• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.645-648
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• 2005

Microscopy has enabled the development of many advanced technologies, and higher level microscopic techniques are required according to the increase of research in nano-technology and bio-technology fields. Therefore, in many applications, we need to measure the dimension of micro-scale parts accurately, not just to observe their shapes. To establish the meter-traceability in microscopy, gratings have been widely used as a magnification standard. KRISS provides the certification service of magnification standards using an optical diffractometer and a metrological AFM (MAFM). They are based on different measurement principles, and so can give complementary information for each other. In this paper, we describe the configuration of each system and measurement procedures to certificate grating pitch values of magnification standards. Several measurement results are presented, and the discussion about them are also given. Using the optical diffractometer, we can calibrate a grating specimen with uncertainty of less than 50 pm. The MAFM can measure a grating specimen of down to 100 nm pitch value, and the calibrated values usually have uncertainty less than 500 pm.

• Korean Journal of Digital Imaging in Medicine
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• v.15 no.2
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• pp.39-44
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• 2013

Purpose : The purpose of this study is the magnification rates depending on the area of patient dose (DAP) and glass dosimeter see the change of the dose according to the dose characteristics of low-magnification aims to raise standards. Materials and Method : Direct DR equipment Sonialvision DAR-8000f, Shimadzu was used, the patient entrance dose measurements to the surface of the Rando Phantom of the neck and the abdomen was placed on the Xi unfors. glass dosimeter for measuring organ doses at the same time the Rando Phantom of the major organs in place by inserting a 9 ", 12", 15 ", 17" and 30 seconds for each magnification were measured according in fluoroscopy. DAP meter area of the patient dose was measured. Result : Esophagography at 17" 143% than 9"magnification the average area dose was increased. Organ dose of Esophagography at 17" was decreased 25.32% than 9" magnification. UGI at 17" was increased 129.73% DAP than 9" magnification. Organ dose of UGI at 17" was decreased 23.32% than 9" magnification. Where the major organs of magnification at 17" were decreased(lung -25.96%, stomach -33.09%, spleen -27.81%, liver -4.92%) than 9" magnification. Conclusion : Expected to get better quality image While using the proper magnification, and have recognition that difference Organ doses and DAP meter in fluoroscopy.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.72-79
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• 2006

We measured grating pitch standards using optical diffractometry and analyzed measurement uncertainty. Grating pitch standards have been used widely as a magnification standard for a scanning electron microscope (SEM) and a scanning probe microscope (SPM). Thus, to establish the meter-traceability in nano-metrology using SPM and SEM, it is important to certify grating pitch standards accurately. The optical diffractometer consists of two laser sources, argon ion laser (488 nm) and He-Cd laser (325 nm), optics to make an incident beam, a precision rotary table and a quadrant photo-diode to detect the position of diffraction beam. The precision rotary table incorporates a calibrated angle encoder, enabling the precise and accurate measurement of diffraction angle. Applying the measured diffraction angle to the grating equation, the mean pitch of grating specimen can be obtained very accurately. The pitch and orthogonality of two-dimensional grating pitch standards were measured, and the measurement uncertainty was analyzed according to the Guide to the Expression of Uncertainty in Measurement. The expanded uncertainties (k = 2) in pitch measurement were less than 0.015 nm and 0.03 nm for the specimen with the nominal pitch of 300 nm and 1000 nm. In the case of orthogonality measurement, the expanded uncertainties were less than $0.006^{\circ}$. In the pitch measurement, the main uncertainty source was the variation of measured pitch values according to the diffraction order. The measurement results show that the optical diffractometry can be used as an effective calibration tool for grating pitch standards.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.8
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• pp.72-78
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• 2009

We developed a line standards measurement system using an optical microscope and measured two kinds of line standards. It consists of three main parts: an optical microscope module including a CCD camera, a stage system with a linear encoder, and a measurement program for a microscopic image processing. The magnification of microscope part was calibrated using one-dimensional gratings and the angular motion of stage was measured to estimate the Abbe error. The threshold level in line width measurement was determined by comparing with certified values of a line width reference specimen, and its validity was proved through the measurement of another line width specimen. The expanded uncertainty (k=2) was about 100 nm in the measurements of $1{\mu}m{\sim}10{\mu}m$ line width. In the comparison results of line spacing measurement, two kinds of values were coincide within the expanded uncertainty, which were obtained by the one-dimensional measuring machine in KRISS and the line standards measurement system. The expanded uncertainty (k=2) in the line spacing measurement was estimated as $\sqrt{(0.098{\mu}m)^2+(1.8{\times}10^{-4}{\times}L)^2}$. Therefore, it will be applied effectively to the calibration of line standards, such as line width and line spacing, with the expanded uncertainty of several hundreds nanometer.

