• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.21-25
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• 2004

최근 국가의 10대 신성장 동력산업에 포함 되어 있는 RT(robot technology)는 향후 포스트 반도체산업의 중요한 산업으로 국내 경제를 활성화 시키는 원동력이 될 것으로 전망된다. 이와 더불어 향후에는 현재의 산업용 로봇이 아닌 감각과 지능을 가진 인간친화적인 로봇이 출현할 것으로 기대된다. 즉 주변 환경을 인지하여 정보를 획득하고 지능적 판단, 행위 및 상호작용을 통하여 인간을 지원하는 지능형 로봇은 인간과의 상호작용을 통하여 감성을 이해하며 서비스 제공, 인간의 동작이나 작업을 지원 그리고 위험작업 수행, 인간이 불가능한 작업을 대신 할 수 있을 것이다. (중략)

• The Bulletin of The Korean Astronomical Society
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• v.45 no.1
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• pp.67.1-67.1
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• 2020

Adaptive Optics (AO) is the technology for ground-based telescopes to overcome the interference caused by atmospheric turbulence. We are developing an AO system for the 1-m telescope at Seoul National University Observatory (SNUO). The seeing size of the SNUO is 2 arcseconds on average, and 0.85 arcseconds at best condition. Our system is based on MEMS deformable mirror and Shack-Hartmann wavefront sensor. We developed the wavefront sensor using a cheap CMOS camera, and measured phase disturbance at SNUO. To verify the performance of the AO system, we designed an artificial phase disturber that produces similar scale phase error, measured at SNUO. We carried out laboratory tests in which the AO system measures and corrects the wavefront using the phase disturber and an F/6 light source, the same as that of SNUO telescope. The control system was developed in C++. The system performs closed-loop PI correction up to 100 Hz at a consumer-grade PC.

• Journal of the Korea institute for structural maintenance and inspection
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• v.12 no.4
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• pp.149-160
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• 2008

In this study, the research was carried out on how to identify the modal parameter by acquiring the output response of the structure only through the smart sensor system. The objective of this research is to verify the performance and the on-site adaptability of the smart sensor system that have been actively researched as the advanced measuring system so far. Smart Sensor System was developed so that the real-time dynamic measurement can be performed by means of MEMS-type accelerated sensor, 8 bit CPU, wireless MODEM. In the modal parameter identification test, random excitation was added to the cantilever beam, and then the response of the structure was obtained using the smart sensor system and the wire measurement system respectively. In analyzing the data, modal parameter was identified using NExT & ERA algorithm. Furthermore, the optimal measurement location was selected through EOT algorithm in order to obtain the qualified output response. Result of the test, it was possible to verify the on-site applicability of the smart sensor.

• Journal of Sensor Science and Technology
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• v.9 no.3
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• pp.177-181
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• 2000

The tunneling current is exponentially dependent on the separation gap between a pair of conductors. The detection of displacement can be, therefore, carried out by measurment of a variation in the tunneling current. In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and $Si_3N_4$ thin film membrane. A MEMS process was used for the fabrication of the tunneling devices. The micro-tips were formed on Si wafers by undercutting a differently oriented square of $SiO_2$ with KOH. The stiffness of the $Si_3N_4$ films were observed and the model for the stiffness calculation, which is useful in predicting the stiffness even when the stiffness ranges beyond the scope of the normal experimental condition, was suggested.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.53-62
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• 1999

Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

• The Korean Journal of Ceramics
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• v.7 no.1
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• pp.36-40
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• 2001

In order to fabricate uncooled IR sensors for pyroelectric applications, multilayered thin films of Pt/PbTiO$_3$/Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si and thermally isolating membrane structures of square-shaped/cantilevers-shaped microstructures were prepared. Cavity was also fabricated via direct silicon wafer bonding and etching technique. Metallic Pt layer was deposited by ion beam sputtering while PbTiO$_3$ thin films were prepared by sol-gel technique. Micromachining technology was used to fabricate microstructured-membrane detectors. In order to avoid a difficulty of etching active layers, silicon-nitride membrane structure was fabricated through the direct bonding and etching of the silicon wafer. Although multilayered thin film deposition and device fabrications were processed independently, these could b integrated to make IR micro-sensor devices.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.3
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• pp.139-144
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• 2003

A flat type micro gas sensor was fabricated on the p-type silicon wafer with low stress Si$_3$N$_4$, whose thickness is 2 ${\mu}{\textrm}{m}$, using MEMS technology. WO$_3$ thin film as a sensing material for detection of NO$_2$ gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$-$600^{\circ}C$) for one hour. NO$_2$ sensitivities were investigated for the WO$_3$ thin films with different annealing temperatures. The highest sensitivity was obtained for the samples annealed at $600^{\circ}C$ when it was operated at 20$0^{\circ}C$. The results of XRD analysis showed the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibits higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}/R_{air},$ operating at 20$0^{\circ}C$ to 5 ppm NO$_2$ of the sample annealed at $600^{\circ}C$ were approximately 90.

• Journal of Korean Society for Geospatial Information Science
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• v.14 no.3 s.37
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• pp.47-53
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• 2006

In this contribution, an integration of seamless navigation system for the pedestrian is introduced. To overcome the GPS outages in various situations, multi-sensor of GPS, INS, electronic barometer and compass are considered in one Extented Kalman filter. Especially, the integrated system is designed for low-cost for the practical applications. Therefore, a MEMS IMU is considered, and the low quality of the heading is compensated by the electronic compass. In addition, only the pseudoranges from GPS measurements are considered for possible real-time application so that the degraded height is also controlled by a barometer. The mathematical models for each sensor with systematic errors such as biases, scale factors are described in detail and the results are presented in terms of a covariance analysis as well as the position and attitude errors compared to the high-grade GPS/INS combined solutions. The real application scenario of GPS outage is also investigated to assess the feasible accuracy with respect to the outage period. The description on the current status of the development and future research directions are also stated.

• 전자공학회논문지 IE
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• v.49 no.1
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• pp.12-17
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• 2012

Fast development of ubiquitous technology prompted the broadening of the related application area. Application of ubiquitous techniques and system into the construction sites may give us many benefits. There are always a lot of hazard situations in construction sites, and the falling is known to have the high accident rate. To prevent the falling, there has been a lot of efforts including safety education and use of safety gears. In this study, we designed, fabricated and tested a system that can monitor the worker's safety and location informations in real time by using the wireless technology of TOA and RSSI. We used ATmegal28 that is popular in the industrial equipments as MCU and NanoPan 5357 module from Nanotron and CC2500 chipset from TI for radio circuits. We also used 3-axis accelerometer and pressure MEMS sensors to obtain the environmental information, and therefore to aquire the informations of the worker's movement and altitude. We used Labview software from National Instrument to monitor and control the system. We developed the system to send the warning alarms to the server operator and the workers when the workers in the danger zone did not wear the safety hook.

• Journal of Advanced Navigation Technology
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• v.25 no.1
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• pp.68-77
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• 2021

In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.