• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.313-313
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• 2013

For high-performance TFT (Thin film transistor), poly-crystalline semiconductor thin film with low resistivity and high hall carrier mobility is necessary. But, conventional SPC (Solid phase crystallization) process has disadvantages in fabrication such as long annealing time in high temperature or using very expensive Excimer laser. On the contrary, MIC (Metal-induced crystallization) process enables semiconductor thin film crystallization at lower temperature in short annealing time. But, it has been known that the poly-crystalline semiconductor thin film fabricated by MIC methods, has low hall mobility due to the residual metals after crystallization process. In this study, Ni metal was shallow implanted using PIII&D (Plasma Immersion Ion Implantation & Deposition) technique instead of depositing Ni layer to reduce the Ni contamination after annealing. In addition, the effect of external magnetic field during annealing was studied to enhance the amorphous silicon thin film crystallization process. Various thin film analytical techniques such as XRD (X-Ray Diffraction), Raman spectroscopy, and XPS (X-ray Photoelectron Spectroscopy), Hall mobility measurement system were used to investigate the structure and composition of silicon thin film samples.

• 한국자기학회지
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• 제10권2호
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• pp.54-61
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• 2000

마그네트론 스퍼터를 사용하여 증착한 CoNbZr 합금박막의 제조 조건 및 열처리에 따르는 구조 및 자기적 성질의 변화를 연구하였다. Ar분압 2mTorr, RF 인가전력 130 W에서 증착되어진 $Co_{87.0}$N $b_{8.5}$Z $r_{4.5}$막은 최대 비저항 3000 $\mu$Ω.cm을 나타냄으로써 가장 안정한 비정질상을 형성하였으며 100 MHz에서 1095의 최대투자율, 1.75 Oe의 최소 보자력을 나타내었다. Ar 분압이 2 mTorr 이상으로 증가할 경우 그리고 RF 인가전력이 130 W 이상으로 증가할 경우 주상정 구조의 발달과 불안정한 비정질상의 형성으로 투자율은 감소하고 보자력은 증가하는 것을 확인하였다 1 mTorr에서 증착되어진 막과 190 W에서 증착되어진 막은 결정질 상을 형성하여 100 이하의 낮은 투자율과 60 Oe의 높은 보자력을 나타내었다. 회전자장중 열처리에 의해 이방성을 제어할 수 있음을 확인하였으며, 증착상태에서 보였던 1095의 투자율은 1345로 증가하였다.증가하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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• pp.13-16
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• 2000

In this study, we have fabricated nonequilibrium $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film, which contains an additional insoluble element Ag, by using DC magnetron sputtering method. We have investigated the magnetic properties of amorphous $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film as a function of rotational field annealing(RFA). After deposition, the amorphous $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film annealed by rotational field annealing method at $350^{\circ}C$ for an hour was founded to have high permeability of 8680 of 100 MHz, 0.2 mOe, low coercivity of 0.86 De and very low core loss of 1.3 W/cc at 1 MHz, 0.1T.

• Journal of Magnetics
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• 제3권4호
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• pp.123-126
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• 1998

The magneto-impedance (MI) has been measured in the annealed Co66Fe4Ni1B14Si15 amorphous ribbon for the evaluation of anisotropy field. MI at the frequency of 10 MHz is related to the transverse permeability from rotational magnetization depending on the local anisotropy field. MI varies sensitively with the annealing temperature, reflecting the change of anisotropy field distribution. The local anisotropy fields evaluated from MI Profiles are discussed in terms of the magnetic softness and microstructural change by the annealing.

• 한국자기학회지
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• 제12권2호
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• pp.46-50
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• 2002

110$\AA$ 두께의 Mumetal 박막을 자기장하에서 기판온도를 변화시키면서 제작하고, 고진공 분위기에서 자기장중 열처리를 수행하였다. 박막에 유도되는 자기이방성은 인가자기장 방향에서 30$^{\circ}$간격으로 180$^{\circ}$까지 자기이력곡선을 측정하여 조사하였다. 기판 온도가 증가할수록 용이축 방향의 보자력은 감소하였으나 일축이방성은 인가자기장 방향에서 벗어났다. 20$0^{\circ}C$에서 한 시간 동안 자기장중 열처리를 수행하면 기판온도에 상관없이 일축이방성이 향상되었다. 기판온도가 5$0^{\circ}C$ 이하일때 4.3 Oe의 이방성 자기장을 나타냈으며 기판온도가 증가할수록 이방성 자기장은 감소하였다. Mumetal 박막의 일축이방성은 열처리 전후 모두 5$0^{\circ}C$에서 가장 잘 유도되었다.

