• Title/Summary/Keyword: MEMS 라이다

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Long Distance and High Resolution Three-Dimensional Scanning LIDAR with Coded Laser Pulse Waves (레이저 펄스 부호화를 이용한 원거리 고해상도 3D 스캐닝 라이다)

  • Kim, Gunzung;Park, Yongwan
    • Korean Journal of Optics and Photonics
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    • v.27 no.4
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    • pp.133-142
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    • 2016
  • This paper presents the design and simulation of a three-dimensional pixel-by-pixel scanning light detection and ranging (LIDAR) system with a microelectromechanical system (MEMS) scanning mirror and direct sequence optical code division multiple access (DS-OCDMA) techniques. It measures a frame with $848{\times}480$ pixels at a refresh rate of 60 fps. The emitted laser pulse waves of each pixel are coded with DS-OCDMA techniques. The coded laser pulse waves include the pixel's position in the frame, and a checksum. The LIDAR emits the coded laser pulse waves periodically, without idle listening time to receive returning light at the receiver. The MEMS scanning mirror is used to deflect and steer the coded laser pulse waves to a specific target point. When all the pixels in a frame have been processed, the travel time is used by the pixel-by-pixel scanning LIDAR to generate point cloud data as the measured result.

Synthesis of LiDAR-Detective Black Material via Recycling of Silicon Sludge Generated from Semiconductor Manufacturing Process and Its LiDAR Application (반도체 제조공정에서 발생하는 실리콘 슬러지를 재활용한 라이다 인지형 검은색 소재의 제조 및 응용)

  • Minki Sa;Jiwon Kim;Shin Hyuk Kim;Chang-Min Yoon
    • Journal of the Korea Organic Resources Recycling Association
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    • v.32 no.1
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    • pp.39-47
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    • 2024
  • In this study, LiDAR-detective black material is synthesized by recycling silicon sludge (SS) that is generated from semiconductor manufacturing process, and its recognition is confirmed using two types of LiDAR sensors (MEMS and Rotating LiDAR). In detail, metal impurities on the surface of SS is removed, followed by coating of titanium dioxide (TiO2) and subsequent chemical reduction to obtain SS-derived black TiO2 (SS/bTiO2) material. As-prepared SS/bTiO2 is mixed with transparent paint to prepare hydrophilic black paints and applied to a glass substrate using a spray gun. SS/bTiO2-based paint shows similar blackness (L*=15.7) compared to commercial carbon black-based paint, and remarkable NIR reflectance (26.5R%, 905nm). Furthermore, MEMS and Rotating LiDAR have successfully detected the SS/bTiO2-based paint. This is attributed to the occurrence of high reflection of light at the interface between the black TiO2 and the silicon sludge according to the Fresnel's reflection principle. Hence, the new application field to effectively recycle silicon sludge generated in the semiconductor manufacturing process has been presented.

Mobile Mapping System Development Based on MEMS-INS for Measurement of Road Facility (도로시설물 계측을 위한 MEMS-INS 기반 모바일매핑시스템(MMS) 개발)

  • Lee, Kye Dong;Jung, Sung Heuk;Lee, Ki Hyung;Choi, Yun Soo;Kim, Man Sik
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.36 no.2
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    • pp.75-84
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    • 2018
  • The purpose of this study is that the low-cost mobile mapping system using INS (Inertial Navigation System) based on MEMS (Micro Electro Mechanical System) could decipher the interpretation of road facility with the accuracy of x, y 0.546m plane error. Even though the MMS (Mobile Mapping System) technology as a new measurement technology has been used vividly to set up geographic information by some world leading surveying equipment manufacturers, the domestic technology is still in its beginning stage. Several domestic institutes and companies tried to catch up the leading technology but they just produced prototypes which needs more stabilization. Through this thesis, we developed low-cost mobile mapping system installed with INS based on MEMS after time synchronizing sensors for MMS such as LiDAR (Light Detection And Ranging), CCD (Charge Coupled Device), GPS/INS (Global Positioning System / Inertial Navigation System) and DMI (Distance Measurement Instrument).

Development Status of Crowdsourced Ground Vibration Data Collection System Based on Micro-Electro-Mechanical Systems (MEMS) Sensor (MEMS 센서 기반 지반진동 정보 크라우드소싱 수집시스템 개발 현황)

  • Lee, Sangho;Kwon, Jihoe;Ryu, Dong-Woo
    • Tunnel and Underground Space
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    • v.28 no.6
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    • pp.547-554
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    • 2018
  • Using crowdsourced sensor data collection technique, it is possible to collect high-density ground vibration data which is difficult to obtain by conventional methods. In this study, we have developed a crowdsourced ground vibration data collection system using MEMS sensors mounted on small electronic devices including smartphones, and implemented client and server based on the proposed infrastructure system design. The system is designed to gather vibration data quickly through Android-based smartphones or fixed devices based on Android Things, minimizing the usage of resource like power usage and data transmission traffic of the hardware.

