• 한국정밀공학회지
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• 제27권8호
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• pp.91-97
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• 2010

Micro-abrasive Jet Machining is one of the new technology which enables micro-scale machining on the surface of high brittle materials. In this technology it is very important to fabricate a mask that prevents excessive abrasives not to machine un-intend surface. Our previous work introduced the micro-stereolithography technology for the mask fabrication. And is good to not only planar material but also for non-planar materials. But the technology requires a 3 dimensional mask CAD model which is perfectly matched with the surface topology of parent material as an input. Therefore there is strong need to develop an automated modeling technology which produce adequate 3D mask CAD model in fast and simple way. This paper introduces a fast and simple mask modeling algorithm which represents geometry of models in voxel. Input of the modeling system is 2D pattern image, 3D CAD model of parent material and machining parameters for Micro-abrasive Jet Machining. And the output is CAD model of 3D mask which reflects machining parameters and geometry of the parent material. Finally the suggested algorithm is implemented as software and verified by some test cases.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.121-124
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• 2004

We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition(MOCVD) and study the physical properties of the GaN layer. We have also investigate the effect of the SiN mask on its optical property. By inserting a SiN mask, (102) the full width at half maximum(FWHM) decreased from 480 arcsec to 409 arcsec. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask. We have thus shown that the SiN mask improved significantly the physical and optical properties of the GgN layer.

• 한국기계가공학회지
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• 제10권6호
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• pp.95-101
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• 2011

Micro-abrasive jet machining(${\mu}AJM$) using mask is a fine machining technology which can carve a figure on a material. The mask should have holes exactly same as the required figure. Abrasive particles are jetted into the holes of the mask and it collide with the material. The collision break off small portion of the material. And the ${\mu}AJM$ nozzle should move all over the machining area. However, in general the carving shape is modeled as in a bitmap figure, because it often contains characters. And the mask model is also often modeled from the bitmap image. Therefore, the machining path of the ${\mu}AJM$ also efficient if it can be generated from the bitmap image. This paper suggest an algorithm which can generate ${\mu}AJM$ tool path directly from the bitmap image of the carving figure. And shows some test results and applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.97-100
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• 2004

We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition (MOCVD) and study the characteristic of the GaN layer. We have changed the deposition time of SiN mask from 45s to 5min and obtain th optimum condition in 45s. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask and the carrier concentraion increased from $3.5{\times}10^{16}cm^{-3}$ to $1.8{\times}10^{17}cm^{-3}$. We have thus shown that the SiN mask improved significantly the optical properties of the GaN layer.

• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.582-586
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• 2005

We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition (MOCVD) and study the physical properties of the GaN layer. We have also investigate the effect of the SiN mask on its optical property. By inserting a SiN mask, (102) the full width at half maximum (FWHM) decreased from 480 arcsec to 409 arcsec and threading dislocation (TD) density decreased from $3.21\times10^9\;cm^{-2}\;to\;9.7\times10^8\;cm^{-2}$. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask. We have thus shown that the SiN mask improved significantly the physical and optical properties of the GaN layer.

• 한국의류산업학회지
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• 제15권6호
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• pp.851-861
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• 2013

This study analyzed the fashionable characteristics of functional fashion mask types. This study reviewed the literature on masks and analyzed fashion photos found in fashion books, fashion collections and on internet fashion sites. The results were categorized into four characteristics. Integration of structure and function showed mask designs that connected to the hood and portable items. It represented the reflection of nomadic life, liberation, obscurity and the consciousness of discomfort. Signs of playfulness showed mask hybrids and animal images, the mask hybrids and humanoid images, the printing of animal characters, body parts and unusual material hybrids. It represented the liberation from a fixed identity, the loss of seriousness, the reduction of tension and the pursuit of pleasure and freedom. The duplicity of aggression and protection showed a futuristic or aggressive helmet facemask, an enclosed mask of intensive color, and the morphological hybrid of a disgusting or aggressive motif. It represented the end of human weakness, the desire of new self-expression and the longing of superhuman power. Fanciful decoration showed masks with glittery decoration, sunglasses with luxury decoration material, a medical facemask made of lace material and fanciful printing. It showed one facet of extreme consumption, the creation of new personality and value, the pursuit of high quality and a mutual coexistence of status and anonymity.

