• Journal of Korean Society on Water Environment
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• v.35 no.2
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• pp.115-122
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• 2019

The objective of this study was to investigate the sonophysical and sonochemical effects induced by acoustic cavitation in heterogeneous systemin a 28 kHz double-bath reactor using calorimetry, the aluminiumfoil erosion test, and the luminol test. With no glass beads, calorimetric power in the inner vessel increased as much as the outer sonoreactor lost and total calorimetric power was maintained for various liquid height conditions (0.5 ~ 7 cm) in the vessel. Higher calorimetric energy was obtained at higher liquid height conditions. Similar results were obtained when glass beads were placed with various beads heights (0.5 ~ 2.0 cm) and relatively high calorimetric energy was obtained in spite of large attenuation in the glass beads layer. An aluminium foil placed between the bottom of the inner vessel and the glass beads layer was damaged, indicating significant sonophysical effects. Much less damage was detected when the foil was placed above the beads layer due to large attenuation of ultrasound. Sonochemical effects, visualized by sonochemiluminescence (SCL), also decreased significantly when the beads were placed in the vessel. It was established that the optimization of the liquid height above the solid-material layer could enhance the sonophysical and sonochemical effects in the double-bath sonoreactors.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Nuclear Engineering and Technology
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• v.54 no.6
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• pp.1962-1971
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• 2022

The liquid lead-lithium (Pb-17Li) blanket has many applications in fusion reactors due to its good tritium breeding performance, high heat transfer efficiency and safety. The compatibility of liquid Pb-17Li alloy with the structural material of blanket under magnetic field is one of the concerns. In this study, corrosion experiments China low activation martensitic (CLAM) steel and 316L steel were carried out in a forced convection Pb-17Li loop under 1.0 T magnetic field at 480 ℃ for 1000 h. The corrosion results on 316L steel showed the characteristic with a superficial porous layer resulted from selective leaching of high-soluble alloy elements and subsequent phase transformation from austenitic matrix to ferritic phase. Then the porous layers were eroded by high-velocity jet fluid. The main corrosion mechanism of CLAM steel was selective dissolution-base corrosion attack on the microstructure boundary regions and exclusively on high residual stress areas. CLAM steel performed a better corrosion resistance than that of 316L steel. The high Ni dissolution rate and the erosion of corroded layers are the main causes for the severe corrosion of 316L steel.

• Nuclear Engineering and Technology
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• v.54 no.4
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• pp.1394-1405
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• 2022

The importance of ensuring the inherent safety and security has been more emphasized in recent years to demonstrate the integrity of nuclear facilities under external human-induced events (e.g. aircraft crashes). This work suggests a simulation methodology to effectively evaluate the impact of a commercial aircraft engine onto a dry storage facility. A full-scale engine model was developed and verified by Riera force-time history analysis. A reinforced concrete (RC) structure of a dry storage facility was also developed and material behavior of concrete was incorporated using three constitutive models namely: Continuous Surface Cap, Winfrith, and Karagozian & Case for comparison. Strain-based erosion limits for concrete were suitably defined and the local responses were then compared and analyzed with empirical formulas according to variations in impact velocity. The proposed methodology reasonably predicted such local damage modes of RC structure from the engine missile, and the analysis results agreed well with the calculations of empirical formulas. This research is expected to be helpful in reviewing the dry storage facility design and in the probabilistic risk assessment considering diverse impact scenarios.

• Nuclear Engineering and Technology
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• v.55 no.3
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• pp.947-957
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• 2023

Curved cylindrical structures such as elbows have a non-uniform thickness distribution due to their fabrication process, and as a result have a number of complex mode shapes, including circumferential and axial nodal patterns. In nuclear power plants, material degradation is induced in pipes by flow accelerated erosion and corrosion, causing the wall thickness of carbon steel elbows to gradually thin. The corresponding frequencies of each mode shape vary according to the wall thinning state. Therefore, the thinning state can be estimated by monitoring the varying modal characteristics of the elbow. This study investigated the varying modal characteristics of artificially thinned carbon steel elbows for each thinning state using numerical simulation and experimental methods (MRIT, Multiple Reference Impact Test). The natural frequencies of specified mode shapes were extracted, and results confirmed they linearly decreased with increasing thinning. In addition, by comparing single FRF (Frequency Response Function) data with the results of MRIT, a concise and cost effective thinning estimation method was suggested.

