• Title/Summary/Keyword: MEMS sensor

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A Study on Accuracy Analysis and Application of Postion Tracking Technique for Worker Safety Management in Underground Space Construction Field (지하공간 건설시공현장에서의 작업자 안전관리를 위한 위치추적기술 정확도 분석 및 활용 연구)

  • Seol, Moonhyung;Jang, Yonggu;Son, Myungchan;Kang, Injoon
    • Journal of the Korean GEO-environmental Society
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    • v.14 no.8
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    • pp.45-51
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    • 2013
  • In the construction site of underground buildings which have severe environment such as dust, noise, vibration, the technology of rescue the builders in the construction site when accident occurs by tracking the location of the builders and express the mission of supervisor smoothly. In this study, in order to acquire the location information of the builders in the construction site of underground buildings by using MEMS INS and air pressure sensor, we firstly performed the field test in construction site, analyzed the location and the elevation accuracy based on the detected results, and then verified its practicality and rationality after all. As a result, we could acquire worker's position-accuracy within 10m in horizontal direction and 4m in vertical direction. Therefore we could judge availability in construction fields of underground structure.

Attitude Determination Algorithm Design and Performance Analysis for CNUSAIL-1 Cube Satellite (CNUSAIL-1 큐브위성의 자세결정 알고리듬 설계 및 성능분석)

  • Kim, Gyeonghun;Kim, Seungkeun;Suk, Jinyong;Kim, Jong-Rae
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.7
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    • pp.609-618
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    • 2015
  • This paper discusses the attitude determination of the CNUSAIL-1 cube-satellite. The primary mission of the CNUSAIL-1 is sail deployment and operation in low Earth orbit, and the secondary mission is to look into influence of the sail deployment on satellite attitude and orbit. The attitude determination strategy is proposed depending on three mission phases, and its performance and applicability are verified through numerical simulations. This study considers the following sensors: Sun sensors and a three-axis magnetometer as attitude reference sensors, and a three-axis MEMS gyroscope as an inertial attitude sensor. Because sensors used for cube satellites have relatively low performances and worse noise characteristics, an Extended Kalman filter (EKF) is applied to attitude determination. Additionally, it has the merits to deal with the Gaussian noises and to predict the attitude even with no measurements from reference attitude sensors, especially in the eclipse of the cube satellite. The performance of the EKF is compared to a deterministic attitude determination technique, QUEST(QUaternion ESTimation).

Development of a Thin Glass Vibration Measuring System for Productivity Improvement of LCD Manufacturing Line (LCD 생산라인의 생산성 향상을 위한 초박형 유리진동 계측 시스템의 개발)

  • Oh, Young-Kyo;Lee, Jung-Uk;Sun, Ju-Young;Kwack, Jeong-Seok;Won, Moon-Cheol;Lee, Hyun-Yup
    • Journal of Sensor Science and Technology
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    • v.20 no.5
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    • pp.336-342
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    • 2011
  • Recently, the LCD manufacturing industries try to maximize the productivity of LCD panels due to sharp increase in the market need of LCD display. Usually, the increase in manufacturing speed induces additional vibration of glasses and manufacturing machineries. This kind of vibration can induce bad effects on the manufacturing accuracy, and even can damage the glasses. The vibration signal of glass itself is very useful to predict the allowable maximum level of manufacturing speed. Therefore, it is necessary to measure the vibration of the glass itself and a very thin vibration measurement system attachable on the glass is needed. Since in some processes the glasses need to go through very thin gaps such as 2.5mm, We develop a glass vibration measurement system with the thickness of 1.3mm. The system measures the glass vibration using MEMS type accelerometers and store vibration data in a Nand-Flash memory. The performance of the develop system has been verified on a real LCD manufacturing line and the accuracy of vibration measurement is comparable with that of an accurate commercial vibration measurement system.

MnCo2S4/CoS2 Electrode for Ultrahigh Areal Capacitance

  • Pujari, Rahul B.;Lokhande, C.D.;Lee, Dong-Weon
    • Journal of Sensor Science and Technology
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    • v.29 no.4
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    • pp.215-219
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    • 2020
  • MnCo2S4/CoS2 electrode with highly accessible electroactive sites is prepared using the hydrothermal method. The electrode exhibits an areal capacitance of 0.75 Fcm-2 at 6 mAcm-2 in 1 M KOH. The capacitance is further increased to 2.06 Fcm-2 by adding K3Fe(CN)6 and K4Fe(CN)6 (a redox couple) to KOH. This increment is associated with the redox-active properties of cobalt and manganese transition metals, as well as the ion pair of [Fe(CN)6]-3/[Fe(CN)6]-4. The capacitance retention of the MnCo2S4/CoS2 electrode is 87.5% for successive 4000 charge-discharge cycles at 10 mAcm-2 in a composite electrolyte system of KOH and ferri/ferrocyanide. The capacitance enhancement is supported by the lowest equivalent series resistance (0.62 Ωcm-2) of MnCo2S4/CoS2 in the presence of redox additive couple compared with the bare KOH electrolyte.

Fabrication and characteristics of electrostatic micro mirror for optical disk drives (광 저장장치 응용을 위한 마이크로 미러의 제작과 그 특성)

  • Kim, Jong-Wan;Seo, Hwa-Il;Lee, Woo-Young;Rim, Kyung-Hwa;Jang, Young-Jo
    • Journal of Sensor Science and Technology
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    • v.11 no.1
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    • pp.39-47
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    • 2002
  • Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.

