• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.401-402
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• 2008

• Journal of IKEEE
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• v.13 no.4
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• pp.37-42
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• 2009

In this study, nanopower ZnO and $SnO_2$ as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and $NO_2$ sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped $SnO_2$ sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and $NO_2$ 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.

• Journal of the Korean Society of Propulsion Engineers
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• v.22 no.6
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• pp.111-117
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• 2018

In this study, an MEMS thrust measurement system was designed and a study on the performance prediction of system was performed to evaluate the performance of micro thruster. Thrust measurement system consists of beam, membrane, and piezoresistive sensor. An FEM analysis was carried out to verify the stability of the system, confirm the stress variation at the beam, and position the piezoresistive sensor. The stability of the designed system was verified by comparing the yield strength of the material with the maximum stress. The piezoresistive sensor was designed to be 20% of the length of the beam to obtain a high gauge factor. The size of the membrane and the beam of the reference model were designed to be $15mm{\times}15mm$, and $500{\mu}m{\times}500{\mu}m$, respectively.

• Journal of Sensor Science and Technology
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• v.25 no.2
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• pp.116-123
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• 2016

This paper presents the fabrication and evaluation of the novel drag force type air flowmeter using MEMS technologies for the vehicle applications. To obtain the air drag force, the flowmeter utilized the curved beam structure, which was realized by the difference of residual stress between the silicon oxide layer and the silicon nitride layer. The paddle structure was applied for the maximum air drag force, and the dual-beam was adapted to prevent distortion. The basic experiments were performed in the wind tunnel, and the stable outputs were obtained. The device was applied to the internal combustion engine, and the results were compared with the HI-DS output where the convection thermal flowmeter was used as the reference sensor. The results indicated that the comparable resolutions and response times were obtained under the various engine speeds.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.406-413
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• 2008

We have been implemented simple statistical pattern recognition methods for harmful gases classification using gas sensors array fabricated by MEMS (Micro Electro Mechanical System) technology. The performance of pattern recognition method as a gas classifier is highly dependent on the choice of pre-processing techniques for sensor and sensors array signals and optimal classification algorithms among the various classification techniques. We carried out pre-processing for each sensor's signal as well as sensors array signals to extract features for each gas. We adapted simple statistical pattern recognition algorithms, which were PCA (Principal Component Analysis) for visualization of patterns clustering and MLR (Multi-Linear Regression) for real-time system implementation, to classify harmful gases. Experimental results of adapted pattern recognition methods with pre-processing techniques have been shown good clustering performance and expected easy implementation for real-time sensing system.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1536-1540
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• 1997

Recently, many advanced technologies in electronics, mechanics, material and computer science have been applied to medictine and they have changed the method of diagnosis and treatment to more quantitative way than before. Now day, with the aid of this technology, the device for the minimal invasive diagnosis and treatment is being developed for the convenience and safety of patients. this paper introduces application of senso and MEMS(Micro Electro Mechnical System) in medicine and biotechnology, which are essential factor for the realization of minimal invasive diagnosis and treatment.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.5
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• pp.455-462
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• 2016

Output Characteristics of the spaceborn image sensor such as infrared(IR) sensor are varied according to time elapses and sensor repetition on/off operation. As a result, the quality of IR sensor image is decreased. Therefore, spaceborne image sensor require a periodic calibration using a black body system by correcting a non-uniformity of the sensor. In this paper, we proposed a MEMS-based black body system that can implement the high temperature uniformity at various standard temperatures ranging from low to high temperature and easily estimate the representative surface temperature. In addition, it has advantages lightweight, low-power and high accuracy. The feasibility of the proposed MEMS-based black body system was verified through the thermal analysis.

• Journal of the Korea institute for structural maintenance and inspection
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• v.18 no.1
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• pp.160-165
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• 2014

In this study, an efficiency test was performed by fabricating MEMS (Micro Electro Mechanical Systems) based 3-axis acceleration sensor modules and an earthquake monitoring system was composed. Data acquisition device (NI-9239) with a 24bit ADC (Analog to Digital Converter) was used for improving the performance of 3-axis acceleration sensor modules and filtered data (100Hz Low Pass Filter) was used for reducing noises. Also this paper focused on detecting meaningful vibration in the building by developing the earthquake monitoring software. If vector sum of 3-axis acceleration is greater than the preset value, the value will be recorded and saved to the file.

• Electronics and Telecommunications Trends
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• v.28 no.5
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• pp.83-92
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• 2013

IT 기술이 발달함에 따라 저전력, 초소형 센서노드를 설치하여 무인으로 정보를 얻을 수 있는 시스템의 도입이 점차 확대되는 추세이며, 이것을 위하여 온도, 습도, 가스 등 환경정보를 획득할 수 있는 센서뿐만 아니라 초소형 저전력 복합환경센서 ROIC(Read-Out Integrated Circuit)의 중요성이 증가하고 있다. 또한 휴대폰, 노트북, 스마트폰, 태블랫 PC 등의 모바일 IT 제품들은 빠르게 소형화, 슬림화, 저전력화 되고 있다. 이런 시스템의 요구에 따라 음향부품도 기본적인 음향감지/출력 성능 이외에 크기 및 소모전력이 중요한 기능요소로 크게 부각되고 있으며, 이것을 위하여 소형화, 저가격화가 가능한 MEMS(Microelectromechanical Systems) 음향센서 및 ROIC 개발이 요구되고 있다. 따라서 본고에서는 복합환경센서 ROIC 및 MEMS 마이크로폰 ROIC의 기술동향 등에 대해서 고찰하고자 한다.

• Journal of Navigation and Port Research
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• v.37 no.6
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• pp.575-580
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• 2013

The IMU(Inertial Measurement Unit) which is the expensive equipment has been used as a special limited area, usually in measurement of posture of applying to the areas of ship, submarine, aircraft and military equipment application. However, in the current situation, MEMS AHRS technology can replace the high-priced IMU in MEMS AHRS selected application field. In this paper, wireless hull motion measurement system was suggested for measuring key elements of ship's movement such as rolling, pitching and yawing using gyro, acceleration and magnetic sensors of AHRS. In order to reduce the error such as instantaneous acceleration, effects and vibration of geomagnetic, we have adopted the sensors equipped with Kalman filtering. The Wireless hull motion measurement system using AHRS sensors was tested in actual ship and it could easily be applied in limited installation circumstances of the ship. In the future, this system can be useful in the navigation safety and marine accident analysis by using with ship equipment such as INS or VDR in the maritime.