• Advances in aircraft and spacecraft science
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• v.4 no.1
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• pp.37-52
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• 2017

Gas turbines operating in dusty or sandy environment polluted with micron-sized solid particles are highly prone to blade surface erosion damage in compressor stages and molten sand attack in the hot-sections of turbine stages. Commercial/Military fixed-wing aircraft engines and helicopter engines often have to operate over sandy terrains in the middle eastern countries or in volcanic zones; on the other hand gas turbines in marine applications are subjected to salt spray, while the coal-burning industrial power generation turbines are subjected to fly-ash. The presence of solid particles in the working fluid medium has an adverse effect on the durability of these engines as well as performance. Typical turbine blade damages include blade coating wear, sand glazing, Calcia-Magnesia-Alumina-Silicate (CMAS) attack, oxidation, plugged cooling holes, all of which can cause rapid performance deterioration including loss of aircraft. The focus of this research work is to simulate particle-surface kinetic interaction on typical turbomachinery material targets using non-linear dynamic impact analysis. The objective of this research is to understand the interfacial kinetic behaviors that can provide insights into the physics of particle interactions and to enable leap ahead technologies in material choices and to develop sand-phobic thermal barrier coatings for turbine blades. This paper outlines the research efforts at the U.S Army Research Laboratory to come up with novel turbine blade multifunctional protective coatings that are sand-phobic, sand impact wear resistant, as well as have very low thermal conductivity for improved performance of future gas turbine engines. The research scope includes development of protective coatings for both nickel-based super alloys and ceramic matrix composites.

• Clinics in Shoulder and Elbow
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• v.14 no.2
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• pp.242-247
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• 2011

Purpose: We present an atypical case of calcific tendinitis of the shoulder with intraosseous loculation. Materials and Methods: A 59 year-old female complained of acute exacerbation of chronic left shoulder pain and restricted range of motion. Simple radiographs showed a subacromial calcific deposit and magnetic resonance imaging revealed cortical erosion with intraosseous extension of calcific material mimicking infection or tumor. She was managed with arthroscopic excision of the calcific deposit, curettage of the intraosseous lesion and subsequent rotator cuff repair with a suture anchor. Results: Her acute pain promptly subsided. Her rehabilitation was uneventful and she gained full range of motion. Radiographs five months after the operation showed no recurrence of calcific material. Conclusion: Calcific tendinitis of the shoulder can present with a variety of images involving the adjacent bone. The correct recognition of this disorder may avoid unnecessary investigation and treatment.

• The korean journal of orthodontics
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• v.48 no.1
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• pp.48-56
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• 2018

Objective: The purpose of this study was to determine the effects of carbonated water on etched or sealed enamel according to the carbonation level and the presence of calcium ions. Methods: Carbonated water with different carbonation levels was manufactured by a soda carbonator. Seventy-five premolar teeth were randomly divided into a control group and 4 experimental groups in accordance with the carbonation level and the presence of calcium ions in the test solutions. After specimen preparation of the Unexposed, Etched, and Sealed enamel subgroups, all the specimens were submerged in each test solution for 15 minutes three times a day during 7 days. Microhardness tests on the Unexposed and Etched enamel subgroups were performed with 10 specimens from each group. Scanning electron microscopy (SEM) tests on the Unexposed, Etched, and Sealed enamel subgroups were performed with 5 specimens from each group. Microhardness changes in different groups were statistically compared using paired t-tests, the Wilcoxon signed rank test, and the Kruskal-Wallis test. Results: The microhardness changes were significantly different between the groups (p = 0.000). The microhardness changes in all experimental groups except Group 3 (low-level carbonated water with calcium ions) were significantly greater than those in the Control group. SEM showed that etched areas of the specimen were affected by carbonated water and the magnitude of destruction varied between groups. Adhesive material was partially removed in groups exposed to carbonated water. Conclusions: Carbonated water has negative effects on etched or sealed enamel, resulting in decreased microhardness and removal of the adhesive material.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.12
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• pp.762-767
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• 2017

Mullite ($3Al_2O_3{\cdot}2SiO_2$) has emerged as a promising candidate for high-temperature structural materials due to its erosion resistance, chemical and thermal stabilities, relatively low thermal expansion coefficient, excellent thermal shock and creep resistances, and low dielectric constant. However, since the pure mullite sintering temperature is as high as $1,600{\sim}1,700^{\circ}C$, there is an increasing need for a sintering additive capable of improving the strength characteristics while lowering the sintering temperature. Herein we have tried to obtain the optimal sintering additive composition by adding MgO, $Cr_2O_3$, and $Y_2O_3$ to mullite, followed by sintering at $1,325{\sim}1,550^{\circ}C$ for 2 h. With additives of 2 wt% of MgO, 2 wt% of $Cr_2O_3$, 4 wt% of $Y_2O_3$, A density of $3.23g/cm^3$ was obtained for the sintered body at $1,350^{\circ}C$ upon using 2 wt% MgO, 2 wt% $Cr_2O_3$, and 4 wt% $Y_2O_3$ as additives. The three-point flexural strength of that was 275 MPa and the coefficient of thermal expansion (CTE) was $4.15ppm/^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.