• 한국포장학회지
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• 제30권1호
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• pp.73-83
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• 2024

In this study, environmental evaluation of high barrier coated paper (coating layer/paper) packaging is conducted in comparison with conventional aluminum laminated (PET/VMPET/LLDPE) plastic packaging. The target product for this packaging is a KF94 mask, which requires a high barrier of water and oxygen to maintain the filtration ability of the mask filter. The functional unit of this study is 10,000 mask packaging materials based on a material capable of blocking oxygen (<1 g/m²day) and moisture (<3 g/m²day) for the preservation of KF94 masks. In order to understand the results easily, paper-based mask packaging system divided into 6 stages (pulp, pulping & paper making, calendaring & coating, printing, packing and waste management), while plastic-based mask packaging consists of 5 stages (material production, processing, printing, packing, waste management) In case of paper-based mask packaging, most contributing stage is calendaring & coating, resulting from heat and electricity production. On the other hand, plastic-based mask packaging is contributed more than 30% by material production, specifically due to linear low density polyethylene and purified terephthalic acid production. The comparison results show that global warming potential of paper-based mask packaging has 32% lower than that of plastic-based mask packaging. Most of other impact indicators revealed in similar trend.

• 한국전기전자재료학회논문지
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• 제13권11호
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• pp.901-907
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• 2000

As the minimum feature size for making ULSI approaches the wavelength of light source in optical lithography, the aerial image is so hardly distorted because of the optical proximity effect that the accurate mask image reconstruction on wafer surface is almost impossible. We applied the Optical Proximity Correction(OPC) on isolated patterns assuming Attenuated Phase Shift Mask(APSM) as well as binary mask, to correct the widening of isolated patterns. In this study, we found that applying OPC to APSM shows much better improvement not only in enhancing the resolution and fidelity of t도 images but also in enhancing the process margin than applying OPC to the binary mask. Also, we propose the OPC method of APSM for isolated patterns, the size of which is less than the wavelength of the ArF excimer laser. Finally, we predicted the resolution limit of optical lithography through the aerial image simulation.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.111-117
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• 2008

We have studied surface roughness, contamination of impurity, bonding with some gas element, reflectance and zeta potential on masks to be generated or changed during photolithography/dry or wet etching process. Mask surface roughness was not changed after photolithography/dry etching process. But surface roughness was changed on some area under MoSi film of Cr/MoSi/Qz. There was not detected any impurity on mask surface after plasma dry etching process. Reflectance of mask was increased after variable plasma etching treatment, especially when mask was treated with plasma including $O_2$ gas. Blank mask was positively charged when the mask was treated with Cr plasma etching gas($Cl_2:250$ sccm/He:20 $sccm/O_2:29$ seem, source power:100 W/bias power:20 W, 300 sec). But this positive charge was changed to negative charge when the mask was treated with $CF_4$ gas for MoSi plasma etching, resulting better wet cleaning. There was appeared with negative charge on MoSi/Qz mask treated with Cr plasma etching process condition, and this mask was measured with more negative after SC-1 wet cleaning process, resulting better wet cleaning. This mask was charged with positive after treatment with $O_2$ plasma again, resulting bad wet cleaning condition.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.129-132
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• 1998

In this paper, we have studied the effect of electron reflection on shadow mask on which tungsten oxide film is coated and have studied the variation of beam mislanding with coating thickness in CRT. We found the method to be able to control coating thicknessed and optimum coating thickness of tungsten oxide film was 1∼2$\mu\textrm{m}$. Mislanding of electron beam was reduced about 20∼48% with increasing coating thickness in CRT