• Journal of the Korean institute of surface engineering
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• v.50 no.3
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• pp.192-197
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• 2017

A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper target and graphite target were fabricated using MDX-1.5K from Advanced Energy Industries, Inc as a DC power supply. Ion current density of copper target and graphite target was measured by unbalanced magnetron sputtering. The basic pressure condition was $6.3{\times}10^{-7}mbar$ and the process pressure was Ar 50 sccm at $1.0{\times}10^{-2}mbar$ (7.5 mTorr) in the Ar atmosphere. Therefore, the relative density of copper ions reaching the substrate with the measured ion current density was derived.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.70-70
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• 2017

TSV(through silicon via)는 긴 종횡비를 갖는 패턴에 Cu, Ta, Ti을 높은 conformality를 갖도록 증착하는 공정이다. Magnetron cathode의 자석 배열 설계는 target 물질 종류에 따라서 multitrack, water drop type등이 있으며 target과 substrate 사이의 공간에 플라즈마를 형성시켜서 기판에 이온 입사량을 늘린 후 기판 바이어스를 이용하여 이온 충돌, re-sputtering을 통한 재증착 과정을 통해 치밀한 금속 박막을 연속적으로 형성할 수 있도록 하는 것이 목적이다. 또한 sputter가 사용되고 있는 분야에 효율을 증대시키고, 증착되는 막의 품질향상을 위해 UBMS를 사용하고 있으며, 산업에 사용되어 지는 300 mm wafer용 시스템은 제작비가 약 10억 원 정도 소요되며 다양한 테스트를 진행하기 위해선 많은 비용이 소요된다. 따라서 비용과 소요시간을 줄여 다양한 테스트를 위해 소규모 플라즈마 시스템을 설계하게 되었다. 61 l/sec 터보 분자 펌프와 다이아프램 펌프를 기초로한 TMP station에 2.75 인치 CF flange가 장착된 6 way cross를 main 챔버로 활용하고, 작은 size의 unbalanced magnetron cathode를 제작, 장착한 다음 6 way cross 주변에 전자석을 적절히 배치하여 300 mm wafer system에서와 동일한 물리적 현상을 테스트 할 수 있도록 하였다. Fig1. (a) UBMS system의 사진을 나타내었고, (b)에는 6 way cross 내부에 발생된 플라즈마의 형상을 나타내었다. 전원 장치는 Advanced Energy사의 MDX-1.5K DC power supply를 사용하였고, 방전 전압 - 전류 관계의 가스 압력에 따른 plasma 현상과 magnetron 배율에 따른 plasma 현상 그리고 전자석에 의한 영향을 주로 관찰 하였다.

• The Journal of Korean Academy of Prosthodontics
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• v.37 no.3
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• pp.343-357
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• 1999

The color change of maxillofacial silicone has been attributed to certain environmental factors such as exposure to the UV component of natural sunlight, wetting and drying of the elastomer and surface abrasion resulting from the application and removal of cosmetics. The purpose of this study was to evaluate the color change of maxillofacial silicone (Silastic MDX4-4210) according to type of pigment (cadmium yellow, titanium white, cosmetic red), and UV absorber application method after 200, 400, and 600 hours of 350nm UV light irradiation. The results were as follows. 1. According to type of pigments, after 200 hours cosmetic red showed significantly larger color change than cadmium yellow and titanium white, and after 400 and 600 hours color change significantly decreased in the order of cosmetic red, cadmium yellow, and titanium white (p<0.05). 2. In the cadmium yellow group, after 200 hours, the non-treatment group showed significantly larger color change, but after 400 and 600 hours, color change significantly decreased in the order of non-treatment, surface application and mixed group (p<0.05). 3. In the titanium white group, there was no significant color change difference between the three groups after 200 and 400 hours, but after 600 hours, the mixed group showed significantly smalt or color change than the non-treatment and surface application groups (p<0.05). 4. In the cosmetic red group, there was significant decrease in color change in the order of non-treatment, surface application and mixed group (p<0.05). From the results above, the effect of UV light absorber differed according to the type of pigment, but mixing UV light absorber with maxillofacial silicone is thought to give superior resistance against UV light irradiation in the long run.