• Journal of Magnetics
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• 제11권1호
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• pp.55-59
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• 2006

The effect of annealing temperature on the permeability and giant magneto-impedance (GMI) behaviors of $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ amorphous alloy has been systematically investigated. The nanocrystalline $Fe_{68.5}Mn_{5}Si_{13.5}B_9Nb_3Cu_1$ alloys consisting of ultra-fine $(Fe,Mn)_3Si$ grains embedded in an amorphous matrix were obtained by annealing their precursor alloy at the temperature range from $500^{\circ}C\;to\;600^{\circ}C$ for 1 hour in vacuum. The permeability and GMI profiles were measured as a function of external magnetic field. It was found that the increase of both the permeability and the GMI effect with increasing annealing temperature up to $535^{\circ}C$ was observed and ascribed to the ultrasoft magnetic properties in the sample, whereas an opposite tendency was found when annealed at $600^{\circ}C$ which is due to the microstructural changes caused by high-temperature annealing. The study of temperature dependence on the permeability and GMI effect showed some insights into the nature of the magnetic exchange coupling between nanocrystallized grains through the amorphous boundaries in nanocrystalline magnetic materials.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2001년도 춘계연구발표회 논문개요집
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• pp.60-61
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• 2001

• 대한전기학회논문지
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• 제40권5호
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• pp.496-500
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• 1991

The effects of annealing with and without magnetic field on magnetic properties of amorphous Fe-B-Si cores have been investigated as a function of toroidal stress. By decreasing the toroidal stress, the magnetic properties of the amorphous ribbon have beenimproved. Near 180 domain walls exist in the thermally annealed toroidal cores, but the domain walls exist in the thermally annealed toroidal cores, but the domain walls are not parallel to the longitudinal direction of the ribbon. In the specimen annealed with a magnetic field strength of 10 Oe in the longitudinal ribbon length axis, the domains are nearly parallel to the longitudinal direction due to the field induced uniaxial anisotropy resulting in further increase in the remanent magnetization and decrease in the coercive force and loss.

• Journal of Magnetics
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• 제1권1호
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• pp.31-36
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• 1996

An externally applied magnetic field during heat treating the $Nd_2Fe_{14}B/Fe_3B$ based spring magnet was found to enhance the exchange coupling between the hard and soft magnetic grains. More than 30% increase in $M_r/M_s$ values for melt-spun $Nd_2Fe_{73.5}Co_3$$(Hf_{1-x}Ga_x)B_{18.5}$ (x=0, 0.5, 1) alloys was resulted from a uniform distribution of $Fe_3B, \alpha-Fe$ and $Nd_2Fe_{14}B$ phases, and also from a reduced grain size of those phases by 20%. The externally applied magnetic field induced a uniform distribution of fine grains. A study of Mossbauer effect also report that the enhancement of total magnetization of nanocomposite $Nd_2Fe_{14}B/Fe_3B$ alloys is attributed to an increased formation of $Fe_3$B after magnetic annealing.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.633-636
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• 1999

In this study, we have fabricated amorphous FeZrBAg thin films with low core losses by using DC magnetron sputtering method. After deposition, rotational field annealing (RFA) method was performed in the dc field of 1.5 kOe. The amorphous FeZrBAg thin films produced by annealing at 35$0^{\circ}C$ was founded to have high permeability of 8680 at 100 MHz, 0.2 mOe, low coercivity of 0.86 Oe high magnetization of 1.5 T and very low core loss of 1.3 W/cc at 1 MHz, 0.IT respectively. Excellent soft magnetic properties in a amorphous FeZrBAg thin films in the present study are presumably the homogeneous formation of very fine bcc $\alpha$-Fe crystalline with the 8.2 nm in an amorphous FeZrBAg thin film matrix.