• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.698-701
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• 2005

We have investigated experimentally a nano patterning using electron beam lithography for the nickel stamper fabrication. Recently, DVD and Blu-ray disk(BD) have nano-scale patterns in order to increase the storage density. Specially, BD has 100nm-scale patterns which are generally fabricated by electron beam lithography. In this paper, we found optimum condition of electron-beam lithography for 100nm-scale patterning. We controlled various conditions of EHP(acceleration voltage), beam current, dose and aperture size in order to obtain optimum conditions. We used 100nm-thick PMMA layer on a silicon wafer as photoresist. We found that EHP was the most dominant factor in electron-beam lithography.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.1
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• pp.41-46
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• 2011

In this paper, we experimentally investigate factors that decrease in noise of a industrial take-out robot at driving state. For this, we analyse change in the noise of the take-out robot with gear machining accuracy and clearance. In order to calculate the noise related to gear machining accuracy that is based upon the Japanese Industrial Standard(JIS), we equally increase motor speed from 0 rpm to 1250 rpm. In addition, to investigate influence of clearance on noise, we evenly change clearance from 0.5 mm to 1.2 mm. These experiments show that clearance is more effective factor than gear machining accuracy to reduce the noise of the take-out robot.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.569-574
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• 2002

As consumer's desire becomes various, agility of mold manufacturing is most important factor for competence of manufacturer. In common works to use commercial CAM system to generate tool path, some decision making process is required to produce optimal result of CAM systems, The paper proposes a methodology for computer-assisted tool selection procedures for various cutting type, such as rough, semi-rough and finish cuts. The system provides assist-tool-items for machining of design model part of injection meld die by analyzing sliced CAD model of die cavity and core. Also, the generating NC-code of the tool size is used to calculate machining time. The system is developed with commercial CAM using API. This module will be used for optimization of tool selection and planning process.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.1
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• pp.22-28
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• 1996

From the experimental study of Wire-Cut Electric Discharge Machining of STD-11 alloy steel and P-20 tungsten carbide, the characteristics such as hand drum form and discharge gap have been observed and evaluated for various conditions. Hand drum form can be improved when gap have been observed and evaluated for various conditions. Hand drum form can be improved when gap voltage and spark cycle become smaller, thickness become thinner, wire tension become larger and the no of cutting increases. When 60mm thickness tungsten carbide is cut in normal condition, hand drum form becomes larger due to the low conductivity machining allowance become slightly larger when peak discharge current and gap voltage become larger, or wire tension becomes smaller. Under the same condition, machining allowance of tungsten carbide is larger than alloyed steel by 1/100mm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.235-240
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• 2002

In micro-EBM, it is well blown that RC circuit is suitable for discharge circuit because of its low pulse width and relatively high peak current. To increase machining speed without changing unit discharge energy, charge resistance should be decreased. But, if very low, continuous (or normal) arc discharge occurs, then increases electrode wear and reduces machining speed remarkably. In this paper, RC circuit with transistor is used to micro-EDM. Experimental results show that RC circuit with transistor can cut off continuous (or normal) arc discharge effectively if duty factor and switching period of transistor are set up optimally. Through experiments with varying charge resistance, it can be known that RC circuit with transistor has about two times faster machining speed than that of RC circuit. Especially, it has prominent rise-effect of machining speed in low unit discharge energy, so that a high-quality and high-speed micro-EDM can be realized through RC circuit with transistor.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.59-63
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• 2021

Upper electrode is one of core parts using plasma etching process at semiconductor. The purpose of this study is to analyze effects of cutting conditions for mechanical machining of silicon upper electrode. For this research, surface roughness of machined workpiece and depth of damage inside of silicon electrode are experimented and analyzed and different values of feed rate and depth of cut are applied for the experiments. From these experiments, it is verified that the surface roughness and internal damaged layer get worse according to take more fast feed rate. In conclusion, cutting condition is very important factor for machining. Results of this study can use to develop various parts which are made from single crystal silicon and affect various benefits to the semiconductor industry for better productivity.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.9
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• pp.80-89
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• 1997

