreement.

• Journal of the Korean Ceramic Society
• /
• v.43 no.5 s.288
• /
• pp.315-319
• /
• 2006

There have been some studies on the use of coal waste as a raw material for clay bricks due to the lack of naturally producing minerals. It can help resolving the problems of pollution, forest conservation and flood control by utilizing coal waste. However, high content of carbon materials usually leads to the black core in clay bricks after firing process, and diminishes the mechanical and aesthetical properties of clay brick. In this study, the effect of firing process is investigated for the removal of black core in clay bricks with carbon content. The removal kinetics of black core are also compared and investigated with the firing schedule and black core removal.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.22 no.8
• /
• pp.1111-1120
• /
• 1998

Spray Drying Absorber(SDA) system, where the combustion product gas is mixed with atomized limestone-slurry droplets and then the chemical reaction of $SO_2$ with alkaline components of the liquid droplets forms sulfates, has been widely used to eliminate $SO_2$ gas from coal fired power plants and waste incinerators. Liquid atomization is necessary because it can maximize the reaction efficiency by increasing the total surface area and dispersion angle of the alkaline components. First, numerical calculations using FLUENT are carried out to investigate $SO_2$ concentration distribution and thus to calculate $SO_2$ removal efficiency. So to attain the optimized spray conditions, then an electrostatic spraying system is set up and spray visualization is performed to show the effect of an electric field on overall droplet size. Next, the effect of an electric field on the concentrations of $SO_2$ is experimentally examined. Field strength is varied from -10 kV to 10 kV and configurations of conduction charging and induction charging are utilized. Consequently, the electrostatic removal efficiency of 501 increases about 30% with the applied voltage of ${\pm}10kV$ but is independent of polarity of the applied voltage. It Is also found that the conduction charging configuration results in higher efficiency of $SO_2$ removal that the induction charging configuration. Finally, the effect of slurry temperature on $SO_2$ removal is studied. The temperature influences on the electrostatic removal efficiency of $SO_2$.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
• /
• 2002.04a
• /
• pp.13-17
• /
• 2002

Ultrasonic waves have several mechanical, chemical, and biological effects on a saturated soil medium. Their mechanical effects, popularly known as cavitation. Cavitation is the rapid and repeated formation, and resulting implosion, of imcrobubbles in a liquid, resulting in the propagation of microscopic shock waves. In a soil-liquid system, their mechanical effects generate high differntial fluid-particle velocities and microscopic shock waves. The velocity perturbations are capable of dislodging oil in the system by overcoming the forces binding oil to sand particles. In this study, a series of laboratory experiments involving the simple flushing and ultrasonic flushing were carried out. An increase in permeability and oil removal rate were observed in ultrasonic flushing tests. Some practical implications of these results are discussed in terms of technical feasibility of in situ implementation of ultrasonics.