• Title/Summary/Keyword: Low-Hydrogen

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W Chemical Mechanical Polishing (CMP) Characteristics by oxidizer addition (산화제 첨가에 따른 W-CMP 특성)

  • Park, Chang-Jun;Seo, Yong-Jin;Lee, Kyoung-Jin;Jeong, So-Young;Kim, Chul-Bok;Kim, Sang-Yong;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.46-49
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    • 2003
  • Chemical mechanical polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of $Al_3O_3$ particles in presence of surfactant stabilizing the slurry.

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The study of the Composition and Physico-chemcal Characteristics of MSW in urban and gangwon area (수도권 및 강원지역 도시고형폐기물의 조성과 물리·화학적 특성연구)

  • Lee, Keon-Joo
    • Journal of the Korea Organic Resources Recycling Association
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    • v.16 no.3
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    • pp.65-74
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    • 2008
  • In this study, the composition and physico-chemical characteristics of municipal solid waste (MWS) which was treated in four different area were investigated. It is necessary to measure the characteristics of MSW to build a waste treatment and Refuse Derived Fuel (RDF) facility, the data-base and total managing of the landfill. It was found that the average density of solid wastes is in the range of $78.15-199.8kg/m^3$. This MSW was composed of 8.87% of food wastes, 38.8% of papers, 34.12% of plastics & vinyls, 7.16% of textiles, 0.96% of wood, 1.3% of rubber & leathers and others, respectively. Most of MSW are composed of food, paper and plastic waste and more than 94% was combustible waste. For three components, moisture is 17.38%, combustible component is 69.03% and ash is 6.24%. The chemical element has the high order of carbon, oxygen, hydrogen on the dry basis of wastes. And the low heating value of the MSW which is measured by calorimeter is calculated as 2973.8 kcal/kg and high heating value of the MSW is calculated as 5209.94 kcal/kg.

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The Study of Donor-Acceptor Chromophores and Diketopyrrolopyrrole(DPP) Analogues (Donor-Acceptor 발색단과 디케토피롤로피롤(DPP) 유도체에 관한 연구)

  • Kim, HunSoo;Kim, SeungHoi;Park, SooYoul
    • Tribology and Lubricants
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    • v.32 no.5
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    • pp.141-146
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    • 2016
  • The diketopyrrolopyrrole (DPP) pigment is a bicyclic 8-π-electron system containing two lactam units. Typical DPP derivative pigments have melting points of over 350°C and very low solubility in most solvents, and show absorption in the visible region with a molar extinction coefficient of 33,000 dm2mol−1 and strong photoluminescence with maxima in the range 500–600 nm. X-ray structure analyses of DPP show that the whole molecule is almost in one plane. The phenyl rings are twisted out of the heterocyclic plane and the intermolecular hydrogen bonding between neighboring lactam NH and carbonyl units influences the structure of the DPP pigment in the solid state. In this study, mono-N-alkylation and mono-N-arylation were undertaken for Pigment Red 264 or Pigment Orange 73 with alkyl halide and aryl halide, respectively, in the presence of sodium tert-butoxide as a base catalyst to improve the solubility of DPP pigments and their application as CO2 indicators. The synthetic yield was in the range 11–88%. The indicator dyes are highly soluble in organic solvents and shows pH-dependent absorption (λmax 501 and 572 nm for the protonated and deprotonated forms, respectively) and emission (λmax 524 and 605 nm for the protonated and deprotonated forms, respectively) spectra. The mono-N-alkylated and mono-N-arylated DPP pigment was identified by 1H-NMR (1H-Nuclear Magnetic Resonance Spectrometer), FT-IR (Fourier Transform Infrared Spectroscopy), and MS (Mass Spectrometry). According to the results of color and hue properties obtained by a color matching analyzer, the synthesized DPP pigment material can be used as a CO2 indicator.

Mitochondrial activity in illuminated leaves of chlorophyll-deficient mutant rice (OsCHLH) seedlings

