• Progress in Superconductivity and Cryogenics
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• v.8 no.1
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• pp.15-18
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• 2006

A new precursor solution wilt low fluorine content was synthesized for MOD processing of coated conductors. In this study, the precursor solution for MOD processing was synthesized using F-free yttrium and copper precursor. It was shown that crack-free and uniform precursor films were formed after calcination in humidified oxygen atmosphere. Less than 2 hours were required to finish the calcination process. The relatively gradual weight loss during the calcination process is attributed to the feasibility of fast calcination profile. The calcined precursor film was converted to a YBCO film without any secondary phases after annealing in wet $Ar/O_2$ atmosphere. Fully converted film shows uniform microstructure and high critical current density. $(Jc=2.7MA/cm^2) $.

• Progress in Superconductivity and Cryogenics
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• v.5 no.3
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• pp.23-25
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• 2003

Effect of chemically modified precursor solution on YBCO coated conductor prepared by MOD-TFA method was investigated. YBCO thin films were deposited on (l00)-oriented single crystalline LaAlO$_3$ substrates by conventional MOD-TFA process. The microstructures of YBCO thin films contain maze-like patterns. The origin of this microstructure was delineated by compositional inhomogeneity during the pyrolysis process and it was shown that addition of diethanolamine (DEA) improve the microstructure of grown YBCO films. In addition, it was demonstrated that the chemical modification of precursor solution makes no harmful effect on biaxial texture of YBCO thin films.

• Proceedings of the Safety Management and Science Conference
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• 2007.11a
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• pp.163-180
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• 2007

The purpose of this paper is to develop an efficient production strategy with changing factors to influence the productivity. The factors would be the number of Multi-Function worker, the method of job dispatching, and lot size. A simulation model has been developed for this study. We used AutoMod simulation and the process activity was animated to follow the flow of process easily. The alternatives have been tested through the simulation model, and the various alternatives is proposed for the efficient production strategy. We hope that the system is applied to similar types of small and medium-sized enterprises to develop an efficient production strategy and to achieve the satisfactory result.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.02a
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• pp.95-97
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• 2003

Y$_2$O$_3$ buffer layers have been fabricated on Ni tapes via MOD process. Films were annealed either in reductive or oxidative condition Successfully (200) orientated buffer layers were grown. The out-of-plane orientation of film were characterized by Δ$\theta$ is about 5.4$^{\circ}$. Although films prepared with acetic acid contains a large amount of microcrack, those prepared with 2-MOE(2-methoxy ethanol) exhibit a crack-free surface.

• Journal of the Korea Safety Management & Science
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• v.9 no.6
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• pp.181-191
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• 2007

The purpose of this paper is to develop an efficient production strategy with changing factors to influence the productivity. The factors would be the number of Multi-Function worker, the method of job dispatching, and lot size. A simulation model has been developed for this study. We used AutoMod simulation and the process activity was animated to follow the flow of process easily. The alternatives have been tested through the simulation model, and the various alternatives is proposed for the efficient production strategy. We hope that the system is applied to similar types of small and medium-sized enterprises to develop an efficient production strategy and to achieve the satisfactory result.

• Journal of the Microelectronics and Packaging Society
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• v.3 no.1
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• pp.33-40
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• 1996

MOD법에 의해 BST박막을 제조하고 전기적 특성을 측정함으로써 마이크로 회로에 적용가능성을 타진하였다. MOD 공정의 선구물질로서 barium neodecanoate, strontium 2-ethylhexanoate 및 titanium dimethoxy 야-2-ethylheanoate를 합성하였다, 합성된 선구물 질들을 Ba0.5Sr0.5TiO3가 되도록 화학양론적으로 혼합하여 공통용매인 p-xylene에 녹인다음 기판위에 spin coating 방법으로 박막을 형성하여 건조하고 소성하였다. 사용된 기판은 ITO/glass, Pt/SiO2/Si, Pt/Ti/SiO2/Si 및 Pt foil을 사용하였다. 소성 속도를 빨리했을 경우 소성속도를 느리게 했을때에 비하여 훨씬 균일하고 치밀한 박막을 얻을수 있었다, 여러 가 지 제조조건의 변화에 따른 유전상수 I-V 특성 및 C-V 측성 등의 전기적 특성을 측정하고 고찰하였다.

