• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.196-196
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• 2010

In this work, we deposited SWNTs/silane hybrid thin films by multiple spray-coating on glass substrate, and examined their electrical response for humidity. Generally silane binders which are often used in CNT solution to adhere CNTs to substrate well can be easily functionalized to each own group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. We investigated how silane binders (TEOS,, MTMS and VTMS) in SWNTs hybrid thin films make effect to their electrical response on humidity. As the result, we observed that the resistance in the sample using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2006년도 춘계학술발표논문집
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• pp.587-592
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• 2006

코팅은 플라스틱의 표면의 물성과 렌즈의 광학적 성능을 높이기 위해 필요하다. Allyl diglycol carbonate계열 렌즈 표면의 물성과 광학적 성능을 개선하기 위하여 3-glycidoxypropyltrimethoxysilane(GPTS), methyltrimethoxysilane(MTMS) 및 tetraethyl orthosilicate(TEOS)의 몰 비를 변화시켜 유-무기 하이브리드 재료로 사용하였다. Sol-gel 공정에 의한 flow코팅하여, $140^{\circ}C$에서 4시간 경화하였다. 코팅 렌즈는 투과율, 부착력, 연필경도, 내마모성, 내온수성 및 내약품성을 평가하였고 GPTS, MTMS 및 TEOS의 몰비가 각각 1: 1: 2일 때 가장 우수한 것으로 나타났다.

• 폴리머
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• 제32권4호
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• pp.377-384
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• 2008

본 연구에서는 UV 조사와 alkoxy 가수분해 법을 이용하여 구형 마이크로 실리콘 고분자 비드를 합성하였다. 구형 실리콘 고분자 비드의 입자들의 coefficient of variation(CV)은 UV 조사량의 세기와 조사시간, 반응온도가 증가함에 따라 감소하였다. 합성된 비드의 평균 입경, 굴절률, pH는 각각 $4.1{\mu}m$, 1.43, 7.5이었으며 진비중, 겉보기 비중은 1.30, 0.40이었으며, 수분함량은 2%이하였다. Hexamethyldisilazane(HMDS) 농도가 0.1 wt%일 때 입자크기와 CV는 가장 작았고, 진원도는 $0.95{\sim}0.98{\mu}m$이었다. UV 조사량과 조사시간이 450 W, 90 min일 때 CV는 4.92%이었다. Methyltrimethoxysilane(MTMS)의 농도가 20 wt%일 때 수율은 총 충전량 대비 11.3%까지 증가하였으며 입자의 평균직경은 교반속도와 온도가 증가함에 따라 작아졌다.

• Korean Chemical Engineering Research
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• 제49권3호
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• pp.285-291
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• 2011

Isophorone diisocyanate(IPDI), poly(tetramethylene glycol)(PTMG), dimethylol propionic acid(DMPA)를 출발물질로하여 NCO terminated prepolymer가 합성되었다. 이 prepolymer의 NCO기를 실란으로 capping하기 위해 다양한 실란커플링제인 methyltrimethoxysilane(MTMS), glycidoxypropyl trimethoxysilane(GPTMS), methacryloxypropyl trimethoxysilane(MPTMS), aminopropyl triethoxysilane(APS)이 첨가되었다. 제조된 용액의 평균 입경은 실란커플링제가 첨가되면서 증가하였다. 또한 실란커플링제인 GPTMS, MPTMS, APS의 첨가는 코팅 막의 연필경도를 향상시킬 수 있었으나, MTMS의 첨가는 코팅 막의 연필경도를 향상시킬 수 없었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.37-37
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• 2010

Silicate-silsesquioxane or siloxane-silsesquioxane hybrid thin films are strong candidates as matrix materials for ultra low dielectric constant (low-k) thin films. We synthesized the silicate-silsesquioxane hybrid resins from tetraethoxyorthosilicate (TEOS) and methyltrimethoxysilane (MTMS) through hydrolysis and condensation polymerization by changing their molar ratios ([TEOS]:[MTMS] = 7:3, 5:5, and 3:7), spin-coating on Si(100) wafers. In the case of [TEOS]:[MTMS] 7:3, the dielectric permittivity value of the resultant thin film was measured at 4.30, exceeding that of the thermal oxide (3.9). This high value was thought to be due to Si-OH groups inside the film and more extensive studies were performed in terms of electronic, ionic, and orientational polarizations using Debye equation. The relationship between the mechanical properties and the synthetic conditions of the silicate-silsesquioxane precursors was also investigated. The synthetic conditions of the low-k films have to be chosen to meet both the low orientational polarization and high mechanical properties requirements. In addition, we have investigated a new solution-based approach to the synthesis of semiconducting chalcogenide films for use in thin-film transistor (TFT) devices, in an attempt to develop a simple and robust solution process for the synthesis of inorganic semiconductors. Our material design strategy is to use a sol-gel reaction to carry out the deposition of a spin-coated CdS film, which can then be converted to a xerogel material. These devices were found to exhibit n-channel TFT characteristics with an excellent field-effect mobility (a saturation mobility of ${\sim}\;48\;cm^2V^{-1}s^{-1}$) and low voltage operation (< 5 V). These results show that these semiconducting thin film materials can be used in low-cost and high-performance printable electronics.

