Thermal Stability of W-C-N Diffusion Barrier Deposited by RF Magnetron Sputtering Method (RF Magnetron Sputtering 방식으로 증착된 W-C-N 확산방지막의 열적 안정성 분석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.156-157
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- 2008