Design and Vibration Analysis of Tri-axis Linear Vibratory MEMS Gyroscope

  • Seok, Seyeong;Moon, Sanghee;Kim, Kanghyun;Kim, Suhyeon;Yang, Seongjin;Lim, Geunbae
    • Journal of Sensor Science and Technology
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    • v.26 no.4
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    • pp.235-238
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    • 2017
  • In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.

Guidance Filter Design Based on Strapdown Seeker and MEMS Sensors (스트랩다운 탐색기 및 MEMS 센서를 이용한 유도필터 설계)

  • Yun, Joong-Sup;Ryoo, Chang-Kyung;Song, Taek-Lyul
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.10
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    • pp.1002-1009
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    • 2009
  • Precision guidance filter design for a tactical missile with a strapdown seeker aided by low-cost strapdown sensors has been addressed in this paper. The low-cost strapdown sensors consist of an IMU with 3-axis accelerometers and gyroscopes, 3-axis magnetometers, and a barometer. Missile's position, velocity, attitude, and bias error of the barometer are considered as state variables. Since the state and measurement equations are highly nonlinear, we adopt UKF(Unscented Kalman Filter). The proposed guidance filter has a function of a navigation filter if target position error is not considered. In the case that the target position error is introduced, the proposed filter can effectively estimate the relative states of the missile to the true target. For specific engagement scenarios, we can observe that observability problems occur.

An Integrated Navigation System Combining INS and Ultrasonic-Speedometer to Overcome GPS-denied Area (GPS 음영 지역 극복을 위한 INS/초음파 속도계 결합 항법 시스템 설계)

  • Choi, Bu-Sung;Yoo, Won-Jae;Kim, La-Woo;Lee, Yu-Dam;Lee, Hyung-Keun
    • Journal of Advanced Navigation Technology
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    • v.23 no.3
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    • pp.228-236
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    • 2019
  • Recently, multi-sensor integration techniques have been actively studied to obtain reliable and accurate navigation solution in GPS (Global Positioning System)-denied harsh environments such as urban canyons, tunnels, and underground roads. In this paper, we propose a low-cost ultrasonic-speedometer utilizing the characteristics of the ultrasonic propagation. An efficient integrated INS (inertial navigation system)/ultrasonic-speedometer navigation system is also proposed to improve the accuracy of positioning in GPS-denied environments. To evaluate the proposed system, car experiments with field-collected measurements were performed. By the experiment results, it was confirmed that the proposed INS/ultrasonic-speedometer system bounds the positioning error growth effectively even though GPS signal is blocked more than 10 seconds and a low-cost MEMS IMU (micro electro mechanical systems inertial measurement unit) is utilized.

Comparison Between Performance of a Sound-Triggered Measurement and an Amplitude-Triggered Measurement in Shaking Table Tests (진동대를 이용한 모바일 진동 계측 기기의 사운드 트리거 계측과 진폭 트리거 계측 성능 비교)

  • Mapungwana, S.T.;Lee, Jong-Ho;Yoon, Sung-Won
    • Journal of Korean Association for Spatial Structures
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    • v.19 no.1
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    • pp.117-126
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    • 2019
  • Micro-Electro-Mechanical Systems (MEMS) sensors have been widely used in Structural Health Monitoring due to their convenience and lower costs in comparison to conventional sensors. Triggered measurements are relevant in events such as earthquakes because unlike continuous measurements, they only record the structural response once an event happens. This is more cost effective and it makes the data more manageable because only the required measurements from the event are recorded. The most common method of triggering is amplitude triggering. However, lower input amplitudes (less than 0.1g) cannot be triggered by using this method. In this paper, sound triggering was introduced to allow triggered measurements for lower input amplitude values. The performance of the sound triggering and amplitude triggering were compared by a series of shaking-table tests. It was seen that sound-triggering method has a wider frequency (0.5~10Hz) and amplitude (0.01~1.0g) range of measurements. In addition, the sound triggering method performs better than the amplitude triggering method at lower amplitudes. The performance of the amplitude triggering, in terms of the triggering being simultaneous improves at higher input amplitudes.

An Electrochemical Enzyme Immunochip Based on Capacitance Measurement for the Detection of IgG

  • Yi, Seung-Jae;Choi, Ji-Hye;Kim, Hwa-Jung;Chang, Seung-Cheol;Park, Deog-Su;Kim, Kyung-Chun;Chang, Chulhun L.
    • Bulletin of the Korean Chemical Society
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    • v.32 no.4
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    • pp.1298-1302
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    • 2011
  • This study describes the development of an electrochemical array immunochip for the detection of IgG. Interdigitated immunochip platforms were fabricated by sputtering gold on a glass wafer by using MEMS process and then were coated with Eudragit S100, an enteric polymer, forming an insulating layer over the working area of immunochips. The breakdown of the polymer layer was exemplified by the catalytic action of urease which, in the presence of urea, caused an alkaline pH change. This subsequently caused an increase of the double layer capacitance of the underlying electrode. Used in conjunction with a competitive immunoassay format, this allowed the ratio of initial to final electrode capacitance to be directly linked with the concentration of analyte, i.e. IgG. Responses to IgG could be detected at IgG concentration as low as $250\;ngmL^{-1}$ and showed good linearity up to IgG concentration as high as $20\;{\mu}gmL^{-1}$.