• Journal of Electrical Engineering and Technology
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• v.11 no.5
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• pp.1216-1228
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• 2016

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.121-124
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• 2004

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force fer suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system. the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used fer solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage table's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• Proceedings of the KSR Conference
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• 2008.11b
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• pp.364-371
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• 2008

In general Maglev (magnetically levitated vehicle) has about 4 or 5 bogies per one vehicle to improve stability of electromagnetic suspension and 4 air-spring per one bogie are to be equipped to prevent form excessive yawing and pitching motion of bogie. 3 leveling valve per one vehcile will be applied to control the height of carbody. This kind of vehicle is on the design stage, and design review will be carried out before manufacture. The suspension system of Maglev consists of 16 of air-spring, auxiliray reservoir and orifice, 3 leveling valve, which are different composition comparative to conventional rolling stock. To improve operational reliability of vehicle, additional ventilation valve will be equipped with airspring. This kind of new design concept requires fundamental design review. In this study, suspension systems of Maglev will be built as mathematical model. Then designed suspension system will be reviewed in view of various points through proposed suspension simulation.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.228-230
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• 2005

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters. and electromagnetic actuators.

• International Journal of Control, Automation, and Systems
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• v.1 no.1
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• pp.1-10
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• 2003

This paper presents a high-precision magnetically levitated (maglev) stage to meet demanding motion specifications in the next-generation precision manufacturing and nanotechnology. Characterization of dynamic behaviors of such a motion stage is a crucial task. In this paper, we address the issues related to the stochastic modeling of the stage including transfer function identification, and noise/disturbance analysis and prediction. Provided are test results on precision dynamics, such as fine settling, effect of optical table oscillation, and position ripple. To deal with the dynamic coupling in the platen, we designed and implemented a multivariable linear quadratic regulator, and performed time-optimal control. We demonstrated how the performance of the current maglev stage can be improved with these analyses and experimental results. The maglev stage operates with positioning noise of 5 nm rms in $\chi$ and y, acceleration capabilities in excess of 2g(20 $m/s^2$), and closed-loop crossover frequency of 100 Hz.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.3
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• pp.158-164
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• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• Proceedings of the KIEE Conference
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• 2005.07d
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• pp.2809-2811
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• 2005

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters, and electromagnetic actuators.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.

• International Journal of Railway
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• v.4 no.4
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• pp.97-102
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• 2011

In an EMS (Electromagnetic suspension)-type Maglev (Magnetically-levitated) vehicle, the flexibility of the bogie frame may affect the acceleration of the electromagnet that is input into the control system, which could lead to instability in some cases. For this reason, it is desirable to consider bogie frame flexibility in air gap simulations, for the optimization of bogie structure. The objective of this paper is to develop a flexible multibody dynamic model of 1/2 of an EMS-type Maglev vehicle that is under testing, and to compare the air gap responses obtained from the rigid and the flexible body model. The feedback control system and electromagnet models that are unique to the EMS-type maglev vehicle must be included in the model. With this model, dynamics simulations are carried out to predict the air gap responses from the two models, of the rigid and flexible model, and the air gaps are compared. Such a comparative study could be useful in the prediction of the air gap in the design stage, and in designing an air gap control system.