Die sinking electrical discharge machining(EDM) was conducted for ceramic composite of 33 weight percent TiC based on AI$_{2}$O$_{3}$ ceramic matrix according to the change of current and duty factor(DF). Material removal rate(MRR) was increased as the current and the duty factor increased, but better surface mor-pholoty was obtained in the region of lower current and duty factor. From the scanning electron microscopy(SEM) photographs and the energy dispersive X-ray spectroscopy(EDX) of the EDMed surface, EDM trace formed by one discharge spark was analyzed. Although the bending strength after EDM was highly decreased, reliability obtained by weibull analysis was increased twice. The bending strength was recovered or more by barrel polishing after EDM. From the FEM analysis of temperature for one spark, the possible melting region of AI$_{2}$O$_{3}$and TiC was obtained.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.45 no.3
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• pp.104-114
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• 2022

The purpose of using coolant in machining is both to increase a tool life and also to prevent product deformation and thus, stabilize the surface quality by lubricating and cooling the tool and the machining surface. However, a very small amount of cutting mist should be used because chlorine-based extreme pressure additives are used to generate environmental pollutants in the production process and cause occupational diseases of workers. In this study, medical titanium alloy (Ti-6Al-7Nb) was subjected to a processing experiment by selecting factors and levels affecting cutting power in the processing of the Aerosol Dry Lubrication (ADL) method using vegetable oil. The machining shape was a slot to sufficiently reflect the effect of the cutting depth. As for the measurement of cutting force, the trend of cutting characteristics was identified through complete factor analysis. The factors affecting the cutting force of ADL slot processing were identified using the reaction surface analysis method, and the characteristics of the cutting force according to the change in factor level were analyzed. As the cutting speed increased, the cutting force decreased and then increased again. The cutting force continued to increase as the feed speed increased. The increase in the cutting depth increased the cutting force more significantly than the increase in the cutting speed and the feed speed. Through the reaction surface analysis method, the regression equation for predicting cutting force was identified, and the optimal processing conditions were proposed. The cutting force was predicted from the secondary regression equation and compared with the experimental value.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.8
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• pp.26-32
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• 1998

The grinding force generated during the grinding process causes an elastic deformation of the workpiece, grinding wheel, and machine system. Thus, the true depth of cut is always smaller than the apparent depth of cut. This is known as machining elasticity phenomenon. The machining elasticity parameter is defined as a ratio between the true depth of cut and the apparent depth of cut. It is an important factor to understand the material removal mechanism of the grinding process. To increase productivity, the value of this machining elasticity parameter must be large. Therefore, it is essential to know the characteristics of this parameter. The objective of this research is to study the effect of the major grinding conditions, such as table speed and depth of cut, on this parameter experimentally. Through this research, it is found that this parameter value is increasing when the table speed is decreasing or the depth of cut is increasing. Also, this parameter value depends on the grinding mode (up grinding, down grinding).

• Journal of the Korean Society for Precision Engineering
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• v.15 no.3
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• pp.24-30
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• 1998

Strength and displacement of jig body in index machine utilized for multiprocess machining such as drilling, boring and tapping, etc, at the same time were analyzed by the use of finite element analysis soft ware ANSYS 5.2A. The whole geometry was constructed by 4048 elements and 7016 nodes employing 8 node brick element. The analyses were carried out on five loading cases combining vertical and horizontal machining to simulate the case occurring large displacement and the one occurring small displacement one and provided following conclusions. (1) Jig body had sufficient strength because its safety factor was 6.95 even in the most severe loading case. (2) The largest displacement in Z direction was 549 m and that in radial direction was 43.7 m. (3) In order to reduce the displacement, vertical machining rather than horizontal or two or three processes should be adopted in the same station. (4) Alternate change of horizontal machining direction at consecutive stations can reduce the displace ment. (5) The dimension of the slider should be increased to reduce the displacement by the tolerance in the sliding part. (6) A bypass idle piston head needs to be installed to give a counterpart supporting load from opposite direction for a single horizontal machining case.