• KSTLE International Journal
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• v.5 no.1
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• pp.32-35
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• 2004

The purpose of this study is to investigate the effects of the structure and mechanical properties of laser-processed pads on their polishing behavior such as their removal rate and WIWNU (within wafer non-uniformity) during the chemical mechanical planarization (CMP) process. The holes on the pad acted as the reservoir of slurry particles and enhanced the removal rate. Without grooves, no effective removal of wafers was possible. When the length of the circular-type grooves was increased, higher removal rates and lower wafer non-uniformity were measured. The removal rate and non-uniformity linearly increased as the elastic modulus of the top pad increased. Higher removal rates and lower non-uniformity were measured as the hardness of the pad increased.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.6
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• pp.744-751
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• 2007

Wet scrubber is widely used to remove toxic gaseous contaminants in various industries such as semi-conductor industry, display manufacturing industry and so on. In this study, to optimize a packed bed scrubber as one of typical wet scrubber size while keeping its performance, four different packing materials were investigated at different air flow rates, liquid-gas ratios and pH values. Ammonia, hydrochloric acid and hydrofluoric acid were used as test gases to characterize the scrubber performance. Gas removal efficiency increased as the packing size decreased, which resulted in the increase of specific surface area. The increase of air flow rate led to the decrease of gas removal efficiency, while the increase of liquid-gas ratio led to the increase of gas removal efficiency. For the case of $NH_3$ gas, lower pH, and for the cases of HCl and HF, higher pH contributed to higher gas removal efficiency. Gas removal efficiency of a wet scrubber increased in the order of HCl < $NH_3$ < HF according to its water solubility.

• Particle and aerosol research
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• v.9 no.4
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• pp.247-252
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• 2013

Removal of water contents in a gas is needed in industrial field of gas processing related on energy production/conversion, and environmental treatment. Inertial separators are economic devices for separating droplets from the gas stream. For design and incorporation of inertial pre-treatment separator, characteristics of removal of water contents with various operation conditions are needed. In this study, removal efficiency of water droplets at various flowrates (5-14 SCMM) and relative humidity (R.H.) conditions (40%, and 90%) has been investigated. At low R.H. condition, the removal characteristic is similar to the removal of solid particles. But, droplet growth resulting from the condensation of water vapor at high R.H. condition, is significant and it made increase in removal efficiency of droplet phase of water contents. For rapid removal of water contents, an effective method to enhancing condensation growth of water droplets is highly needed.

• Composites Research
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• v.31 no.2
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• pp.76-81
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• 2018

In this study, the elemental mercury removal behaviors of silver-plated porous carbons materials were investigated. The pore structures and total pore volumes of the hybrid materials were analyzed by $N_2$ adsorption/desorption analysis at 77 K. The pore structures and surface morphologies of the hybrid materials were characterized by XRD and SEM, respectively. The elemental mercury adsorption capacities of all silver-plated porous carbons hybrid materials were higher than those of the as-received samples, despite the fact that the specific surface areas and total pore volumes decreased with increasing metal loading time. It was found that silver nanoparticles showed excellent elemental mercury removal behaviors in carbonaceous hybrid materials.

• Journal of the Korean Professional Engineers Association
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• v.15 no.3
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• pp.33-36
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• 1982

Dewaxing Technique was reconized as the removal of waxy materials from the lubriating distillates for the purpose of the improvement of the low temperative fluidity of the lubricating oils. Recently this technique is developed not only the removal of the waxy materials but the reformation of the waxy materials which does not effect the low temperative fluidity of the lutricating oils. The cutalytic dewaxing technique is developed is this letter direction. And so I insist here the defintion of dewaxing technique must be defined as the technique of the removal and reforming technique of the waxy materials which effect the fluidity of the lubricating oils.

