• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.20-23
• /
• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing(CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Chemical-Mechanical polishing(CMP) of conductors is a key process in Damascene patterning of advanced interconnect structure. The effect of alternative commercial slurries pads, and post-CMP cleaning alternatives are discuss, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. Electroplated copper deposition is a mature process from a historical point of view, but a very young process from a CMP perspective. While copper electro deposition has been used and studied for decades, its application to Cu damascene wafer processing is only now gaining complete acceptance in the semiconductor industry. The polishing mechanism of Cu-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. however it is important to understand the effect of oxidizer on copper passivation layer in order to obtain higher removal rate and non-uniformity during Cu-CMP process. In this paper, we investigated the effects of oxidizer on Cu-CMP process regarding the additional volume of oxidizer.

• Korean Journal of Computational Design and Engineering
• /
• v.2 no.3
• /
• pp.161-174
• /
• 1997

In this paper, the techniques for graphic simulation of material removal process are described. The concepts of the bounding box and base plane are proposed. With these concepts, a real-time shaded display of a Z-map model being milled by a cutting tool following an NC path can be implemented very efficiently. The base planes make it possible to detect the visible face of Z-map model effectively. And the bounding box of tool sweep volume provides minimum area of screen to be updated. The proposed techniques are suitable for implementation in raster graphic device and need a few memories and a small amount of calculation. Proposed method is written in C and executable on MS-Windows95 and Window-NT.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.13 no.5
• /
• pp.451-457
• /
• 2000

Experimental investigations on the effect of two kinds of additives ; aqueous NaOH solution and ammonia(NH$_3$) for removal of NOx and SO$_2$ simultaneously by corona discharge were carried out. The simulated combustion flue gas was[NO(0.02[%])-SO$_2$(0.08[%])-$CO_2$-Air-$N_2$] Volume percentage of aqueous NaOH solution used was 20[%] and $N_2$flow rate was 2.5[$\ell$/min] for bubbling aqueous NaOH solution Ammonia gas(14.81[%]) balanced by argon was diluted by air. NH$_3$ molecular ratios(MR) based on [NH$_3$] and [NO+SO$_2$] were 1, 1.5 and 2.5 The vapour of aqueous NaOH solution and NH$_3$was introduced to the main simulated combustion flue gas duct through injection systems which were located at downstream of corona discharge reactor. NOx(NO+NO$_2$) removal rate by injecting the vapour of aqueous NaOH solution was much better than that by injecting NH$_3$however SO$_2$removal rate by injecting NH$_3$was much better than that by injecting the vapour of aqueous NaOH SO$_2$removal rate slightly increased with increasing applied voltage. When the vapour of aqueous NaOH solution and NH$_3$were simultaneously injection NOx and SO$_2$ removal rate were significantly increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.05a
• /
• pp.180-183
• /
• 2002

The pulsed power system was widely making use good of many industrial and environments. The pulse generator generally required for short pulse duration and high peak value was forced to consider its volume and economy. In this paper, this system is designed and fabricated which has a compact size of pulse generator with switched MOSFET. We have studied the removal of rust material using Arc discharging. It have tested their characteristics by adjusting variable voltage charging and pulse repetition rate. As a result, We can eliminate rust materials with this device.

• Environmental Engineering Research
• /
• v.17 no.4
• /
• pp.197-203
• /
• 2012

Phosphorus removal during discharge of wastewater is required to achieve in a very high level because eutrophication occurs even at a very low phosphorus concentration. However, there are limitations in the traditional technologies in the removal of phosphorus at very low concentration, such as at a level lower than 0.1 mg/L. Through a series of experiments, a possible technology which can remove phosphate to a very low level in the final effluent of wastewater was suggested. At first Al, Zn, Ca, Fe, and Mg were exposed to phosphate solution by impregnating them on the surface of activated alumina to select the material which has the highest affinity to phosphate. Kinetic tests and isotherm tests on phosphate solution have been performed on four media, which are Ca-impregnated activated alumina, activated alumina, Ca-impregnated loess ball, and loess ball. Results showed that Ca-impregnated activated alumina has the highest capacity to adsorb phosphate in water. Scanning electron microscope image analysis showed that activated alumina has high void volume, which provides a large surface area for phosphate to be adsorbed. Through a continuous column test of the Ca-impregnated activated alumina it was discovered that about 4,000 bed volumes of wastewater with about 0.2 mg/L of phosphate can be treated down to lower than 0.14 mg/L of concentration.

• Journal of environmental and Sanitary engineering
• /
• v.15 no.2
• /
• pp.34-40
• /
• 2000

In the tungsten industry, molybdenum wire which used as the center supporter for coil shape tungsten wire was removed. Nitric acid dissolution method which used prevalently up to the present, takes nitric acid as major component and use noxious material such as sulfuric acid and hydrochloric acid remove molybdenum wire which used as center supporter by dissolve selectively within the range of no damage on tungsten wire. Mixed acid waste water occurred to the process were difficult to be decomposed by the conventional methords. This mixed acid waste water was treated by ozone, and It was obtained using possible by-product through the treatment waste water. For the three reactors with the same volume ; Blank reactor, Disturbance plate reactor, Packed-bed reactor ; the results were as follows : For the blank reactor COD removal efficiency in the pH = 4 (HRT : 6hr) was 28.5%, COD removal efficiency in the pH = 7 (HRT : 6hr) was 28.6%, and COD removal efficiency in the pH = 10 (HRT : 6hr) was 27.8%. For the disturbance plate reactor COD removal efficiency in the pH = 4 (HRT : 6Min.) was 86.5%, COD removal efficiency in the pH =7 (HRT : 6Min.) was 84.4%, and COD removal efficiency in the pH = 10 (HRT : 60Min.) was 86.8%. For the packed-bed reactor COD removal efficiency in the pH = 4 (HRT : 40Min.) was 76.0%, COD removal efficiency in the pH = 7 (HRT : 40Min.) was 81.3%, and COD removal efficiency in the pH = 10 (HRT : 40Min.) was 84.6%. After O3 treatment using possible by-product(Na2SO4) was 150g/ℓ.