  • Goh, Chang-Hyo;Satoh, Kouji;Kikuchi, Shoshi;Kim, Seong-Cheol;Ko, Suk-Min;Kang, Hong-Gyu;Jeon, Jong-Seong;Kim, Cheol-Soo;Park, Youn-Il
    • Plant Biotechnology Reports
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    • v.4 no.4
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    • pp.281-291
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    • 2010
  • The rice CHLH gene encodes the $Mg^{2+}$-chelatase H subunit, which is involved in chlorophyll biosynthesis. Growth of the chlorophyll-deficient oschlh mutant is supported by mitochondrial activity. In this study, we investigated the activity of mitochondrial respiration in the illuminated leaves during oschlh seedling development. Growth of mutant plants was enhanced in the presence of 3% sucrose, which may be used by mitochondria to meet cellular energy requirements. ATP content in these mutants was, however, significantly lowered in light conditions. Low cytosolic levels of NADH in illuminated oschlh mutant leaves further indicated the inhibition of mitochondrial metabolism. This down-regulation was particularly evident for oxidative stressresponsive genes in the mutant under light conditions. Hydrogen peroxide levels were higher in oschlh mutant leaves than in wild-type leaves; this increase was largely caused by the impairment of the expression of the antioxidant genes, such as OsAPXl, OsRACl, and OsAOXc in knockout plants. Moreover, treatment of mesophyll protoplasts with ascorbic acid or catalase recovered ATP content in the mutants. Taken together, these results suggest that the light-mediated inhibition of mitochondrial activity leads to stunted growth of CHLH rice seedlings.

Factors Relating to Induced Systemic Resistance in Watermelon by Plant Growth-Promoting Pseudomonas spp.

  • Lee, Yong-Hoon;Lee, Wang-Hyu;Lee, Du-Ku;Shim, Hyeong-Kwon
    • The Plant Pathology Journal
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    • v.17 no.3
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    • pp.174-179
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    • 2001
  • The plant growth-promoting Pseudomonas strains, WR8-3 (Pseudomonas fluorescens), WR9-11 (Pseudomonas sp.) and WR9-16 (P.putida), which induced resistance systematically in watermelon to gummy stem rot were investigated on their induced systemic resistance(ISR)-related characteristics. The pyoverdine production was repressed in the standard succinate medium by increasing the concentration of $\textrm{FeCL}_3$. But the iron-binding ability on chrome azurol S agar media (CAS) was observed only in the strains, WR8-3 and WR9-16. When the two strains were mutated, the resulting iron-binding siderophore-negative mutants, WR8-3m and WR 9-16m, failed to promote the growth of watermelon and to induce resistance. The strains, WR8-3 and WR 9-16, slightly inhibited the growth of Didymella bryoniae at a low concentration of $\textrm{FeCL}_3$ on Kong's medium B, but not to exert control dffect. The strain WR9-11 showed antagonism in the concentration of $\textrm{FeCL}_3$ from 0 to $1,000\mu\textrm{M}$. When the crude lipoplysaccharide of each strain was treated in the rhizosphere of watermelon, mean lesion area was similar to that of the untreated control. The strains, WR9-11 and WR9-16 produced some level of hydrogen cyanide (HCN). Salicylic acid production was not detected in all of the strains.

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Operation Characteristics of Pilot-scale Acid Gas Removal Process (Pilot 규모 산성가스 제거공정 운전 특성)

  • Lee, Seung-Jong;Yoo, Sang-Oh;Chung, Seok-Woo;Yun, Yong-Seung
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.533-536
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    • 2009
  • The gasification technology is a very flexible and versatile technology to produce a wide variety products such as electricity, steam, hydrogen, Fisher-Tropsch(FT) diesels, Dimethyl Ether(DME), methanol and SNG(Synthetic Natural Gas) with near-zero pollutant emissions. Gasification converts coal and other low-grade feedstocks such as biomass, wastes, residual oil, petroleum coke, etc. to a very clean and usable syngas. Syngas is produced from gasifier including CO, $H_2$, $CO_2$, $N_2$, particulates and smaller quantities of $CH_4$, $NH_3$, $H_2S$, COS and etc. After removing pollutants, syngas can be variously used in energy and environment fields. The pilot-scale coal gasification system has been operated since 1994 at Ajou University in Suwon, Korea. The pilot-scale gasification facility consists of the coal gasifier, the hot gas filtering system, and the acid gas removal (AGR) system. The acid gas such as $H_2S$ and COS is removed in the AGR system before generating electricity by gas engine and producing chemicals like Di-methyl Ether(DME) in the catalytic reactor. The designed operation temperature and pressure of the $H_2S$ removal system are below $50^{\circ}C$ and 8 kg/$cm^2$. The iron chelate solution is used as an absorbent. $H_2S$ is removed below 0.1 ppm in the H2S removal system.

