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http://dx.doi.org/10.5370/JEET.2016.11.5.1216

Prototype of 6-DOF Magnetically Levitated Stage Based on Single Axis Lorentz force Actuator  

Xu, Fengqiu (Electrical Information School, Wuhan University, China.)
Xu, Xianze (Corresponding Author: Electrical Information School, Wuhan University, China.)
Chen, Meng (Electrical Information School, Wuhan University, China.)
Publication Information
Journal of Electrical Engineering and Technology / v.11, no.5, 2016 , pp. 1216-1228 More about this Journal
Keywords
Magnetically levitated stage; Lorentz force actuator; Gaussian quadrature; Complete decoupling matrix; Critical damping PID controller;
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Times Cited By KSCI : 6  (Citation Analysis)
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1 M. Sitti, “Survey of Nanomanipulation systems,” in Proc. IEEE-NANO, pp. 75-80, 2001.
2 H. W. Lee, K. C. Kim and J. Lee, “Review of maglev train technologies,” IEEE Trans. Magn., vol. 42, no. 7, pp. 1917-1925, 2006.   DOI
3 H. W. Cho, C. H. Kim, H. S. Han, and J. M. Lin, “Levitation and thrust forces analysis of hybrid-excited linear synchronous motor for magnetically levitated vehicle,” J. Electr. Eng. Technol., vol. 7, no. 4, pp. 564-569, 2012.   DOI
4 Y. Zhu, Q. Li, D. Xu, and M. Zhang, “Modeling of axial magnetic force and stiffness of ring-shaped permanent-magnet passive vibration isolator and its vibration isolating experiment,” IEEE Trans. Magn., vol. 48, no. 7, pp. 2228-2238, 2012.   DOI
5 A. Smirnov, A.H. Pesch, O. Pyrhonen, and J. T. Sawicki, “High-precision cutting tool tracking with a magnetic bearing spindle,” J. Dyn. SYST. Meas. Control, vol. 137, no. 5, pp. 051017, 2015.   DOI
6 K. C. Lee, S. Moon, H. Ha, B. G. Park, J. W. Kim, J. Y. Baek, and M. C. Lee, “A novel high precision electromagnetic suspension for long-stroke movement and its performance evaluation,” J. Electr. Eng. Technol., vol. 9, no. 2, pp. 514-522, 2014.   DOI
7 D. H. Lee, and W. J. Ahn, “Design and analysis of hybrid stator bearingless SRM,” J. Electr. Eng. Technol., vol. 6, no.1, pp. 94-103, 2011.   DOI
8 B. D. Skurdal, and R. L.Gaigler, “Multimission electromagnetic launcher,” IEEE Trans. Magn., vol. 45, no. 1, pp. 458-461, 2009.   DOI
9 J. Lei, X. Luo, X. Chen, and T. Yan, “Modeling and analysis of a 3-DOF Lorentz-force-driven planar motion stage for nanopositioning”, Mechatronics, vol. 20, no. 5, pp. 553-565, 2010.   DOI
10 P. Estevez, A. Mulder, and R. H. M. Schmidt “6-DoF miniature maglev positioning stage for application in haptic micro-manipulation,” Mechatronics, vol. 22, no. 7, pp. 1015-1022, 2012.   DOI
11 Z. Zhang, and C. H. Menq, “Six-axis magnetic levitation and motion control,” IEEE Trans. Robot., vol. 23, no. 2, pp. 196-205, 2007.   DOI
12 W. J. Kim, S. Verma, and H. Shakir, “Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems,” Precision Eng., vol. 31, no. 4, pp. 337-350, 2007   DOI
13 J. W. Jeon, H. S. Oh, and S. Kim, “Experiments of a Novel Magnetic Levitation Stage for Wide Area Movements,” J. Electr. Eng. Technol., vol. 7, no. 4, pp. 558-563, 2012.   DOI
14 S. Verma, H. Shakir, and W. J. Kim, “Novel electromagnetic actuation scheme for multi-axis nanopositioning,” IEEE Trans. Magn., vol. 42, no. 8, pp. 2052-2062, 2006.   DOI
15 A. E. Hajjaji, and M. Ouladsine, “Modeling and nonlinear control of magnetic levitation systems,” IEEE Trans. Ind. Electron., vol. 48, no. 4, pp. 831-838, 2001.   DOI
16 S. Y. Cho, and W. H. Kim, “Robust Zero Power Levitation Control of Quadruple Hybrid EMS System,” J. Electr. Eng. Technol., vol. 8, no. 6, pp. 1451-1456, 2013.   DOI
17 F. Xu, X. Xu, Z. Li, and L. Chu, “Numerical calculation of the magnetic field and force in cylindrical single-axis actuator,” IEEE Trans. Magn., vol. 50, no. 10, pp. 7200506, 2014.
18 M. Mehrtash, N. Tsuda, M. B. Khamesee, “Bilateral macro-micro teleoperation using magnetic levitation,” IEEE/ASME Trans. Mechatron., vol. 16, no. 3, pp. 459-469, 2011.   DOI
19 P. Berkelman, and M. Dzadovsky, “Magnetic levitation over large translation and rotation ranges in all directions,” IEEE/ASME Trans. on Mechatron., vol. 18, no. 1, pp. 44-52, 2013.   DOI
20 Y. S. Lee, J. H. Yang, and S. Y. Shim, “A new model of magnetic force in magnetic levitation systems,” J. Electr. Eng. Technol., vol. 3, no. 4, pp. 584-592, 2008.   DOI