• Transactions of the Society of Information Storage Systems
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• v.10 no.1
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• pp.23-26
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• 2014

In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11a
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• pp.360.1-360
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• 2002

Current information storage devices, such as HDD, CD/DVD-ROM/RW, probe-based memory and cabon nano tubes, are compared with biological information storage mechanisms in DNA and brain memory. Various biological components in living cells are analyzed based on "irreducible complexity" of intelligent design concept. Linear and arel density of information stored in the biological and mechanical storages are compared for the applications and developments of new storage devices.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.582-587
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• 2002

Current information storage devices, such as HDD, CD/DVD-ROM/RW, probe-based memory and hologram memory, are compared with biological information storage mechanisms in DNA and brain memory. Newly developed approaches to overcome the limit of storage capacity are introduced in both magnetic and optical recording devices. Linear and areal density of information stored in the biological and mechanical storages are compared for the applications and developments of new storage devices.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.203-209
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• 2004

Compliant bi-stable mechanism allows two stable states within its operation range staying at one of the local minimum states of the potential energy. Energy storage characteristics of the bi-stable mechanism offer two distinct and repeatable stable states, which require no power input to maintain it at each stable state. This paper suggests an equivalent model of the chevron-type bi-stable microactuator using the equivalent spring stiffness in the rectilinear and the rotational directions. From this model the range of spring stiffness where the bi-stable mechanism can be operated is analyzed and compared with the results of the FEA (Finite Element Analysis) using ANSYS for the buckling analysis, both of which show a good agreement. Based on the analysis, a newly designed chevron-type bi-stable MEMS actuator using hinges is suggested for the latch-up operation. It is found that the experimental response characteristics of around 36V for the bi-stable actuation for the 60$mu extrm{m}$ stroke correspond very well to the results of the equivalent model analysis after the change in cross-sectional area by the fabrication process is taken into account. Together with the resonance frequency experiment where 1760Hz is measured, it is shown that the chevron-type bi-stable MEMS actuator using hinges is applicable to the optical switch as an actuator.

• Smart Structures and Systems
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• v.2 no.2
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• pp.115-126
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• 2006

The Terra-Scope system is an affordable 4-D down-hole seismic monitoring system based on independent, microprocessor-controlled sensor Pods. The Pods are nominally 50 mm in diameter, and about 120 mm long. They are expected to cost approximately $6000 each. An internal 16-bit, extremely low power MCU controls all aspects of instrumentation, eight programmable gain amplifiers, and local signal storage. Each Pod measures 3-D acceleration, tilt, azimuth, temperature, and other parametric variables such as pore water pressure and pH. Each Pod communicates over a standard digital bus (RS-485) through a completely web-based GUI interface, and has a power consumption of less than 400 mW. Three-dimensional acceleration is measured by pure digital force-balance MEMS-based accelerometers. These accelerometers have a dynamic range of more than 115 dB and a frequency response from DC to 1000 Hz with a noise floor of less than $30ng_{rms}/{\surd}Hz$. Accelerations above 0.2 g are measured by a second set of MEMS-based accelerometers, giving a full 160 dB dynamic range. This paper describes the system design and the cooperative shared-time scheduler implemented for this project. Restraints accounted for include multiple data streams, integration of multiple free agents, interaction with the asynchronous world, and hardened time stamping of accelerometer data. The prototype of the device is currently undergoing evaluation. The first array will be installed in the spring of 2006.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.156-156
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• 2004

정보화 및 휴대화 시대에 있어서 폭증하는 정보량을 보다 작은 용기에, 보다 많이 그리고 보다 저렴하게 저장하기 위해서는, 기존 저장기기의 한계를 극복할 수 있는 새로운 개념의 차세대 정보 저장기기가 요구되어 진다. 나노미터 사이즈의 주사탐침이 기록매체표면에 근접하여 정보를 기록/재생하는 PSD는 상기한 저장기기의 대용량화, 소형화, 그리고 저가격화를 충족시킬 수 있는 신개념의 저장기기로, 그 기술적 근간을 SPM(Scanning Probe Microscope)기술과 MEMS(Micro Electro Mechanical Systems) 제작기술에 두고 있다.(중략)

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1903-1905
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• 2003

전자기력을 이용하여 탐침형 정보저장장치의 미디어를 제어할 수 있는 초정밀 구동기를 제작하였다. 탐침형 정보저장장치는 데이터 비트의 크기가 10nm 수준이고, 단일 캔틸레버가 점유하는 영역의 크기가 수십 ${\mu}m$${\times}$수십${\mu}m$ 수준이므로, 미디인 구동기는 수 nm의 위치 정확도 및 수십 ${\mu}m$ 수준의 변위 그리고 100Hz이상의 공진 주파수를 확보하여야한다. 본 연구에서 제작한 탐침형 정보저장장치의 미디어 구동기는 고저항 Si wafer 표면을 Deep RIE로 patterning한 후 그 내부를 도금으로 채워 구리 코일을 형성하고 이를 영구자석과 결합시킨 후, 구리 코일에 전류를 흘려 미디어를 구동하는 방식이다. 사용된 영구자석은 SmCo 자석이며 코일의 폭은 $100{\mu}m$이고 간격은 $20{\mu}m$, 높이는 $70{\mu}m$로 결정하였으며, 100Hz 이상의 공진 주파수를 확보하기 위하여 스프링 재질은 구리보다 상대적으로 stiff한 Si을 사용하였다. 미디어의 크기는 $20{\times}20mm^2$, 전체 구동기의 크기는 $30{\times}30mm^2$이며 측정결과 최대변위는 140mA 인가 시 약 ${\pm}127{\mu}m$이다.

• Transactions of the Society of Information Storage Systems
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• v.2 no.3
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• pp.163-168
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• 2006

Small form factor optical pickup (SFFOP) corresponding to BD specifications is strongly proposed for the next-generation portable storage device. In order to generate SFFOP, small sized optical pickup has been fabricated. We have developed a small sited optical pickup that is called the integrated optical pickup (IOP). The fabrication method of this system is mainly dependant on the use of the wafer based micro fabrication technology, which has been used in MEMS process such as photolithography, reactive ion etching, wafer bonding, and packaging process. This approach has the merits for mass production and high assembling accuracy. In this study, to generate the small sized optical pickup for high recording capacity, IOP corresponding to BD specifications has been designed and developed, including three main parts, 1) design, fabrication and evaluation of objective lens unit, 2) design and fabrication of IOP and 3) evaluation process of FES and TES.

• Tribology and Lubricants
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• v.22 no.6
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• pp.320-328
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• 2006

In this study, the simulation of rolling contact fatigue based on stress analysis is conducted under Elastohydrodynamic Lubrication state. To predict a crack initiation life accurately, it is necessary to calculate contact stress and subsurface stresses accurately. Contact stresses are obtained by contact analysis of a semi-infinile solid based on the use of influence functions and the subsurface stress field is obtained using rectangular patch solutions. And a numerical algorithm using Newton-Rapson method was constructed to calculate the Elastohydrodynamic lubrication pressure. Based on these stress values, several multiaxial high-cycle fatigue criteria are used and the critical loads corresponding to fatigue limits are calculated.