• 대한기계학회논문집A
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• 제28권12호
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• pp.1990-1996
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• 2004

This paper presents a nonlinearly modulated digital actuator (NMDA) for producing nano-precision digital stroke. The NMDA, composed of a digital microactuator and a nonlinear micromechanical modulator, purifies the stroke of the digital actuator in order to generate the high-precision displacement output required for nano-positioning devices. The function and concept of the nonlinear micromechanical modulator are equivalent to those of the nonlinear electrical limiters. The linear and nonlinear modulators, having an identical input and output strokes of 15.2${\mu}{\textrm}{m}$ and 5.4${\mu}{\textrm}{m}$, are designed, fabricated and tested, respectively. The linear and nonlinear modulators are linked to identical digital actuators in order to compare the characteristics of the linearly modulated microactuator (LMDA) and NMDA. In addition, an identical linear modulator is attached to the output ports of LMDA and NMDA. The NMDA shows the repeatability of 12.3$\pm$2.9nm, superior to that of 27.8$\pm$2.9nm achieved by LMDA. When the identical linear modulator is connected to LMDA and NMDA, the final modulated output from NMDA shows the repeatability of 10.3$\pm$7.2nm, superior to that of 15.7$\pm$7.7nm from LMDA. We experimentally verify the displacement purifying capability of the nonlinear mechanical modulator, applicable to nano-precision positioning devices and systems.

• 한국생산제조학회지
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• 제24권3호
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• pp.348-354
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• 2015

Using a magnetic gear, the speed and torque of the driving axis can be decreased and increased, respectively, similar to a mechanical speed reducer. In particular, because the driving side can be isolated mechanically from the load side, the magnetic gear was developed for application with environmental constraints. Of the existing topologies used for the magnet gear, the filtering method of a specified magnetic component is the most competitive. In this paper, a novel unified harmonic modulator is applied to filter the specified component. The torque conversion method using this modulator is described in detail, and the key factors of the modulator are derived from the influence on the resulting torque. The experimental setup was constructed and its torque transmission efficiency measured for varying loads. The transient characteristic from an excessive load is compared with the theoretical simulation.

• 한국정밀공학회지
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• 제31권6호
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• pp.543-550
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• 2014

A magnet gear composed of two layers of permanent magnets repeated circumferentially can transmit the power without mechanical contact. In the topology called by the magnet shutter gear known as the most competitive concept among the existing concepts, the number of pole-pairs on the high speed rotor corresponds to that of low speed rotor through electric steel set functioning as a magnetic modulator. The methodology is classified into radial type and axial type according to its magnetic path as in the motor. However, the magnetic modulator has multiple poles located separately. So, it is very complicated to assemble each module of the magnet gear mechanically and to sustain a mechanical stiffness of the modulator. The practical trouble can be solved partially through reconfiguring the modules. This paper deals with the novel magnetic shutter gear topology varying the magnetic path and its effectiveness is verified through real hardware implementation.

• 대한기계학회논문집A
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• 제20권1호
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• pp.206-213
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• 1996

Third order correlation funciton is to be advantageous to detect unique features embedded in various random signals that are undetectable with second order correlation or power spectrum. In this paper, we will introduce optical modulator which consists of a laser light source, 2-dimensional ultrasonic diffractor cell with signal controlling circuitry, and a CCD camera connected to personal computer for image processing. With this modulator, the third order correlaiton pattern of signal can be immediately obtained at the camera due to parallel nature of optical computing.

• 융복합기술연구소 논문집
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• 제12권1호
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• pp.7-12
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• 2022

The reduction ratio of the magnetic gear is determined by the ratio of the number of poles between the high-speed permanent magnet layer and the low-speed permanent magnet layer. In general, it is known that the greater the least common multiple of both poles, the smaller the torque ripple called by cogging of the magnetic force generated in the magnetic gear. However, little is known about the effect of the harmonic modulator that filters the magnetic field in the magnetic gear to magnetically couple the high-speed side and the low-speed side except for the number of poles. In this study, torque ripple characteristics according to changes in modulator shape such as opening ratio and tooth thickness are analyzed using a finite element analysis tool.

• 전기전자학회논문지
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• 제18권1호
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• pp.119-127
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• 2014

본 논문에서는 MEMS(Micro Electro Mechanical System) 가속도센서를 위한 CMOS readout 회로를 설계하였다. 설계된 CMOS readout 회로는 MEMS 가속도 센서, 커패시턴스-전압 변환기(CVC), 그리고 2차 스위치드 커패시터 ${\Sigma}{\Delta}$ 변조기로 구성된다. 이들 회로에는 저주파 잡음과 오프셋을 감소시키기 위한 correlated-double-sampling(CDS)와 chopper-stabilization(CHS) 기법이 적용되었다. 설계 결과 CVC는 150mV/g의 민감도와 0.15%의 비선형성을 갖는다. 설계된 ${\Sigma}{\Delta}$ 변조기는 입력전압 진폭이 100mV가 증가할 때, 출력의 듀티 싸이클은 10%씩 증가하며, 0.45%의 비선형성을 갖는다. 전체 회로의 민감도는 150mV/g이며, 전력소모는 5.6mW이다. 제안된 회로는 CMOS 0.35um 공정을 이용하여 설계하였고, 공급 전압은 3.3V이며, 동작 주파수는 2MHz이다. 설계된 칩의 크기는 PAD를 포함하여 $0.96mm{\times}0.85mm$이다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.39.1-39
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• 2002

We present nanoactuators and nanodetectors for high-precision Micro Electro Mechanical System (MEMS) applications. Major technical difficulties in the high-precision MEMS are arising from the fabrication uncertainty and electrical noise problems. In this paper, we present high-precision actuators and detectors, overcoming the technical limitations placed by the conventional MEMS technology. For the nano-precision actuation, we present a nonlinearly modulated digital actuator (NMDA). NMDA composed of a digital microactuator and a nonlinear micromechanical modulator. The nonlinear micromechanical modulator is intended to purify the actuation errors in the stroke of the digital a...

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권2호
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• 융복합기술연구소 논문집
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• 제4권2호
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• pp.11-15
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• 2014

Magnet gear transfers a high speed torque of the driving side to a low speed following side. Of course, the torque is amplified as much as a ratio between pole number of magnet gears constituting both sides through ferromagnet modulator. However, the parameters of the overall magnetic system influence the transmitting torque strongly. They include a pole number of permanent magnet, magnet thickness, reducing ratio, harmonic modulator thickness, and open ratio etc. In this paper, the influences of the parameters are analyzed using finite element method tool. By comparison, a desirable design specification is proposed, including a recommended modulator pattern.

• 한국정밀공학회지
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• 제18권10호
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• pp.127-133
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• 2001

In this study, the effect of the factors of a hydraulic modulator of ASMS was analysed. The modeling of ASMS was presented and the equation of ASMS was derived from the modeling. With this background, GUI analysis tool was developed. After the verification of the reasonability of simulation, the response of a hydraulic modulator is investigated through simulation of modeling. With this simulation, each behavior was predicted with changing the various parameters and determined the influenced factors to apply the designing process.