• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.10
• /
• pp.1982-1988
• /
• 2002

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.

• Transactions of Materials Processing
• /
• v.28 no.5
• /
• pp.239-246
• /
• 2019

Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.20 no.4
• /
• pp.106-112
• /
• 2021

Thermoplastic microfluidic devices are used in BioMEMS for medical and biotechnology applications, such as gene extraction, DNA analysis, and virus detection. In this research, a simple fabrication protocol with a commercially available pneumatic hot press is proposed and demonstrated for polycarbonate microfluidic devices. Microfluidic channels with a width of 200 ㎛ and a height of 10 ㎛ were designed and machined onto a brass plate as a mold insert using a CNC milling machine. The resulting microfluidic channels on the mold insert were assessed and found to have an actual width of 198 ㎛ and a height of 10 ± 0.25 ㎛. The microfluidic channels were replicated on a polycarbonate sheet using the proposed replication technique at 146℃ for 20 minutes under a constant load of 2400 kgf. The devices were then naturally cooled to 100℃ while maintaining the same pressure. It was found that the microchannels were successfully replicated in the polycarbonate, with a width of 198 ㎛ and a height of 10.07 ㎛. The proposed replication technique thus offers the rapid mass production of high-quality microfluidic devices at a low cost with a process that, unlike conventional photolithography systems, does not require expensive equipment.

• Journal of the Korean Society for Precision Engineering
• /
• v.33 no.11
• /
• pp.911-918
• /
• 2016

A conical roll-shaping process was proposed for fabrication of a metallic spiral blade applied to a small-scale wind turbine system. A spiral blade has continuously different curvatures, with a range of 100 to 350 mm radius. To fabricate this complex shape, we developed a conical roll-shaping process having two main conical rollers for feeding a blank sheet, and two cylindrical side rollers for control of local bending. For clear understanding of the process parameters, numerical analyses were conducted using a commercial code, Pam-Stamp. This study optimized the effects of process parameters, such as gap and angle between the main rollers and side rollers, and also the movement of side rollers. In order to increase the forming efficiency, a central rotation point was also calculated by the analytical approach. This developed rolling process can thus be utilized in a sheet metal forming process for obtaining spirally curved sheet metal shapes.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.49 no.8
• /
• pp.16-21
• /
• 2012

The gyro sensor that made by MEMS process is generated an accumulated error(drift) and escape the zero angle following during calculation of rotate angle. This study propose BACF(Boot Angle Compensation Filter) algorithm for prevent escape zero angle and DCF algorithm for remove accumulated error. DCF algorithm is designed for acquire accurate turn of ratio by remove offset and noise components. BACF algorithm is obtained average offset that removed noise components by recursively calculate. Experimental environment, two-axis gyro sensor and mobile OIS camera mounted control board and 5Hz oscillation of ${\pm}0.5^{\circ}$ for the experiments were carried out. BACF and DCF algorithm is applied and the resulting accumulated error did not occur and exactly zero angle following results were made.

• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.16 no.4
• /
• pp.133-137
• /
• 2016

The video and audio information occupies a large portion of the IoT information. Various sensors can be used in a more accurate situation awareness and the absence of the main information has been required. Increasing in resource management in accordance with the use of various sensors. As a method to reduce the resources required in the communication of the various sensors and find the possibility to process the sensor information that can take the place of the other sensor. In this paper, using the LIS302 DL MEMS motion sensor to measure the data in the ping-pong ball, shuttlecock, tennis ball falling into table tennis. Data measured in the three object was confirmed that in proportion to the amount of impact. This experiment using the accelerometer can be confirmed that changes in the amount of impact. The results using a single multi-function sensor showed a possible implementation. In addition, the recognized in consideration of the situation in the early development stage of the multi-function sensor.

• International Journal of Control, Automation, and Systems
• /
• v.3 no.3
• /
• pp.477-485
• /
• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

• Journal of Sensor Science and Technology
• /
• v.9 no.3
• /
• pp.177-181
• /
• 2000

The tunneling current is exponentially dependent on the separation gap between a pair of conductors. The detection of displacement can be, therefore, carried out by measurment of a variation in the tunneling current. In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and $Si_3N_4$ thin film membrane. A MEMS process was used for the fabrication of the tunneling devices. The micro-tips were formed on Si wafers by undercutting a differently oriented square of $SiO_2$ with KOH. The stiffness of the $Si_3N_4$ films were observed and the model for the stiffness calculation, which is useful in predicting the stiffness even when the stiffness ranges beyond the scope of the normal experimental condition, was suggested.

• Journal of Sensor Science and Technology
• /
• v.8 no.1
• /
• pp.53-62
• /
• 1999

Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2003.03a
• /
• pp.131-131
• /
• 2003

Surface micromachined uncooled IR detector with the optimized VOx bolometric layer was fabricated based on sandwich structure of the V$_2$O$_{5}$V/V$_2$O$_{5}$. In order to improve the detectivity of the IR detector, we optimized a few factors in the viewpoint of bolometric material. Vanadium oxide thin film is a promising material for uncooled microbolometers due to its high temperature coefficient of resistance at room temperature. It is, however, very difficult to deposit vanadium oxide thin films having high temperature coefficient of resistance and low resistance because of process limits in microbolometer fabrication. In order to increase the responsivity and decrease noise, we increase TCR of bolometric material and decrease room temperature resistance based on the sandwich structure of the V$_2$O$_{5}$V/V$_2$O$_{5}$ by conventional sputter. By oxygen diffusion through low temperature annealing of V$_2$O$_{5}$V/V$_2$O$_{5}$ in oxygen ambient, various mixed phase vanadium oxide was formed and we obtained TCR in range of-1.2 ~-2.6%/$^{\circ}C$ at room temperature resistance of 5~100k$\Omega$.mega$.