• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 춘계학술대회 논문집
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• pp.305-308
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• 2008

In this paper, the magnetic domain states and recordability of the molded magnetic nanopillars were examined and analyzed by magnetic force microscopy (MFM) measurement. We focused on the some of the technical issues for MFM measurement regarding the lift height and geometry of the MFM tip. The effects of MFM tip shape and lift height on the MFM resolution were analyzed. Finally, we showed that the magnetic film on each molded nanopillars has a single magnetic domain state.

• 한국진공학회지
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• 제9권2호
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• pp.136-143
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• 2000

RF magnetron sputtering법으로 $SrBi_2Ta_2O_9$ (SBT)박막을 상온에서 p-type Si(100) 기판위에 증착하여 DRO 강유전체 메모리(destructive read out ferroelectric random access memory)에 사용되는 강유전체막으로 Pt/SBT/Pt/Ti/$SiO_2$/Si (MFM)구조의 응용가능성을 확인하였다. 구조적인 특징들이 열처리 시간의 변화와 Ar/$O_2$의 가스 유량비의 변화에 따라서 XRD(x-ray diffractometer)에 의해 관찰되었으며 표면 특성은 FE-SEM(field emission scanning electron microscopy)에 의해서 관찰하고 박막의 전기적 특성들은 P-V(polarization-voltage measurement)와 I-V(current-voltage measurement)를 사용하여 관찰하였다. 스퍼터링 증착시 Ar/$O_2$의 가스 유량비는 1:4에서 4:1까지 변화 시켰고 SBT박막은 상온에서 증착시켰다. XRD 측정시 박막들은 SBT의 (105), (110) peak들을 나타내었다. 상온에서 증착시킨 박막은 1시간, 2시간 동안 산소 분위기에서 $800^{\circ}C$ 열처리를 하여 결정화 시켰다. SBT 박막의 P-V곡선은 이력 곡선의 모양을 갖추었으며 비대칭적인 강유전체 특성을 나타내었다. Ar/$O_2$ 가스유량비가 1 : 1, 2 : 1인 경우에 박막의 누설 전류밀도 값이 제일 좋았으며, 그 값은 3V 5V 7V에서 각각 $3.11\times10^{-8} \textrm{A/cm}^2$, $5\times10^{-8}\textrm{A/cm}^2$, $7\times10^{-8}\textrm{A/cm}^2$ 이었다. 열처리 시간을 2시간으로 증가시킨 후, 그들의 전기적 특성과 결정화특성이 개선됨을 확인하였다. AES 분석 및 EPMA분석으로 SBT박막의 깊이 분포 및 조성을 확인하였다.

• Journal of Magnetics
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• 제13권1호
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• pp.34-36
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• 2008

For the measurement of the magnetic field distribution with high spatial resolution and high accuracy, the magnetic field sensing probe must be non-magnetic, but the MFM probe and sub-millimeter-meter size Hall probe use a ferromagnetic tip and block, respectively, to increase the sensitivity. To overcome this drawback, we developed a micro-size search coil magnetometer which consists of a single turn search coil, Terfenol-D actuator, scanning system, and control software. To reduce the noise generated by the stray ac magnetic field of the actuator driving coil, we employed an even function $\lambda$-H magnetostriction curve and lock-in technique. Using the developed magnetometer, we were able to measure the magnetic field distribution with a magnetic field resolution of 1 mT and spatial resolution of $0.1mm{\times}0.2mm$ at a coil vibration frequency of 1.8 kHz.

• 마이크로전자및패키징학회지
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• 제10권2호
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• pp.49-54
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• 2003