• 마이크로전자및패키징학회지
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• 제23권1호
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• pp.35-39
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• 2016

The flexible and superhydrophobic properties of silica aerogels are extremely important material for thermal insulation and oil spill cleanup applications for their long-term use. Flexible silica aerogels were synthesized by using a two-step sol-gel process with precursors, methyltrimethoxysilane (MTMS) followed by supercritical drying. Silica aerogels were prepared at different molar ratio of methanol to MTMS (M). It was observed that the silica aerogels prepared at M=28 were monolithic but inelastic in nature, however, for M=35, the obtained aerogels were monolithic, elastic in nature with less shrinkage. The microstructural studies were carried out using scanning electron microscopy and surface area measurements. The hydrophobicity was confirmed by Fourier transform Infrared spectroscopy and water contact angle measurements. The detailed insight mechanism for flexible nature of silica aerogels and hydrophobic behavior were studied.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.104-104
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• 2003

다양한 구조를 갖는 polysilsesquioxane은 열적, 전기적, 기계적 성질이 우수하여 차세대 고집적 반도체용 저 유전율 층간 절연막 재료로 부각되고 있으며, 유/무기 하이브리드 재료로 많은 연구 대상이 되고 있다. 그러나 PMSSQ(polymethylsilsesquioxane)는 취성으로 인한 반도체 제조의 CMP 공정에서 미세 크렉 발생의 위험이 있으므로 막의 인성 강화가 요구되고 있다. 이를 위하여 PMSSQ의 취성을 보완하기 위한 목적으로 선형 분자인 dimethylsiloxane을 10-20mo1% 도입하고자 하였다. 이때 도입된 dimethylsiloxane기가 PMSSQ에 균일하게 분포하지 않으면 실리콘 기판에 코팅 후 약 43$0^{\circ}C$의 열처리 공정 중에 열분해 되는 위험이 있다. 이에 따라 본 연구에서는 dimethylsiloxane기의 열분해에 의한 문제를 최소화하기 위하여 출발 물질인 MTMS(methyltrimethoxysilane)와 DMDMS(dimethyldimethoxysilane)과의 가수분해 속도차이를 고려한 단계(step) 반응법과 MTMS 와 DMDES(dimethyldiethoxysilane)를 사용한 리간드 교환법(ligand exchange)으로 dimethylsiloxane이 PMSSQ에 도입된 공중합체를 합성하였다. 각 합성 방법에 따라 합성된 공중합 PMSSQ의 특성을 TGA, TG-IR, $^1$H-NMR, $^{29}$ Si-NMR과 in-situ IR을 통하여 분석하였다. 또한 dimethylsiloxane 도입 양 및 상기 제조 방법에 따라 합성한 공중합체를 Si 기판위에 코팅하여 43$0^{\circ}C$에서 열처리한 후 코팅막의 강도, 두께 및 굴절율 변화를 ellipsometry 와 nanoindenter로 분석하였다.

• 한국전기전자재료학회논문지
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• 제23권10호
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• pp.782-787
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• 2010

Recently the solution-based thin film technology has often been treated in the field of device fabrication owing to easy process and convenience for the development of various semiconductor devices and sensors. We deposited on glass substrate single-walled carbon nanotubes (SWNTs)/silane hybrid thin films by multiple spray-coating which is one of solution-based processes, and examined their electrical response for humidity. Generally silane binders which are often mixed in carbon nanotube (CNT) solution to adhere CNTs to substrate well form easily each own functionalized group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. In this work, we investigated how silane binders (TEOS (tetraethoxy silane), MTMS (methyltrimethoxysilane) and VTMS (vinyltrimethoxysilane)) in CNT thin films make effect to their electrical response on humidity. As the result, we found that the resistance in the samples using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

• 한국수소및신에너지학회논문집
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• 제25권2호
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• pp.145-150
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• 2014

This study investigates the preparation of anti-reflective (AR) coating film to improve the efficiency of solar cell. The AR coating film was successfully obtained by dip-coating with AR coatings prepared by sol-gel method. Fluoroalkylsilane was additionally introduced into the coatings to give the self-cleaning effect of AR coating film. We performed the abrasion test, pencil scratch hardness test and cross-cut test to identify the mechanical strength of AR coating film. As the results, the transmittance of AR coating films with 9.07, 18.13 and 27.20 of IPA/MTMS molar ratios were 93.1, 93.6 and 95.3%, respectively. The water contact angle and transmittance of AR coating film increased by the introduction of hydrophobicity. The prepared AR coating film shows the high level of abrasion, hardness and adhesion. The IPA/MTMS molar ratio of 27.20 and the withdrawing speed range of 0.20 ~ 0.28cm/sec are the optimal coating condition in terms of the transmittance and mechanical strength of AR coating film.

• KSBB Journal
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• 제32권1호
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• pp.35-45
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• 2017

In this work the optical fiber glucose and lactate biosensors were developed by using fluorescent dye and enzyme immobilized on the end tip of an optical fiber. 3-Glycidyloxypropyl)methyldiethoxysilane (GPTMS), (3-Aminopropyl) trimethoxysilane (APTMS) and Methyltrimethoxysilane (MTMS) were used to immobilize glucose oxidase (GOD), lactate oxidase (LOD) and ruthenium(II) complex (tris(4,7-diphenyl-1,10-phenanthroline) ruthenium(II), $Ru(dpp)_3^{2+}$) as oxygen sensitive fluorescent dye. MTMS sol-gel was an excellent supporting material for the immobilization of $Ru(dpp)_3^{2+}$, GOD, and LOD on the optical fiber. Storage stability of the optical fiber glucose sensor was kept constant over 20 days, while the optical fiber lactate sensor had constant storage stability over 17 days. The optical fiber glucose and lactate biosensors also maintained good operational stability for 20 hours and 14 hours, respectively. The activities of the immobilized enzymes were most excellent at pH 7 and at $25^{\circ}C$. On-line monitoring of glucose and lactate in a simulated process was performed with the optical fiber glucose and lactate biosensors. On-line monitoring results were agreed with those of off-line data measured with high performance liquid chromatography (HPLC).