• Title/Summary/Keyword: MI(Magneto-Impedance) Sensor

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Fabrication and Properties of MI Sensor Device using CoZrNb Films (CoZrNb막을 이용한 MI센서 소자의 제작 및 특성)

  • Hur, J.;Kim, Y.H.;Shin, K.H.;Sa-Gong, G.
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.1
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    • pp.52-58
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    • 2004
  • Magneto-Impedance(MI) sensor is a highly sensitive sensor, which was able to detect a weak geomagnetic field. It also has a merit to be able to build in the low power system. In this study, their magnetic permeability and anisotropy field(H$\sub$k/) as a function of some different thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ respectively for 2 hours. Magnetic properties of films are measured by using a M-H loop tracer. Magnetic permeability of a film is measured over the frequency range from 1 ㎒ to 750㎒. By thickening a CoZrNb film relatively, magnetic permeability and impedance are examine to design the. MI sensor which drives at 50㎒, and thereof fabricated the MI sensor which drives at the 50㎒.

Fabrication and Properties of MI Sensor using CoZrNb films (CoZrNb 막을 이용한 MI센서 제작 및 특성)

  • Hur, J.;Kim, Y.H.;Shin, K.H.;SaGong, G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.132-135
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    • 2002
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

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Impedance of CoZrNb Film as a Function of Frequency (CoZrNb막의 주파수에 따른 임피던스의 변화)

  • Hur, J.;Kim, Y.H.;Shin, K.H.;Park, K.I.;SaGong, G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.778-781
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    • 2002
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field$(H_k)$ as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C}$ respectively for 2 hours. Anisotropy field$(H_k)$ of film is measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb film is decreased due to the skin effect with increasing a thickness of the CoZrNb film, and hence its driving frequency is lowered. And, it was examined on the permeability and impedance to fabricate the MI sensor which acts at a low frequency by thickening a CoZrNb film relatively.

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Magneto-Impedance Effect of Zeromagnetostrictive Amorphous Films (영자왜 아몰퍼스 박막의 자기-임피던스 효과)

  • 서강수;임재근;김대주;신용진
    • Proceedings of the Materials Research Society of Korea Conference
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    • 1997.05a
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    • pp.38-38
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    • 1997
  • In the paper, we investigate the magneto-impedance(MI) effect of the Fe-Co-B Amorphous magnetic film, the amorphous magnetic film having near zero magnetostostriction is fabricated by using the sputtering methode, and then annealed in magnetic field. When the external magnetic field is directly applied to the fabricated film, the voltage amplitude between both side of the magnetic film varies about 22% at 10[MHz] and the impedance varies about 21% at 10[Oe]. Thus, we find that the fabricated magnetic film has the characteristics of high-quality sensor element.

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Magnet Location Estimation Technology in 3D Using MI Sensors (MI센서를 이용한 3차원상 자석 위치 추정 기술)

  • Ju Hyeok Jo;Hwa Young Kim
    • Journal of Sensor Science and Technology
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    • v.32 no.4
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    • pp.232-237
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    • 2023
  • This paper presents a system for estimating the position of a magnet using a magnetic sensor. An algorithm is presented to analyze the waveform and output voltage values of the magnetic field generated at each position when the magnet moves and to estimate the position of the magnet based on the analyzed data. Here, the magnet is sufficiently small to be inserted into a blood vessel and has a micro-magnetic field of hundreds of nanoteslas owing to the small size and shape of the guide wire. In this study, a highly sensitive magneto-impedance (MI) sensor was used to detect these micro-magnetic fields. Nine MI sensors were arranged in a 3×3 configuration to detect a magnetic field that changes according to the position of the magnet through the MI sensor, and the voltage value output was polynomially regressed to specify a position value for each voltage value. The accuracy was confirmed by comparing the actual position value with the estimated position value by expanding it from a 1D straight line to a 3D space. Additionally, we could estimate the position of the magnet within a 3% error.

The Enhanced Off-Diagonal Magneto-Impedance Effect in Cu/Ni80Fe20 Core-Shell Composite Wires Fabricated by Electrodeposition under Torsional Strain (비틀림 스트레인 하에서 전기도금으로 만든 Cu 코어/Ni80Fe20 쉘 복합 와이어에서 비대각 자기임피던스(Off-diagonal Magneto-Impedance) 효과의 증대)