• Particle and aerosol research
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• v.14 no.1
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• pp.9-16
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• 2018

We have developed an electrostatic precipitation (ESP) type air cleaner for indoor air quality and investigated its performances regarding CADR (Clean air delivery rate), single-pass efficiency and gas removal efficiency. The ESP air cleaner used an ACF (Activated carbon fiber) filter for gas removal and the ACF as a high voltage electrode for particle removal. The ESP air cleaner was tested in a chamber with the volume of $1m^3$ regarding CADR and gas removal efficiency. The applied CADR area of the ESP was $1.8m^2$. Gas removal efficiency was tested with 3 gases (Acetaldehyde, Acetic acid, Ammonia). As the results of the gas removal efficiency, the ESP air cleaner shows the removal efficiencies of 90, 98 and 85% for acetaldehyde, acetic acid and ammonia, respectively.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.6
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• pp.467-475
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• 2012

Recently, residents have been spending almost 90% of their time indoors, which presents a higher risk from inhalation of pollutants than when spending time outdoors. Therefore, controlling indoor air quality became important. It is reported that the lung diseases and mortality for occupants are increased when there is high density of ozone which is one of the pollutants among the indoor air. In addition, the reactions between ozone and building materials produce VOCs and formaldehyde. The studies to eliminate the ozone by building materials have been actively investigated. However, ozone removal and secondary pollutants from ozone reactions with building materials have not been reported in Korea. For this reason, the aim of this study is to introduce ozone removal by HVAC filters, various building materials, and eco-friendly building materials including the quantity of secondary pollutant emissions.

• Journal of Institute of Convergence Technology
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• v.6 no.2
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• pp.25-28
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• 2016

Recently, due to the climate change by global warming, the amount of snow has increased. The situations were demanded to use many snow removal materials. The snow removal materials that used in Korea were solid chloride deicing material. That is calcium chloride($CaCl_2$) and sodium chloride(NaCl). Solid chloride baesd snow removal materials have various property, for example good freezing point depression, deliquescence and economical solvents. However, there are problems such as water pollution, high corrosiveness and ecocide. For such reason, development of eco-friendly deicer was required obligatorily. This study investigated development situation of eco-friendly deicer materials.

• Environmental Engineering Research
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• v.20 no.2
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• pp.133-140
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• 2015

The aim of this study was to investigate the bacteriophage removal in various clay minerals and clay-amended soils. Batch experiments in kaolinite, montmorillonite, and bentonite showed that kaolinite was far more effective at the MS2 removal than montmorillonite and bentonite. In kaolinite, the log removal increased from 0.046 to 2.18, with an increase in the adsorbent dose from 0.3 to $50g\;L^{-1}$, whereas the log removals in montmorillonite and bentonite increased from 0.007 to 0.40 and from 0.012 to 0.59, respectively. The MS2 removal in kaolinite-amended silt loam soils was examined at three different soil-to-solution (STS) ratios. Results indicated that the log removal of MS2 increased with an increase in the kaolinite content and the STS ratio. At the STS ratio of 1:10, the log removal of MS2 increased from 2.33 to 2.80 with an increase in the kaolinite content from 0% to 10% in kaolinite-amended soils. The log removals of MS2 at the STS ratios of 1:2 and 1:1 increased from 2.84 to 3.47 and from 3.46 to 4.76, respectively, with an increase in the kaolinite content from 0% to 10%. Results also indicated that the log removals of PhiX174 and $Q{\beta}$ in kaolinite-amended soils were similar to each other, but they were far lower than those of MS2 at all the kaolinite contents. The log removal of PhiX174 increased from 0.16 to 0.32, whereas the log removal of $Q{\beta}$ changed from 0.17 to 0.22 with an increase in the kaolinite content from 0% to 10%.

• Journal of the Korea Organic Resources Recycling Association
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• v.9 no.3
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• pp.136-144
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• 2001

Two organic materials, peat and rock wool were used for removal of $H_2S$ by a biofilter inoculated with night soil sludge. By gradually increasing the inlet load of $H_2S$, the complete removal capacity, which was defined as the inlet load of $H_2S$ that was complete removed, and the maximum removal capacity of $H_2S$, which was the value when the removal capacity leveled off for organic materials, were estimated. Both values for Rock wool are larger than peat, based on a unit dry weight of material. By using kinetic analysis, the maximum removal rate of $H_2S$, $V_m$, and the saturation constant, $K_s$, were determined for all packing materials and the values of $V_m$ for rock wool was found to be larger. By using the kinetic parameters, the removal rates for $H_2S$ were compared both packing materials, and rock wool showed better performance for the removal of $H_2S$ in the inlet concentration range of 0~200ppm.