Investigation of Flying Characteristic of Sliders with Micro-actuator (마이크로 액추이에터를 장착한 슬라이더의 부상특성 연구)

  • 문재택;정구현;전종업;김대은
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.926-929
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    • 2000
  • As the track density of hard disk drives increases, there is a need for more precise actuation of the head. This can be accomplished by using a high band width micro-actuator. In this work, the flying characteristics of sliders with micro-actuators are investigated with the aim to optimize the head/disk interface performance of such sliders. Contact-start-stop, sweep, and flying height tests are performed and analyzed. The results show that the MEMS based micro-actuator mounted on a slider possess acceptable flying characteristics.

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Investigation of Flying Characteristics of Slider with Micro-actuator (마이크로 액추에이터를 장착한 슬라이더의 부상특성 연구)

  • Moon, Jae-Taek;Chung, Koo-Hyun;Kim, Dae-Eun;Jeon, Jong-Up
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.9
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    • pp.96-100
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    • 2001
  • As the track density of hard disk drives increases, there is a need for more precise actuation of the head. This can be accomplished by using a high band width micro-actuator. In this work, the flying characteristics of sliders with micro-actuators are investigated with the aim to optimize the head/disk interface performance of such sliders. Contact-start-stop, sweep, and flying height tests are performed and analyzed. The results show that the MEMS based micro-actuator mounted on a slider possess acceptable flying characteristics.

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Laser Micro Machining in MEMS (레이저를 이용한 미세가공)

  • 윤경구;이성국;김재구;최두선;신보성;황경현
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.08a
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    • pp.48-49
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    • 2000
  • 최근 몇 년 동안 레이저는 품질과 신뢰성의 계속적인 향상으로 인하여 여러 산업 응용분야에서 폭넓게 사용되어 지고 있다. 재료가공에 있어서 레이저의 적용분야는 금속의 절단, 용접 및 드릴링, 세라믹의 스크라이빙, 플라스틱과 복합재료의 절단 및 여러 가지 재료의 마킹, 등을 포함한다. 이러한 가공 메카니즘은 레이저의 조사에 의하여 재료를 용융, 증발시키는 열적 메카니즘이다. 특히 요즘에는 자외선 영역의 조사와 높은 빔의 세기에 의해 다른 종류의 에너지 전달 메카니즘이 가능한 UV 영역의 엑사이머 레이저의 사용이 증가하고 있다.$^{(1)}$ 이러한 엑사이머 레이저가 기존의 다른 레이저에 비해서 갖는 이점은 다음과 같다. 첫째, 모든 금속이 엑사이머 레이저에 대해서는 높은 흡수율을 가지므로 레이저 에너지가 가공 에너지로 효율적으로 변환되기 때문에 얇은 표면층에서 완전히 흡수하게 된다. (중략)

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Effect of Relative Humidity, Disk Acceleration, and Rest Time on Tribocharge Build-up at a Slider-Disk Interface of HDD (HDD에서 상대습도, 디스크 가속도, 정지시간이 슬라이더-디스크 인터페이스의 마찰대전 발생에 미치는 영향)

  • Hwang J.;Lee D.Y.;Lee J.;Choa S.H.
    • Tribology and Lubricants
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    • v.22 no.2
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    • pp.59-65
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    • 2006
  • In hard disk drives as the head to disk spacing continues to decrease to facilitate recording densities, slider disk interactions have become much more severe due to direct contact of head and disk surfaces in both start/stop and flying cases. The slider disk interaction in CSS (contact-start-stop) mode is an important source of particle generation and tribocharge build-up. The tribocharge build-up in the slider disk interface can cause ESD (electrostatic discharge) damage. In turn, ESD can cause severe melting damage to MR or GMR heads. The spindle speed of typical hard disk drives has increased in recent years from 5400 rpm to 15000 rpm and even higher speeds are anticipated in the near future. And the increasing disk velocity leads to increasing disk acceleration and this might affect the tribocharging phenomena of the slider/disk interface. We investigated the tribocurrent/voltage build-up generated in HDD, operating at increasing disk accelerations. In addition, we examined the effects with relative humidity conditions and rest time. We found that the tribocurrent/voltage was generated during pico-slider/disk interaction and its level was about $3\sim16pA$ and $0.1\sim0.3V$, respectively. Tribocurrent/voltage build-up was reduced with increasing disk acceleration. Higher humidity conditions $(75\sim80%)$ produced lower levels tribovoltage/current. Therefore, a higher tribocharge is expected at a lower disk acceleration and lower relative humidity condition. Rest time affected the charge build-up at the slider-disk interface. The degree of tribocharge build-up increased with increasing rest time.