  • Kim, Dong Young;Yoon, Seok Soo;Lee, Sang Hun
    • Journal of the Korean Magnetics Society
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    • v.27 no.4
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    • pp.135-139
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    • 2017
  • The magneto-impedance effect (MI effect) has been investigated in metal core/soft magnetic shell composite wires fabricated by electrodeposition of $Ni_{80}Fe_{20}$ on Cu wire (diameter $190{\mu}m$). The diagonal impedances $Z_{zz}$ and $Z_{{\theta}{\theta}}$ in cylindrical coordinate showed strong MI effect for the magnetic field applied along z-axis, while the off-diagonal impedance $Z_{{\theta}z}$ showed very weak MI effect. We have tried to develop the Cu $core/Ni_{80}Fe_{20}$ shell composite wire having strong MI effect in off-diagonal impedance by electrodeposion under torsional strain. The core/shell composite wire electrodeposited under torsional angles above $270^{\circ}$ showed significantly enhanced MI effect in the off-diagonal impedance. The maximum MI effect was observed in the composite wire electrodeposited under torsional angle of $360^{\circ}$. The developed method to enhance off-diagonal MI effect is expected to increase the applicability of the core/shell composite wire to magnetic sensor material.

Magneto-impedance effect of CoFeSiBNi amorphous magnetic films (CoFeSiBNi 아몰퍼스 합금의 자기-임피던스 효과)

  • Lee, Seung-Hun;Park, Byung-Kyu;Hwang, Sung-Woo;Moon, Sung
    • Journal of Sensor Science and Technology
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    • v.16 no.5
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    • pp.389-393
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    • 2007
  • Soft ferromagnetic materials are very useful for many sensors using magnetic materials demanding high permeability, low coercivity and low hysteresis loss. Among them, FeCoSiBNi amorphous magnetic films show a good impedance change (about 5.01 %/Oe, at 10 MHz) by the exterinal magnetic field in this experiment. The magnetic films are produced by melt-spun method, one of the rapid solidification process. Ribbon shape wires were made from the films, and let them annealed in DC magnetic field to increase the maximum Giant Magneto Impedance ratio. Field annealing decreases the stress and changes the effective anisotropy. Thus, we can find that the impedance change (200.47 %) is improved and the fabricated magnetic wire has characteristics of good sensor element.

Permeability of CoZrNb film with thickness (CoZrNb막의 두께에 따른 투자율의 변화)

  • Hoe, J.;Kim, Y.H.;Shin, K.H.;Sa-Gong, G.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.443-446
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    • 2001
  • MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field(H$\sub$k/) as a function of a thickness of sputtered amorphous CoZrNb thin film with high saturation magnetostriction and excellent soft magnetic property are investigated. In order to make a uniaxial anisotropy, thin film was subjected to post annealing with a static magnetic field with 1KOe intensity at 250, 300, and 320$^{\circ}C$ for 2 hour. Anisotropy field(H$\sub$k/)of thin film is measured by using MH loop tracer. Its magnetic permeability of thin film is measured over the frequency range from 1 MHz to 750MHz. It has shown that the magnetic permeability of amorphous CoZrNb thin film is decreased due to the skin effect with increasing a thickness of CoZrNb thin film, and hence its driving frequency is lowered.

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Magneto-Impedance Effect of CoFeSiBNi Amorphous Magnetic Films according to the size (CoFeSiBNi 아몰퍼스 합금의 소자 크기에 대한 자기-임피던스 효과 관찰)

  • Park, Byung-Kyu;Hwang, Sung-Woo;Moon, Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.339-341
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    • 2007
  • Soft ferromagnetic materials are very useful for many sensors using magnetic materials with high permeability, low coercivity and low hysteresis loss. Among them, FeCoSiBNi amorphous magnetic films show us a good impedance change(about 3.05%/Oe, at 12MHz) by the exterior magnetic field in this experiment. These are produced by rapid solidification from the melt and the material is ejected in a jet from a nozzle and quenched in a stream of liquid. After that, we make them a shape of wire with different sizes of width. Thus, we can find that the impedance change (122.16%, at 12MHz) is occurred and the fabricated magnetic wire has the characteristics of good sensor element.

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Magneto-Impedance Effect of FeCoSiB Amorphous Magnetic Films (FeCoSiB계 아몰퍼스 자성박막의 자기-임피 던스 효과)

  • Shin, Yong-Jin;Soh, Dae-Hwa;Kim, Hyen-Wook;Kim, Dae-Ju;Seo, Kang-Soo
    • Korean Journal of Materials Research
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    • v.8 no.3
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    • pp.252-255
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    • 1998
  • In this paper, we investigate the magneto-impedance(M1) effect of the FeCoSiB amorphous magnktic films. The amorphous magnetic film having near zero magnetostriction is fabricated by using the sputtering method, and then annealed in magnetic field. When the external magnetic field is directly applied to the fabricated film, the voltage amplitude between both side of the magnetic film varies about 76.2% at 120[MHzl and the impedance varies about 2.1%/0e. Thus, we find that the fabricated magnetic film has the characteristics of good sensor element.

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