• Transactions on Electrical and Electronic Materials
• /
• v.4 no.3
• /
• pp.1-4
• /
• 2003

The etching of Au thin films has been performed in an inductively coupled $CF_4 / Cl_2 / Ar$ plasma. The etch properties including etch rate and selectivity were examined as $CF_4$ content adds from o to $30\%$ to $Cl_2/Ar$ plasma. The $Cl_2/(Cl_2 + Ar)$ gas mixing ratio was fixed at $20\%$. Other parameters were fixed at an rf power of 700 W, a dc bias voltage of -150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a $10\%$ additive $CF_4$ into $Cl_2/Ar$ gas mixture. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. The XPS analysis shows that the intensities of Ail peaks are changed, indicating that there is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point. However, etching products can be sputtered by Ar ion bombardment.

• Particle and aerosol research
• /
• v.11 no.4
• /
• pp.107-113
• /
• 2015

SBA-16 (Santa Barbara Amorphous) was synthesized over supported $TiCl_4/MgCl_2$. Due to its high surface area and excellent morphological performance, it was expected to form the bi-supported catalytic system and be used for ethylene polymerization. Polymerization of ethylene was carried out at atmospheric pressure using hexane as solvent and triethylaluminium as cocatalyst. ICP, FTIR, DSC, TG-DTA were used to characterize polyethylene and catalyst product. Optimum conditions for ethylene polymerization were found to be 100 mL hexane, Al/Ti molar ratio of 160 and 1 h polymerization at $60^{\circ}C$. The activity of 396.76 kg PE/mol Ti.h.atm was achieved. Melting point of the obtained polymer was in the range of $132-135^{\circ}C$ and the highest degree of crystallization was 46%.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.15 no.11
• /
• pp.933-938
• /
• 2002

(Ba,Sr)TiO$_{4}$ (BST) thin films on Pt/Ti/SiO$_{2}$/Si substrates were deposited by a sol-gel method and the etch characteristics of BST thin films have been investigated as a function of gas mixing ratio. The maximum etch rate of the BST films was 440 $AA$/min under such conditions as: CF$_{4}$(CF$_{4}$＋Ar) of 0.2, RF-power of 700 W, DC-bias voltage of -200 V, pressure of 15 mTorr and substrate temperature of 30 $^{circ}C$. The selectivities of BST to Pt, SiO$_{2}$ and PR were 0.38, 0.25 and 0.09, respectively. In the XPS (X-ray photoelectron spectroscopy) analysis, Barium (Ba) and Strontium (Sr) component in BST thin films formed low volatile compounds such as BaFx, SrFx, which are forms by the chemical reaction with F atoms and is removed by Ar ion bombardment. Titanium (Ti) is removed by chemical reaction such as TiF with ease. The result of secondary ion mass spectrometry (SIMS) analysis confirmed the existence of the BaFx, SrFK, TiFx.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.11a
• /
• pp.611-615
• /
• 2004

In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. Above all, Electrodeless fluorescent lamp is the removal of internal electrodes and heating filaments that are a light-limiting factor of conventional fluorescent lamps. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. Therefore, the electrodeless fluorescent lamps is substantially higher than that of conventional fluorescent lamps and last up to 60,000 hours. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an argon discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07b
• /
• pp.1123-1126
• /
• 2003

In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56MHz was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar- I line, luminance were investigated. At this time the input parameter for ICP RF plama, Ar gas pressure and RF power were applied in the range of $10{\sim}60m$ Torr, $10{\sim}300W$ respectively.

• Laser Solutions
• /
• v.17 no.4
• /
• pp.7-13
• /
• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• Journal of the Korean Ceramic Society
• /
• v.37 no.2
• /
• pp.164-167
• /
• 2000

Flue gases in the iron foundry consist of 15~20% CO2 as an air pollution gas whose emission should be mitigated in order to protect the environment. In the present study, ultrafine powders of NixZn1-xFe2O4 as a potential catalyst for the CO2 decomposition were prepared by the coprecipitation methods. Oxygen deficient ferrites (MeFe2O4-$\delta$) can decompose CO2 as C and O2 at a low temperature of about 30$0^{\circ}C$. The XRD result of synthesized ferrites showed the spinel structure of ferrites and ICP-AES and EDS quantitative analyses showed the composition similar with initial molar ratios of the mixed solution prior to reaction. The BET surface area of the (Ni, Zn)-ferrites was about 77~89.5$m^2$/g and their particle size was observed about 10~20 nm. The CO2 decomposition efficiency of the oxygen deficient (Nix, Zn1-x)-ferrites was the highest at x=0.3, and the ternary (Ni, Zn)-ferrites was better than that of binary Ni-ferrites.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.22 no.12
• /
• pp.1691-1701
• /
• 1998