• Proceedings of the KIEE Conference
• /
• 2002.07c
• /
• pp.1800-1803
• /
• 2002

The pulsed power system was widely making use good of many industrial and environments. The pulse generator generally required for short pulse duration and high peak value was forced to consider its volume and economy. In this paper, this system is designed and fabricated which has a compact size of pulse generator with switched MOSFET. We have studied the removal of rust material using Arc discharging in pulsed power system. It have tested their characteristics by adjusting variable voltage charging and pulse repetition rate. As a result, We can eliminate rust materials with this device.

• Journal of Korea Soil Environment Society
• /
• v.4 no.1
• /
• pp.85-96
• /
• 1999

Biofiltration is an attractive technique for elimination of VOCs and odorous compounds from low-concentration, high-volume waste gas streams because of its simplicity and cost-effectiveness. The objective of this study was to estimate the removal characteristics of Odorous Compounds including $H_2$S, $NH_3$End BTEX in MSW landfill gases. This Study was conducted at Nanjido landfill site. A compost from the Nanjido composting facility was used as a filling material for biofiltration. Extracted landfill gases were injected into biofilter reactors after mixing with air. Experiments were performed in an incubator being set to $20^{\circ}C$ $H_2$S concentrations were monitored at the depths of 25, 50, 75 and 100cm from the bottom Of the biofilter reactors. 98% of $H_2$S was removed at the filling depth of only 25cm. NH$_3$removal rate was about 85%. Toluene removal rate was the highest among BTEX. Significant pH drop of a filling material was not observed during the biofilter operation of 1 month. Without mixing the landfill gas stream with all, the removal rate of $H_2$S decreased down to 30%.

• Journal of Korean Society of Water and Wastewater
• /
• v.33 no.1
• /
• pp.79-86
• /
• 2019

In order to measure the filtration characteristics of a cotton ball shape filter, the experiments of suspended solids(SS) surrogate material selection and filtration performance have been carried out in this study. Between the two materials of powdered activated carbon(PAC) and powdered red-clay, PAC is more suitable surrogate material in terms of experimental criteria and particle size distribution in the non-point source pollutants removal system. As a result of the filtration experiments with the cotton ball shape filter, the initial headloss was about 8 cm, and the headloss slightly increased over filtration time. The Kozeny-Carman equation was used to analyze the changes of pressure and porosity during the filtration. The initial porosity was calculated as 0.945 and it decreased to 0.936 at the end of design filtration time. As the filtration continued, the SS concentration of the filtered water gradually increased and the SS removal rate gradually decreased. When the SS target removal efficiency is assumed to be 80%, the cumulative SS removal capacity is expected as $28.8kg/m^2$. This means the volume loading rate of the cotton ball shape filter can be $115m^3/m^2$ when the typical SS concentration of non-point source water pollution is assumed as 250 mg/L.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.14 no.10
• /
• pp.861-867
• /
• 2001

In this paper, in order to investigate the catalytic effect of the sludge exhausted from waterworks on NO$_{x}$ removal, we measure NO removal characteristics with and without sludge pellets in BaTiO$_3$-sludge packed-bed reactor of plate-plate geometry. NO initial concentration is 50 ppm balanced with air and a gas flow rate is 5ι/min. Gas temperature is changed from 25 to 10$0^{\circ}C$ to investigate the role of sludge pellet on removing active oxygen species and NO$_2$. BaTiO$_3$pellets is filled for coronal discharge at upstream of reactor and sludge pellets is filled for catalytic effect at downstream of reactor. The volume percent of sludge pellets to BaTiO$_3$pellets is changed from 0% to 100% and AC voltage is supplied to the reactor for discharging simulated gases. In the results, when sludge pellets is put at the downstream of plasma reactor, NO removal rate is slightly increased. However, NO$_2$and $O_3$ as by-products during NO removal is significantly decreased from 51ppm without sludge pellets to 5 ppm with sludge pellets and from 50 ppm without sludge pellets to 0.004ppm with sludge pellets, respectively. Therefore, NO$_{x}$(NO+NO$_2$) removal rate is increased up to 93%. It is thought that sludge pellet maybe react with active oxygen species and NO$_2$ generated by corona discharge in surface of BaTiO$_3$pellets, the then NO$_2$O$_3$as by-products are considerably decreased. When we increase gas temperature from room temperature to 10$0^{\circ}C$, NO removal rate is decreased, while NO$_2$ concentration is independent on gas temperature. These result suggest that the removal mechanism of active oxygen species and NO$_2$in sludge pellet is not absorption, but chemical reaction. Therefore we expect that sludge pellets exhausted for waterworks could be used as catalyst for NO$_{x}$ removal with high removal rate and low by-product.oduct.