• Title/Summary/Keyword: Mack 모델

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A Study on the Measurement of Dill and Mack Model Parameters of a Photoresist (포토레지스트의 Dill 및 Mack 모델 파라미터 측정에 관한 연구)

  • Park, Seungtae;Kwon, Haehyuck;Park, Jong-Rak
    • Korean Journal of Optics and Photonics
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    • v.33 no.6
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    • pp.324-330
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    • 2022
  • We measured the Dill and Mack model parameters that determine the exposure and development characteristics of photoresists, respectively. First, photoresist samples were prepared while altering the exposure dose, and changes in transmittance were measured. Analyzing these results, the Dill model parameters A, B, and C were determined. In particular, the exact solution of the Dill model equation was used to determine the C parameter. In addition, changes in thickness were measured as a function of development time for different exposure doses, and the Mack model parameters Rmin, Rmax, a, and n were determined using the results. We also determined parameter values for the reduced Mack model that uses only three parameters, Rmin, Rmax, and n. The root mean square error between the model predictions and the measured values for the photoresist thickness was found to increase slightly compared to the case using the original Mack model with four parameters.

A Study on the Development of 3rd Stage IGG Blower for Shipbuilding Using CFD (CFD를 이용한 선박용 IGG Blower 개발에 관한 연구)

  • Lee, Jong-Jing;Yi, Chung-Seub;Jeong, Soon-Jae;Jang, Sung-Cheol;Kim, Chi-Won
    • Proceedings of the SAREK Conference
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    • 2008.06a
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    • pp.1309-1314
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    • 2008
  • I.G.G is abbreviation for Inert Gas Generator, High temperature in Cargo Tank it desulfurize, exhausted and froze the gas that combined brimstone element and soot, then supply Inert gas by blower, and mack tank inside incombustible range this is equipment that nip in the bud the explosion. The blower for suppling inactivated gas has big impeller with heavy weight to achieve the high pressure, it causes a delay for first operation time and too much load is delivered to motor, total destruction by fire of motor is happening frequently. On this research, we will reduce the size & weight of impeller and install it with several stage, it makes an effect for reducing the first operation time. We also intend to contribute to efficient IGG blower design by research a flowing & pressure specialty from the diameter of impeller, number of blade, and size of casing.

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Calculation of Water Level Variations and Extreme Waves in Busan Harbor due to Storm Surges (고조로 인한 부산항 해수면 변화 및 극한파랑의 산정)

  • Whang Ho-Dong;Lee Joong-Woo;Kwon So-Hyun;Yang Sang-Yong;Gum Dong-Ho
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2004.11a
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    • pp.227-234
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    • 2004
  • Recently huge typhoons had attacked to the coastal waters in Korea and caused disastrous casualties in those area. There are some discussions on correction to the design parameters for the coastal structures. Wave transformation computations with the extreme waves are of value in planning and constructing engineering works, especially in coastal regions. Prediction of typhoon surge elevations is based primarily on the use of a numerical model in this study, since it is difficult to study these events in real time or with use of physical models. Wave prediction with a two dimensional numerical model for a site with complicated coastal lines and structures at the period of typhoon 'Maemi' is discussed. In order to input parameters for the extreme wave conditions, we analyzed the observed and predicted typhoon data. Finally we applied the model discussed above to the storm surge and extreme wave problem at Busan Harbor, the southeast coast of Korea. Effects of water level variation and transformation of the extreme waves in relation with the flooding in coastal waters interested are analyzed. We then mack an attempt to presen a basic hazard map for the corresponding site.

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