Correlation Analysis on Semiconductor Process Variables Using CCA(Canonical Correlation Analysis) : Focusing on the Relationship between the Voltage Variables and Fail Bit Counts through the Wafer Process (CCA를 통한 반도체 공정 변인들의 상관성 분석 : 웨이퍼검사공정의 전압과 불량결점수와의 관계를 중심으로)
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- Journal of Korean Institute of Industrial Engineers
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- v.41 no.6
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- pp.579-587
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- 2015