• Journal of the Semiconductor & Display Technology
• /
• v.7 no.3
• /
• pp.11-16
• /
• 2008

The authors investigated an overhead shuttle (OHS) system for automatic transferring the liquid crystal display (LCD) panels. The constructed tracks of OHS system include the linear and curve regions and have been installed on the ceiling to transfer the cassette of LCD glass along the closed-loop and open-loop tracks. In this study, the OHS system was implemented by a proposed linear motor to solve encoder installation and the system cost problems of the long distance transfer system. In addition, we utilized a new algorithm of the position detection and a new control algorithm for driving linear motor. The newly developed control algorithm was demonstrated from both a computer simulation and an experimentation, indicating that the highly reliable and speedy transfer system can enhance the LCD panel productivity of commercial OHS system.

• The KIPS Transactions:PartD
• /
• v.11D no.2
• /
• pp.461-470
• /
• 2004

As the semiconductor industrials change 200㎜-sized semiconductor wafer production process to 300㎜-sized one, it requires to develop the software for monitoring and simulating the robot which transfers a 300㎜-sized semiconductor wafer. Because such a software don't run at standalone but communicate MCS(Material Control System) and Its subsystem a robot, its architecture is very complex. Therefore, in order to develop such a software systematically, we must utilize an object-oriented development methodology. UML. This paper presents an UML process application developing the software for monitoring and simulating the robot which transfers a semiconductor wafer on the production process.