• Journal of Magnetics
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• v.15 no.3
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• pp.132-137
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• 2010

Plasma etching of $SiO_2$ contact holes was statistically analyzed by a fractional factorial experimental design. The analysis revealed the dependence of the etch rate and DC self-bias voltage on the input factors of the magnetically enhanced reactive ion etching reactor, including gas pressure, magnetic field, and the gas flow rates of $CHF_3$, $CF_4$, and Ar. Empirical models of the DC self-bias voltage and etch rate were obtained. The DC self-bias voltage was found to be determined mainly by the operating pressure and the magnetic field, and the etch rate was related mainly to the pressure and the flow rates of Ar and $CHF_3$.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.8
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• pp.798-804
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• 2006

To overcome the limited relative uncertainty and work range of the existing planar stage and the bulk structure of the contact-less motor for rotation, the novel operating principle to realize the precise rotation is suggested. It uses the two-axial vector forces, normal force and thrust force, of three-induction type of axial motors located $120^{\circ}$ apart, resulting in the contact-free rotation of the mover. Firstly in this paper, the magnetic forces across the air gap are modeled and simulated under the various conditions. It clarifies the feasible range of the derived solution. And the algorithm compensating the strong cross couple between the forces and the control inputs; generally AC magnitude and slip frequency, is given to realize the independent control of six axes. Finally, for the successfully implemented system, the round test and the micro step test results are given.

• Proceedings of the KIEE Conference
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• summer
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• pp.803-805
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• 2004

This paper proposes the calculation method of magnetic coupling coefficient of the contact-less energy transmission system by 3D finite element method with a variation of the secondary core positions. The primary, secondary self and leakage inductances and the capacitances of a resonant circuit are calculated by the finite element analysis results. From these values, the magnetic coupling coefficients are obtained. The secondary voltages and currents at the secondary core positions are calculated by using the resonant circuit and compared.

• Bulletin of the Korean Chemical Society
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• v.18 no.4
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• pp.369-373
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• 1997

When 1H NMR spectra of pyridine, 4-amino-, 4-methyl-, and 4-cyanopyridine coordinated to the paramagnetic polyoxometalate, [SiW11CoⅡO39]6- in D2O are compared, both α- and β-proton peaks are shifted upfield as the basicity of the ligand decreases. The isotropic shifts are separated into contact and pseudocontact contributions by assuming that the contact shifts are proportional to the isotropic shifts of the same ligands coordinated to [SiW11NiⅡO39]6-. This separation reveals that the shift variations with the axial ligand basicity are dominated by changes in the magnetic anisotropy (pseudocontact shift) of [SiW11CoⅡ(ptl)O39]6- (ptl=pyridine-type ligand). The magnitude of the magnetic anisotropy in a series of pyridine-type ligands increases linearly as the pKa of their conjugate acids decreases.

• Communications of the Korean Mathematical Society
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• v.36 no.4
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• pp.817-827
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• 2021

In this paper, we prove that a diffeomorphism f on a normal almost contact 3-manifold M is a CRL-transformation if and only if M is an α-Sasakian manifold. Moreover, we show that a CR-loxodrome in an α-Sasakian 3-manifold is a pseudo-Hermitian magnetic curve with a strength $q={\tilde{r}}{\eta}({\gamma}^{\prime})=(r+{\alpha}-t){\eta}({\gamma}^{\prime})$ for constant 𝜂(𝛄'). A non-geodesic CR-loxodrome is a non-Legendre slant helix. Next, we prove that let M be an α-Sasakian 3-manifold such that (∇_YS)X = 0 for vector fields Y to be orthogonal to ξ, then the Ricci tensor 𝜌 satisfies 𝜌 = 2α²g. Moreover, using the CRL-transformation $\tilde{\nabla}^t$ we fine the pseudo-Hermitian curvature $\tilde{R}$, the pseudo-Ricci tensor $\tilde{\rho}$ and the torsion tensor field $\tilde{T}^t(\tilde{S}X,Y)$.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.119-126
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• 2004

Permanent magnetic gears are magneto-mechanical devices that are widely used to replace the ordinary mechanical gear and to transmit torque without the mechanical contact. This study investigates the characteristics of touch free permanent magnetic gear according to the employing systems. The effect of the magnetic torque is analyzed by using 3 dimensional Finite Element Method (FEM). To estimate the transmission torque of FEM model, the numerical results are compared with the experimental results. The influences of geometry size, magnet number on transmission torque are obtained. As results of this paper, it is confirmed that the transmission torque behavior is associated with the configuration of the magnet numbers and the air gap between the two permanent magnetic gears.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.231-233
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• 2001

Axial magnetic field(AMF) type electrodes can be increase the interrupting capability of vacuum interrupters. Depending on the design, the principle of the local axial magnetic field arrangement are different. In this paper, a new AMF contact design based on a unipolar field arrangement and its characteristics are introduced. The influence of the unipolar AMF on the arc behavior is described by high-speed video camera. In addition, three-dimensional AMF simulations have been peformed by means of a finite element analysis(FEM) program to analyze the influence of magnetic field distribution on the AMF performance. The high interrupting capability of the unipolar AMF type electrode has been confirmed by three-phase test.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.6 s.249
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• pp.622-630
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• 2006

This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the magnetic suspension stage adopting SR principle which can achieve high force density is proposed. The main operating principle and structure for achieving high resolution and long travel range are represented. The magnetic force analysis of each actuator, providing back data for dynamic modeling and controller design are carried out. By conducting basic experiments, the feasibility of the proposed system is shown. In addition the problems which should be improved and their solutions are represented.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.8
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• pp.681-687
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• 2000

Magnetic Characteristics of an InSb hall device of multilayered structures were investigated. For the measurement of electrical properties of the hall device InSb thin films fabricated with series and parallel multilayers wee evaporated. Hall coefficient hall mobility carrier density and hall voltage were measured as a function of the intensity of magnetic field. We found that the XRD analysis of InSb thin film showed good properties at 20$0^{\circ}C$ 60 minutes. Resistance of ohmic contact was increased linearly due to increasing current. Hall voltages at 0.01 T showed 5$\times$10$^{-4}$ [V] and $1.5\times$10$^{-3}$ [V]. Some of device fabrication technique and analysis of magnetic characteristics were discussed.

• Journal of Electrical Engineering and Technology
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• v.13 no.5
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• pp.2116-2124
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• 2018

Magnetic levitation system with the advantages of non-contact, no friction and no wear can satisfy the requirement of high precision and high speed positioning. In this paper, magnetic levitation positioning stage which mainly consists of planar coil and HALBACH permanent magnet array and its control and driving system are designed. Magnetic levitation system is a highly nonlinear and strongly coupled complex system and its control performance can be influenced by the uncertainty and external disturbance. So exact feedback linearization method is used to realize exact linearization and decoupling, and a strategy of sliding mode control based on disturbance observer is proposed to compensate the uncertainty and external disturbance. Detailed proofs of observer's convergence property and system stability are derived. Both the simulation and experiment results verify the effectiveness of sliding mode control algorithm based on disturbance observer.