• The Journal of Korean Academy of Prosthodontics
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• v.34 no.4
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• pp.833-849
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• 1996

The material of choice for functional and esthetic reconstruction of maxillofacial defects is silicone. Silicone has appropriate physical properties for maxillofacial prosthesis but it has weak edge strength. Therefore, a proper combination of silicone and polyurethane sheet is recommended to improve this weakness. Various primers are also used to enhance the adhesive strength between silicone and polyurethane sheet. The purpose of this study was to determine the adhesive strength of silicone and polyurethane sheet. Silicone elastomer mixture was made by admixing MDX4-4210 elastomer (40%) and Silastic Medical Adhesive Type A(60%). This silicone elastomer mixture was attached to polyurethane sheet, using one of three different primers(1205, S-2260, or A-304), treated for 1, 2, 4, 6, and 8 hours. These were then polymerized in room temperature, dry-heat oven or microwave oven. Six specimens per each group, a total of 270 specimens were prepared for final test. The differences of T-peel bonding strengths were then determined by a test. The differences of T-peel bonding strengths were then determined by a test method that was recommended by American Society for Testing and Materials C794-80. The results were statistically analyzed using the ANOVA and Mutiple Range Tests(Tukey' HSD). The reults were as follow. 1. Type of primer, primer reaction time, and methods of polymerization showed significant correlation on the T-peel bonding strengths in adhesiveness between silicone and polyurethane sheet. 2. A-304 primer showed statistically higher in T-peel bonding strength than otehr type of primers except for the polymerization in microwave oven with reaction times of 2, 6 hours(p<0.05). 3. No significant differences in T-peel bonding strength were observed among the polymerization methods. 4. The effect of reaction time by the primer type and polymerization method showed statistically significant differences in bonding strength among different reaction times. And in most cases, reaction time of 1 or 2 hours showed higher T-peel bonding strength.

• Journal of Acupuncture Research
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• v.18 no.6
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• pp.105-113
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• 2001

Objective : This study was performed to evaluate the effect of acupuncture on cerebral blood flow by Transcranial Doppler Ultrasonography(TCD) Method : Monitoring of TCD was examined in 11 healthy women volunteer(mean $age:\;24.5{\pm}2.9\;\;years$) before, during and after acupuncture on Paekoe(GV20). Mean velocity, pulsatility index, systolic velocity and diastolic velocity values are analyzed from DWL. MDX4 at different depths of both middle cerebral artery. Results : The results showed a significant(p<0.05; Friedman test & Wilcoxon signed ranks test) increase in mean velocity, systolic velocity and diastolic velocity decrease in pulsatility index, which was measured at different depths of both middle cerebral artery. Conclusion : These results suggest that acupuncture could have a specific effect on cerebral blood flow.

• Journal of Korean Society of Forest Science
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• v.56 no.1
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• pp.77-81
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• 1982

The property of four tropical hardwoods were analyzed. xylans, extracted with 24% of potassium hydroxide and purified according to ethanol titration procedure, were examined for Pn, the uronic acid, methoxyl groups and acetyl groups content. Only mangrove, whose xylan content is similar to that of hardwoods in the temperature zone, had the ratio of units of xylose residue to the units of uronic acid residue as high as that of hardwoods in the temperature zone. Content of methoxyl groups showed the same result as uronic acid residue content. Various hemicellulose including D-xylose residue were contained in xylans extracted by D M S O. Acetyl groups content was compressed of 5.4% of M D X and 6.8% of R D X. Xylans unextracted by D M S O had acetyl groups. Pn measured by the viscosity method was about 200 and similar to the hardwood xylans of temperature zone. DPn calculated by uronic acid residue was similar to that of tropical zone.