Fly ash produced in coal combustion is a fine-grained material consisting mostly of spherical, glassy, and porous particles. A study on the formation mechanism of the fly ash from coal particles in the pulverized coal power plant is investigated with a physical, morphological, and chemical characteristic analysis of fly ash collected from the Samchonpo power plant. This study may contribute to the data base of domestic fly ash, the improvement of combustion efficiency, fouling phenomena and ash collection in the electrostatic precipitator. The physical property of fly ash is determined using a particle counter for the measurement of ash size distribution. Morphological characteristic of fly ash is performed using a scanning electron micrograph. The chemical components of fly ash are determined using an inductively coupled plasma emission spectrometry(ICP). The distribution of fly ash size was bi-modal and ranged from 12 to $19{\mu}m$ in mass median diameter. Exposure conditions of flue gas temperature and duration within the combustion zone of the boiler played an important role on the morphological properties of the fly ash such as shape, particle size and chemical components. The evolution of ash formation during pulverized coal combustion has revealed three major mechanisms by large particle formation due to break-up process, gas to particle conversion and growth by coagulation and agglomeration.

• The Korea Journal of Herbology
• /
• v.20 no.2
• /
• pp.17-26
• /
• 2005

Objectives : The study has been undertaken to scrutinize the results of Halloysitum Rubrum before and after physical and chemical manipulation. Methods : I used X-rays diffracted analysis system(Phillips X'Pert - MPD System) on condition of 40Kv, Anode of Cu Ka to grasp the compositions of crude Halloysitum Rubrums which have been from here and there after pulverization them below 200 mesh. X-rays fluorescence analysis system have been used to check the chief elements content of the ore on condition of 40Kv, 95mA. ICP-MS analysis system(Perkin Elmer, Elan 6100)have been used after a micro-elements and a heavy metals take advantage of mixed acid were dissolved completely. Results : The compositions of the ore Halloysitum Rubrum are composed of large amount of Halloysite and Kaolinite, and small amount of Hematite, Alum, quartzite. The chief elements content of the ore Halloysitum Rubrum are composed of Al and Si. A heavy metals in Halloysitum Rubrum are As, Cd, Cr, Cu, Pb, Zn, etc. As and Zn's amounts was lessen after physical and chemical manipulation Halloysitum Rubrum are decreased at $400^{\circ}C\;and\;450-500^{\circ}C$ each by heat analysis system. Conclusion : Results of this study show that Halloysitum Rubrum can be used in a diverse ways to treat many kinds of disease.

• 한국신재생에너지학회:학술대회논문집
• /
• 2011.11a
• /
• pp.172.1-172.1
• /
• 2011

본 연구에서는 매립지에서 발생하는 주요한 가스인 $CO_2$(47~55%)와 $CH_4$(47~55%)가스를 분리하기 위하여 여러 $CO_2$ capture 방법 중 Zeolite를 사용한 흡착법을 이용하였다. 국내에서 시판되고 있는 powder형 Zeolite 13X에 Inorganic binder와 organic binder를 최적의 비율로 혼합한 후 증류수를 이용하여 Pellet type 흡착제를 제조하였다. 또한 최종적으로 $CO_2$의 흡착능을 높이기 위하여 양이온(1M의 KCl, NaCl, $CaCl_2$, $LiCl_2$)으로 이온교환을 하였다. 매립지 모사가스($CO_2$:40%, $CH_4$:60%)를 이용하여 실시간 분석기(Delta1600S)를 이용 두 가스의 분리와 $CO_2$ 흡착성능(mg-CO2/g-흡착제)을 확인하였다. 개발된 흡착제(AjouEpl 13X)는 ICP, XRD, XRF, BET 분석으로 제올라이트의 구조와 성분을 분석하였다.