본 연구에서는 Pt/SrBi$_2$Ta$_2$O$_{9}$(SBT)/Si (MFS)와 Pt/SBT/Pt (MFM) 각각의 구조에서 수소 열처리에 의한 SBT박막의 물리, 전기적 영향에 대해 연구하였다. SBT 박막의 미세구조 및 전기적 특성은 수소 열처리 후에 SBT 박막의 손상으로 열화된다. 특히, Pt 전극에 의한 SBT 박막의 열화 현상을 연구하기 위해 각각 Si 와 Pt 위에 SBT 를 증착하여 같은 조건으로 열처리를 하였다. XRD, XPS, P-V, C-V 측정을 통해 Pt 전극 없이 SBT자체로도 수소 열처리 후에 열화 됨을 확인 할 수 있었다. 또한, 수소 열화현상이라고 하는 촉매 반응으로 SBT 열화 현상이 Pt로 가속화되었다. 이러한 현상을 방지하기 위해서 새로운 Ir 전극을 제안하여 $Ir/IrO_2/SBT/IrO_2$ 구조에서의 수소 열처리 전후 및 회복 열처리를 통해 SBT 박막의 전기적 특성을 연구하였다. P-V측정을 통해 SBT박막을 이용한 MFM구조에서 Ir이 열화 방지용 전극 물질로의 활용 가능성을 확인하였다.

• Journal of Magnetics
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• 제8권4호
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• pp.164-168
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• 2003

In high density recording system, the recording head field on a medium should be focused in small bit area and should have a sufficient value to overcome the medium coercivity, which resulted in head saturation. In this paper, an efficient method to access the head field and field gradient considering head saturation is presented. The magnetic vector potential on the head surface is pre-calculated considering head saturation in several cases and accumulated into database. The head field on the recording media is easily produced solving Laplace equation using accessed magnetic vector potential boundaries. The computed head field is compared with a quantified magnetic force microscopy measurement.

• Journal of Magnetics
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• 제9권4호
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• pp.121-124
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• 2004

NiO thickness dependences of perpendicular magnetic anisotropy (PMA) in the $NiO/[CoFe/Pt]_5$ multilayers for exchange biasing and $[CoFe/Pt]_4/Pt/[CoFe/Pt]_4$ for interlayer exchange coupling were investigated. Perpendicular magnetization curve was obtained by out-of-plane extraordinary Hall measurement. Magnetic force microscopy (MFM) has been used for the investigation of magnetic domains on thin films. We confirmed that the interlayer exchange coupling (IEC) as a function of NiO thickness at room temperature existed with a period of two monolayers.

• 한국표면공학회지
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• 제31권5호
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• pp.261-265
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• 1998

We investigated compositional separation of Co-23%Cr magnetic alloy thin films with varying film thicknesses. Saturation magnetization and magnetic microstructures were investigated using vibrating sample magnetometer (VSM) and scanning probe microscope (SPM), respectively. Saturation magnetization was as 700 emu/cc for films below 50 nm-thick, and changed to 430 emu/cc for the ones above 2000 nm-thick. This may be due to increment of molar volume of Cr-enriched phase as film thickness increases. The surface grain size in AFM (atomic force microscope) measurement becomes larger as film thickness increases. The MFM (magnetic force microscope) reveals that magnetic microstructure is changed from the fine spherical domains to the maze type domains as film thickness increases. We conclude that employing thickness of Co-22%Cr films below 50 nm is favorable for high density recording in order to enhance perpendicular saturation magnetization and SNR (signal to noise ratio).

• Bulletin of the Korean Chemical Society
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• 제19권5호
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• pp.533-539
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• 1998

A magnetic film was deposited on a slide glass substrate from aqueous solutions of $FeCl_2$ and $NaNO_2$ at 363 K. XRD analysis showed that the film was polycrystalline magnetite $(Fe_{3(1-{\sigma})}O_4)$ without impurity phase. The lattice constant was 0.8390 nm. Mossbauer spectrum of the film could be deconvoluted by the following parameters: isomer shifts for tetrahedral $(T_d)$ and octahedral $(O_h)$ sites are 0.28 and 0.68 mm/s, respectively, and corresponding magnetic hyperfine fields are 490 and 458 kOe, respectively. The estimated chemical formula of the film by the peak intensity of Mossbauer spectrum was $Fe_{2.95}O_4$. Low temperature transition of the magnetite (Verwey transition) was not detected in resistivity measurement of the film. Properties of the film were discussed with those of pressed pellet and single crystal of synthetic magnetites. On the surface of the film, magnetite particles of about 0.2 μm in diameter were identified by noncontact atomic force microscopy (NAFM) and magnetic force microscopy (MFM).