• Title/Summary/Keyword: MEMS/NEMS

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A Study on Tribological Characteristics of Materials for MEMS/NEMS Using Chemically Modified AFM tip (AFM을 이용한 MEMS/NEMS 공정용 재료의 트라이볼로지 특성에 관한 연구)

  • Heo, Jung-Chul;Kim, Kwang-Seop;Kim, Kyung-Woong
    • Tribology and Lubricants
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    • v.24 no.2
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    • pp.63-71
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    • 2008
  • Friction and adhesion tests were conducted to investigate tribological characteristics of materials for MEMS/NEMS using atomic force microscope (AFM). AFM Si tips were chemically modified with a self-assembled monolayer (SAM) derived from trichlorosilane like octadecyltrichlorosilane (OTS) and (1H, 1H, 2H, 2H-perfluorooctyl) trichlorosilane (FOTS), and various materials, such as Si, Al, Au, Cu, Ti and PMMA films, were prepared for the tests. SAMs were coated on Si wafer by dipping method prior to AFM tip to determine a proper dipping time. The proper dipping time was determined from the measurements of contact angle, surface energy and thickness of the SAMs. AFM tips were then coated with SAMs by using the same coating condition. Friction and adhesion forces between the AFM Si tip modified with SAM and MEMS/NEMS materials were measured. These forces were compared to those when AFM tip was uncoated. According to the results, after coating OTS and FOTS, the friction and adhesion forces on all materials used in the tests decreased; however, the effect of SAM on the reduction of friction and adhesion forces could be changed according to counterpart materials. OTS was the most effective to reduce the friction and adhesion forces when counterpart material was Cu film. In case of FOTS, friction and adhesion forces decreased the most effectively on Au films.

An Efficient Key management for Wireless Sensor Network (무선센서 네트워크를 위한 효율적인 키 관리 연구)

  • Park, Sung-Kon
    • Journal of Digital Contents Society
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    • v.13 no.1
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    • pp.129-139
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    • 2012
  • Recently, the smart sensor technologies are rapidly developing in accordance with the technology of implementation in small-size, low-cost, and low power consumption. With these sensor technologies, especially with MEMS and NEMS, the researches on the WSN are actively performing. For the WSN, a network security function is essential even it requires high physical resource level. But the WSN with the smart sensor technologies could not be provided with enough resources for the function because of limited size, computing-power, low-power, and etc. In this paper, we introduce security and key-management protocols of WSN.

An exact solution for mechanical behavior of BFRP Nano-thin films embedded in NEMS

  • Altabey, Wael A.
    • Advances in nano research
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    • v.5 no.4
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    • pp.337-357
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    • 2017
  • Knowledge of thin films mechanical properties is strongly associated to the reliability and the performances of Nano Electro Mechanical Systems (NEMS). In the literature, there are several methods for micro materials characterization. Bulge test is an established nondestructive technique for studying the mechanical properties of thin films. This study improve the performances of NEMS by investigating the mechanical behavior of Nano rectangular thin film (NRTF) made of new material embedded in Nano Electro Mechanical Systems (NEMS) by developing the bulge test technique. The NRTF built from adhesively-bonded layers of basalt fiber reinforced polymer (BFRP) laminate composite materials in Nano size at room temperature and were used for plane-strain bulging. The NRTF is first pre-stressed to ensure that is no initial deflection before applied the loads on NRTF and then clamped between two plates. A differential pressure is applying to a deformation of the laminated composite NRTF. This makes the plane-strain bulge test idea for studying the mechanical behavior of laminated composite NRTF in both the elastic and plastic regimes. An exact solution of governing equations for symmetric cross-ply BFRP laminated composite NRTF was established with taking in-to account the effect of the residual strength from pre-stressed loading. The stress-strain relationship of the BFRP laminated composite NRTF was determined by hydraulic bulging test. The NRTF thickness gradation in different points of hemisphere formed in bulge test was analysed.

1Tb/in$^2$의 정보저장을 위한 MEMS/NEMS 기술

  • 이동원
    • Ceramist
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    • v.7 no.3
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    • pp.15-20
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    • 2004
  • 일반적으로 정보 저장장치라고 하면 컴퓨터의 하드디스크나 음악을 듣기 위해 이용되는 컴팩트디스크(compact disk- read only memory, CD-ROM)를 생각하게 된다. 1956년 미국 캘리포니아주의 산호세에 위치한 IBM의 한 연구소에서 자성체를 이용한 정보저장장치(hard disk, HD) RAMAC 이 처음 개발된 이래 지난 50년간 HD는 매년 60~100%의 저장용량의 능력을 증가시키며 컴퓨터 산업과 더불어 눈부시게 성장해 오고 있다. (중략)

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A MEMS/NEMS sensor for human skin temperature measurement

  • Leng, Hongjie;Lin, Yingzi
    • Smart Structures and Systems
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    • v.8 no.1
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    • pp.53-67
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    • 2011
  • Human state in human-machine systems highly affects the overall system performance, and should be detected and monitored. Physiological cues are essential indicators of human state and useful for the purpose of monitoring. The study presented in this paper was focused on developing a bio-inspired sensing system, i.e., Nano-Skin, to non-intrusively measure physiological cues on human-machine contact surfaces to detect human state. The paper is presented in three parts. The first part is to analyze the relationship between human state and physiological cues, and to introduce the conceptual design of Nano-Skin. Generally, heart rate, skin conductance, skin temperature, operating force, blood alcohol concentration, sweat rate, and electromyography are closely related with human state. They can be measured through human-machine contact surfaces using Nano-Skin. The second part is to discuss the technologies for skin temperature measurement. The third part is to introduce the design and manufacture of the Nano-Skin for skin temperature measurement. Experiments were performed to verify the performance of the Nano-Skin in temperature measurement. Overall, the study concludes that Nano-Skin is a promising product for measuring physiological cues on human-machine contact surfaces to detect human state.

Design and Simulation Study on Three-terminal Graphene-based NEMS Switching Device (그래핀 기반 3단자 NEMS 스위칭 소자 설계 및 동작 시뮬레이션 연구)

  • Kwon, Oh-Kuen;Kang, Jeong Won;Lee, Gyoo-Yeong
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.8 no.6
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    • pp.939-946
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    • 2018
  • In this work, we present simple schematics for a three-terminal graphene-based nanoelectromechanical switch with the vertical electrode, and we investigated their operational dynamics via classical molecular dynamics simulations. The main structure is both the vertical pin electrode grown in the center of the square hole and the graphene covering on the hole. The potential difference between the bottom gate of the hole and the graphene of the top cover is applied to deflect the graphene. By performing classical molecular dynamic simulations, we investigate the nanoelectromechanical properties of a three-terminal graphene-based nanoelectromechanical switch with vertical pin electrode, which can be switched by the externally applied force. The elastostatic energy of the deflected graphene is also very important factor to analyze the three-terminal graphene-based nanoelectromechanical switch. This simulation work explicitly demonstrated that such devices are applicable to nanoscale sensors and quantum computing, as well as ultra-fast-response switching devices.