• Journal of Korean Society of Environmental Engineers
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• v.27 no.4
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• pp.414-419
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• 2005

This study was performed to compare the treatment efficiencies of two media, newly developed Bio-rock and conventional gravel, in soil clothing contact oxidation process. The composition of synthetic wastewater were $COD_{Cr}$ $150{\sim}370\;mg/L$, $BOD_5$ $150{\sim}270\;mg/L$, T-N $20{\sim}60\;mg/L$, T-P $5{\sim}25\;mg/L$, pH 7 and 2 mL/L of trace element solution. The experiment using two reactors was comparatively conducted for the flow rate of 40 L/d for 13 months, respectively. Initially Bio-rock reactor was increased to pH 12 due to $Ca(OH)_2$ with hydration of cement, but gravel reactor was dropped to pH 4 due to the degradation of organic material and nitrification. This significant pH variation deteriorated the growth and activity of microorganism. But the high pH of Bio-rock seems favorite to ammonia stripping and precipitation of phosphate. Such pH variation of Bio-rock and gravel reactors were finally stabilized to pH 8 and pH 6, respectively. The removal efficiencies of organic compounds from Bio-rock reactor were 96% of $COD_{Cr}$, 98% of $BOD_5$, 80% of T-N and 85% of T-P which stably coping against variation of influent concentration. But those of gravel reactor were 96% of $COD_{Cr}$, 96% of $BOD_5$, 42% of T-N and 40% of T-P, respectively. The Bio-rock was 2 times higher than T-N and T-P in treatment efficiency. And electron-microscopic examination showed that Bio-rock was more favorable to microbial adherence than gravel. The microbial populations were $5.2{\times}10^6\;CFU/mL$ of Bio-rock reactor compared to $2.6{\times}10^6\;CFU/mL$ in gravel reactor. In result Bio-rock was favor to microbial adherence and high treatment efficiency in spite of variation of influent concentration which had the advantages in saving running time and reducing site requirement.

• Membrane Journal
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• v.24 no.3
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• pp.194-200
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• 2014

The purpose of this study was to evaluate the performance of newly developed Large Pore Micro-Filtration (LPMF) membrane in Lab size for the application of water treatment, and to find its problems with solutions. The out-to-inside filtration hollow fiber LPMF membrane of which average pore size was $5{\mu}m$ was used at this study and its material was the PET braid reinforced PVDF. Filtration tests were done through gravity with 30 cm water head difference or pressure below 1.5 bar, and the backwash was done instantaneously with the filtrate after pressurizing it to about 4 bar. The water flux of the LPMF membrane with 0.2 bar TMP (Trans Membrane Pressure) was 2 times higher than $0.4{\mu}m$ MF membrane with $0.05{\mu}m$ UF filtrate of the tap water and it was measured also with 20~30 cm water head difference which showed over 800 LMH at 30 cm water head difference. And Time-To-Filter (TTF) was performed by using $5{\mu}m$ filter paper to optimize coagulants and dosage which enhanced filtrate's turbidity and stabilized filtration flux. When the LPMF was operated with 30 cm gravity with very high dose of inorganic coagulants, the flux was maintained over 80 LMH with 93.5~99.5% turbidity removal. Especially, the filtration was maintained stably in the flux and about 97% of the recovery rate by instantaneous pressurized backwash with about 4 bar of the filtrate when the packing density was about 19%. But there was instability in filtration, since the TMP was continuously going up by inefficient backwash when the packing density was 43%.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.