• Journal of the Microelectronics and Packaging Society
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• v.1 no.2
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• pp.113-124
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• 1994

MOD법을 마이크로회로용 티탄산 바륨 콘덴서 박막형성에 적용하였다. Barium decanoate barium 2-ethylhexanoate titanium dimethoxy didecanoate 및 titanium dimethoxy di-2-ethylhexanoate와 같은 여러 가지 금속유기화합물들을 합성하고 동정한 다 음 공통용매에 대한 용해도를 시험하였다. 이금속유기화학물들 가운데 barium 2-ethylhexanoate와 titanium dimethoxy di-2-ethylhexanoate가 xylene-pyridine 혼합용매에 잘녹고 MOD법에 의한 BaTiO3 박막형성에 매우 안정한 조성을 이룸을 확인하였다. 이 조 성을 스핀코팅에 의하여 백금박과 실리콘 웨이퍼상에 금속유기화학물 막을 형성하고 최고 온도와 유지시간에 따라 소성하여 형성된 유전체 박막들의 전기전 특성을 측정하고 고찰하 였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.12 no.1
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• pp.62-68
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• 1999

Ferroelectric $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$(x=0, 0.1, 0.2, 0.3) thin films were deposited on $Pt/SiO_2/Si$ substrate by MOD(Metalorganic Decomposition) process. Metal carboxylate and metal alkoxide were used as precursors, and 2-methoxyethanol, xylene as solvents. After spin coating, thin films were pre-annealed at $400^{\circ}C$, followed by RTA(Rapid Thermal Annealing) and final annealing at $800^{\circ}C$ in oxygen atmosphere. These procedures were repeated three times to obtain thin films with the thickness of $2000{\AA}$. To enhance the nucleation and growth of layered-perovskite phase, thin films were rapid-thermally annealed above $720^{\circ}C$ in oxygen atmosphere. As RTA temperature increased, fluorite phase was transformed to layered-perovskite phase. And the change of Nb contents affected dielectric / electrical properties and microstructure. The ferroelectric characteristics of $Sr_{0.7}/B_{2.3}(Ta_{1-x}Nb_x)_2O_9$ thin film were Pr=8.67 $\mu{C}/cm^2$, Ec=62.4kV/cm and $I_{L}=1.4\times10^{-7}A/cm^2$ at the applied voltage of 5V, respectively.

• Progress in Superconductivity
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• v.7 no.1
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• pp.77-82
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• 2005

We report a successful fabrication of high-quality $SmBa_{2}Cu_{3}O_{7-{\delta}}$ (SmBCO) thin films on $LaAlO_3$(LAO)(100) single crystalline substrates by a modified TFA-MOD method. After the pyrolysis heat treatment of spin-coated films up to $400^{\circ}C$, SmBCO films were fired at various temperatures ranging from 810 to $850^{\circ}C$ in a reduced oxygen atmosphere (10 ppm $O_2$ in Ar). Optimally processed SmBCO films exhibited the zero-resistance temperature ($T_{c,zero}$) of 90.2 K and the critical current density ($J_c$) of $0.8\;MA/cm^2$ at 77K in self-field. Compared with the $J_c$ values (normally, > $2\;MA/cm^2$ at 77 K) of MOD-TFA processed YBCO films, rather depressed $J_c$ values in SmBCO films are most probably attributed to the existence of ${\alpha}$-axis oriented grains.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.12a
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• pp.33-34
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• 2006

The effects of Ba and Ce addition has been investigated in YBCO prepared by trifluoroacetate (TFA) metalorganic depostition (MOD) method. Precursor solutions with cation ratios of Y:Ba:Cu:Ce = 1:2+x:3:x (x = 0, 0.05, 0.1 and 1.5) have been prepared by adding an excess amount of cerium and barium. Coated film was calcined at lower temperature and conversion heat treatment at temperature of $780{\sim}810^{\circ}C$. It has been shown that the critical current (Ic) of YBCO film was degraded by doping of Ba and Ce atoms. But Ic was increased as the amount of doped Ba and Ce content increased from 5 % to 15 %. It was observed that there was little increase of a flux pinning force with Ba and Ce addition in YBCO film prepared by TFA-MOD process.