Browse > Article
http://dx.doi.org/10.6108/KSPE.2018.22.6.111

Design and Performance Prediction of μN Level MEMS Thrust Measurement System of Piezoresistance Method  

Ryu, Youngsuk (Department of Mechanical Engineering, Hanbat National University)
Lee, Jongkwang (Department of Mechanical Engineering, Hanbat National University)
Publication Information
Journal of the Korean Society of Propulsion Engineers / v.22, no.6, 2018 , pp. 111-117 More about this Journal
Abstract
In this study, an MEMS thrust measurement system was designed and a study on the performance prediction of system was performed to evaluate the performance of micro thruster. Thrust measurement system consists of beam, membrane, and piezoresistive sensor. An FEM analysis was carried out to verify the stability of the system, confirm the stress variation at the beam, and position the piezoresistive sensor. The stability of the designed system was verified by comparing the yield strength of the material with the maximum stress. The piezoresistive sensor was designed to be 20% of the length of the beam to obtain a high gauge factor. The size of the membrane and the beam of the reference model were designed to be $15mm{\times}15mm$, and $500{\mu}m{\times}500{\mu}m$, respectively.
Keywords
MEMS; Thrust Measurement System; FEM; Piezoresistive Sensor;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Lee, J.K., "Fabrication Method and Performance Evaluation of Micro Igniter for MEMS Thruster," Journal of the Korean Society of Propulsion Engineers, Vol. 19, No. 1, pp. 1-8, 2015.   DOI
2 Jung, J.Y. and Lee, J.K., "Performance Prediction and Analysis of a MEMS Solid Propellant Thruster," Journal of the Korean Society of Propulsion Engineers, Vol. 21, No. 6, pp. 1-7, 2017.   DOI
3 Markusic, T.E., Jones, J.E. and Cox, M.D., "Thrust Stand for Electric Propulsion Performance Evaluation," 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, Fort Lauderdale, F.L., U.S.A., AIAA 2004-3441, July 2014.
4 Orieux, S., Rossi, C. and Esteve, D., "Thrust Stand for Ground Tests of Solid Propellant Microthrusters," Rev. Sci. Instrum., Vol. 73, No. 7, pp. 2694-2698, 2002.   DOI
5 Wang, A., Wu, H., Tang, H., Liu, Y. and Liang, X., "Development and Testing of a New Thrust Stand for Micro-Thrust Measurement in Vacuum Conditions," Vaccum, Vol. 91, No. 3, pp. 35-40, 2013.   DOI
6 Lee, J.H. and Shin, J.C., "Micro Thrust Measurement System Development and Validation," 46th KSPE Spring Conference, Jeju, Korea, pp. 829-833, May 2016.
7 Yang, Y.X., Tu, L.C., Yang, S.Q. and Luo, J., "A Torsion Balance for Impulse and Thrust Measurements of Micro-Newton Thruster," Rev. Sci. Instrum., Vol. 83, No. 1, 015105 (7 page) , 2012.   DOI
8 Acosta-Zamora, A., Flores, J.R. and Choudhuri, A., "Torsional Thrust Balance Measurement System Development for Testing Reaction Control Thrusters," Measurement, Vol. 46, No. 9, pp. 3414-3428, 2013.   DOI
9 Ryu, Y.S. and Lee, J.K., "Design of Load Cell Type Thrust Measurement System for Performance Evaluation of ${\mu}$N Level Thruster," 2017 KSPE Fall Conference, Busan, Korea, pp. 36-37, November 2017.
10 Sasoh, A. and Arakawa, Y., "A High-Resolution Thrust Stand for Ground Tests of Low-Thrust Space Propulsion Devices," Rev. Sci. Instrum., Vol. 64, No. 3, pp. 719-723, 1993.   DOI
11 Barlian, A., Park, W.T., Mallon, J.R., Rastegar, A.J. and Pruitt, B.L., "Review: Semiconductor Piezoresistance for Microsystems," Proceeding of the IEEE, Vol. 97, No. 3, pp. 513-552, 2009.   DOI
12 Yu, H. and Huang, J., "Design and Application of a High Sensitivity Piezoresistive Pressure Sensor for Low Pressure Conditions," Sensors, Vol. 15, No. 9, pp. 22692-22704, 2015.   DOI
13 Kim, Y.D., "MEMS Thin Silicon Gauge for Strain Measurement of Structural Elements," Ph.D. Dissertation, Department of Mechanical, Aerospace and Systems Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Korea, 2010.