• Korean Journal of Optics and Photonics
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• v.34 no.3
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• pp.117-123
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• 2023

The size of an optical surface can significantly affect the performance of an optical system, and high spatial frequency errors have a greater impact. Therefore, it is crucial to measure the surface figure error with high frequency. To address this, a new method called rotational prism stitching interferometer (RPSI) is proposed in this study. The RPSI is a type of stitching interferometer that enhances spatial resolution, but it differs from conventional stitching interferometers in that it does not require the movement of either the mirror tested or the interferometer itself to obtain sub-aperture interferograms. Instead, the RPSI uses a beam expander and a rotating Dove prism to select particular sub-apertures from the entire aperture. These sub-apertures are then stitched together to obtain a full-aperture result proportional to the square of the beam expander's magnification. The RPSI's effectiveness was demonstrated by measuring a 40 mm diameter spherical mirror using a three-magnification beam expander and comparing the results with those obtained from a commercial interferometer. The RPSI achieved surface testing results with nine times higher sampling density than the interferometer alone, with a small difference of approximately 1 nm RMS.

• Current Optics and Photonics
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• v.6 no.6
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• pp.598-607
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• 2022

In this paper, a simple nondestructive technology is used to investigate unstained biological blood cells in three dimensions (3D). The technology employs a reflective phase-only spatial light modulator (SLM) for displaying the phase hologram of the object being tested, and a Fourier lens for its reconstruction. The phase hologram is generated via superposing a digital random phase on the 2D image of the object. The phase hologram is then displayed by the SLM with 256 grayscale levels, and reconstructed by a Fourier lens to present the object in 3D. Since noise is the main problem in this method, the windowed Fourier filtering (WFF) method is applied to suppress the noise of the reconstructed object. The quality of the reconstructed object is refined and the noise level suppressed by approximately 40%. The technique is applied to objects: the National Institute of Standards (NIS) logo, and a film of unstained peripheral blood. Experimental results show that the proposed technique can be used for rapid investigation of unstained biological blood cells in 3D for disease diagnosis. Moreover, it can be used for viewing unstained white blood cells, which is still challenging with an optical microscope, even at large magnification.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.18-22
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• 2008

The pitch and orthogonality of two-dimensional (2-D) gratings were measured using a metrological atomic force microscope (MAFM), and the measurement uncertainty was analyzed. Gratings are typical standard devices for the calibration of precision microscopes, Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2-D gratings, it is important to certify the pitch and orthogonality of such gratings accurately for nanometrology. In the measurement of 2-D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme is required to overcome limitations such as thermal drift and slow scan speed. Two types of 2-D gratings with nominal pitches of 300 and 1000 nm were measured using line scans to determine the pitch measurement in each direction. The expanded uncertainties (k = 2) of the measured pitch values were less than 0.2 and 0.4 nm for each specimen, and the measured orthogonality values were less than $0.09^{\circ}$ and $0.05^{\circ}$, respectively. The experimental results measured using the MAFM and optical diffractometer agreed closely within the expanded uncertainty of the MAFM. We also propose an additional scheme for measuring 2-D gratings to increase the accuracy of calculated peak positions, which will be the subject of future study.

• Proceedings of the Korean Society for Quality Management Conference
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• 1998.11a
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• pp.407-412
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• 1998

TQC, the features of Japanese QC (JQC), is forced to change now. There are many problems related to QC field, such as magnification of quality objects, social quality, thoroughness of CS, enforcement of PL law, applications of ISO standards concerning the QA system and the environmental management system, and still more recent American industrial tendency which attaches importance to TQM and so forth. Qn the occasion of JQC have passed for fifty years, since 1945. I would like to look back upon its QC history and discuss the meaning of the recent changes in QC concepts and the theoretical framework of its QC.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.17 no.5
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• pp.51-59
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• 2003

The utility and many customers employ capacitor banks(STATCON so called at the utility) to help control the power factor(customers) or voltage(the utility) by supplying reactive power to inductive loads. This paper presents analysis of transient overvoltages and harmonics due to utility STATCON switching. One simple and inexpensive means of limiting the voltage magnification transient and reducing harmonics is to switch the capacitor banks on a few minutes after the STATCON has been switched. Simulation results used the EDSA software package show the effects of decreased the transient voltage and harmonic reduction at the customer. And also harmonic limits based on the well-known international harmonic standards IEEE 519 and IEC 1000 are evaluated for the customer.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.401-406
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• 2013

This paper presents experimental evaluation of IRE (isolation roller bearing) seismic isolation device. From the combination of base isolation on the IRE system displacement response spectrum and acceleration response spectrum, the compressive strength and the coefficient of friction experiments. Also the IRE system is evaluated by environment test according to KS standards. Both the resonance and seismic experiments using a combination of the IRE and Natural Rubber Bearing (NRB) are performed in order to analyze the seismic isolation of the IRE system dynamic characteristics. For the given load and exciting frequency, the resonant frequency becomes lower, but the resonant magnification remains to be same. However, it is shown that when we consider the IRE only, the vibration on the table with the horizontal movement and the independent horizontal displacement due to the rolling motion of the plate and roller are significantly reduced. This result verifies that the proposed optimal design method of the IRE system is very effective.