• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.503-507
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• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.4
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• pp.97-101
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• 2002

Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

• Journal of Sensor Science and Technology
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• v.15 no.5
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• pp.357-361
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• 2006

This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step exposure to control the thicknesses of photoresist structures. Various shapes of photoresist structures were successfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS. In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMS alignment.

• Transactions of Materials Processing
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• v.15 no.9 s.90
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• pp.692-696
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• 2006

Micro fabrication of polymeric materials becomes increasingly important. And it is considered as a low-cost alternative to the silicon or glass-based Micro Electro-Mechanical System(MEMS) technologies. In the present study, micro channels were fabricated via LiGA(Lithographie, Galvanoformung, Abformung) process used for Capillary Electrophoresis(CE) chip. Taguchi method was applied to investigate the effects of process conditions in injection molding(melt temperature, injection speed, mold temperature and packing pressure) on the transcription characteristics of the micro channel. It was found that the skin layer disturbs a formation of micro channel. Furthermore, mold temperature and injection speed were two important factors to affect the replication characteristics of micro channel.

• International Journal of Control, Automation, and Systems
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• v.5 no.1
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.195-195
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• 2010

본 연구에서 제작한 u-bolometer 은 적외선을 흡수하는 멤브레인이 a-Si 위에 Ti 메탈로 이루어져 있다. 이 u-bolometer 는 MEMS 센서로써 3차원 공진 구조를 제작하기 위해서는 희생층을 제거하는 공정이 필수적이며 이 희생 층으로 Polyimide를 사용하고 있는 공정에서 Plasma Ashing 공정은 더욱더 필수적이다. 이 Ashing 공정은 O2 플라즈마를 이용하며 이때 흡수물질인 Ti 레이어가 플라즈마에 의해 면저항과 흡수율의 특성이 어떻게 변화되는지 플라즈마 공정 전후를 분석한 결과 면저항의 변화가 나타났으며 uniformity도 높게 변화하였다. 또한 적외선 흡수율이 약 5% 차이가 나타나는 것을 확인 할 수 있었다.

• Journal of Mechanical Science and Technology
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• v.16 no.5
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• pp.720-731
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• 2002

Flow with moving free surfaces is analyzed with an the Eulerian coordinate system. This study proposes a semi-implicit filling algorithm using VOF in which the PLIC (Piecewise Linear Interface Calculation) -type interface reconstruction method and the donor-acceptor-type front advancing scheme are adopted. Also, a new scheme using extrapolation of the stream function is proposed to find the velocity of the node that newly enters the computational domain. The effect of wall boundary conditions on the flow field and temperature field is examined by numerically solving a two-dimensional casting process.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1642-1647
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• 2003

The market of the horizontal axis washing machine (drum washing machine) has been growing drastically in Korea by about 80% annually since 2000. As market grows fast, the customerTs demands concerning quality becomes more strict and various. Imbalance sensing is a key technology to reduce the NVH problem in a washing machine, because the laundry is time-variant and uncontrollable source of imbalance, which can cause more than 200kgf exciting force. In this paper, imbalance-sensing methods are briefly reviewed, new acceleration sensing circuits are examined, and finally the control algorithm of spinning process is proposed and validated.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.12
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.