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Thermo-Degradation Kinetics of Polyethylene (폴리에틸렌의 열분해 Kinetics)

  • Cha, Wang Seog
    • Applied Chemistry for Engineering
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    • v.10 no.3
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    • pp.432-437
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    • 1999
  • Pyrolysis of polyethylene was carried out in the stainless steel reactor of internal volume of $10cm^3$. Pyrolysis reactions were performed at temperature $390{\sim}450^{\circ}C$ and the pyrolysis products were collected separately as reaction products and gas products. The molecular weight distributions(MWDs) of each product were determined by HPLC-GPC and GC analysis. Distribution balance equation for MWDs of random and specific products were proposed to account for initiation-termination and propagation-depropagation, such as hydrogen abstraction, chain cleavage, coupling of polymer and radical. A separate chain-end scission process produces low molecular weight noncondensable gases(C1 through C5) of average molecular weight 38. Activation energies of the random-chain scission and chain-end scission rate parameters, respectively, were determined to be 35, 17 kcal/mole.

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Influence of Manufacturing Conditions for the Life Time of the Boron-Doped Diamond Electrode in Wastewater Treatment (폐수처리용 붕소 도핑 다이아몬드 전극의 수명에 미치는 제조공정 변수의 영향)

  • Choi, Yong-Sun;Lee, Young-Ki;Kim, Jung-Yuel;Kim, Kyeong-Min;Lee, You-Kee
    • Korean Journal of Materials Research
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    • v.27 no.3
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    • pp.137-143
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    • 2017
  • Boron-doped diamond (BDD) electrode has an extremely wide potential window in aqueous and non-aqueous electrolytes, very low and stable background current and high resistance to surface fouling due to weak adsorption. These features endow the BDD electrode with potentially wide electrochemical applications, in such areas as wastewater treatment, electrosynthesis and electrochemical sensors. In this study, the characteristics of the BDD electrode were examined by scanning electron microscopy (SEM) and evaluated by accelerated life test. The effects of manufacturing conditions on the BDD electrode were determined and remedies for negative effects were noted in order to improve the electrode lifetime in wastewater treatment. The lifetime of the BDD electrode was influenced by manufacturing conditions, such as surface roughness, seeding method and rate of introduction of gases into the reaction chamber. The results of this study showed that BDD electrodes manufactured using sanding media of different sizes resulted in the most effective electrode lifetime when the particle size of alumina used was from $75{\sim}106{\mu}m$ (#150). Ultrasonic treatment was found to be more effective than polishing treatment in the test of seeding processes. In addition to this, BDD electrodes manufactured by introducing gases at different rates resulted in the most effective electrode lifetime when the introduced gas had a composition of hydrogen gas 94.5 vol.% carbon source gas 1.6 vol.% and boron source gas 3.9 vol.%.

Low Temperature Optical Properties of NiO coated ZnO Nanorods (NiO 코팅 두께에 따른 ZnO 나노막대의 저온분광특성)

  • Shin, Y.H.;Park, Y.H.;Kim, Yong-Min
    • Journal of the Korean Vacuum Society
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    • v.16 no.4
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    • pp.286-290
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    • 2007
  • We fabricated NiO coated ZnO nanorods using ZnO nanorods grown on a Si substrate. After thermal hydrogenation process of these NiO-ZnO core-shell nanorods, we confirm that Ni nanodots were built up on the surface of ZnO nanorods. Photoluminescence (PL) measurements at T=5 K were made to understand the optical properties of these various nanorods. As samples sequencially transformed into $ZnO{\rightarrow}NiO-ZnO{\rightarrow}Ni$ nanodot-ZnO, PL transition energies and intensities are varied as well. In comparison to pure ZnO nanorod, the acceptor bound exciton ($A^0X$) became the minor peak for NiO-ZnO nanorods. On the other hand, for Ni nanodot-ZnO sample, ($A^0X$) transition peak intensity became the most dominant peak. This is due to the fact that during thermal hydrogenation process, appreciable amounts of Ni and hydrogen ions defused into ZnO nanorod which played as accepters.

Effect of deposition parameters on structure of ZnO films deposited by an DC Arc Plasmatron

  • Penkov, Oleksiy V.;Chun, Se-Min;Kang, In-Jae;Lee, Heon-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.255-255
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    • 2011
  • Zinc oxide based thin films have been extensively studied in recent several years because they have very interesting properties and zinc oxide is non-poisonous, abundant and cheap material. ZnO films are employed in different applications like transparent conductive layers in solar cells, protective coatings and so on. Wide industrial application of the ZnO films requires of development of cheap, effective and scalable technology. Typically used technologies don't completely satisfy the industrial requirements. In the present work, we studied effect of the deposition parameters on the structure and properties of ZnO films deposited by DC arc plasmatron. The varied parameters were gas flow rates, precursor composition, substrate temperature and post-deposition annealing temperature. Vapor of Zinc acetylacetone was used as source materials, oxygen was used as working gas and argon was used as the cathode protective gas and a transport gas for the vapor. The plasmatron power was varied in the range of 700-1500 watts. Flow rate of the gases and substrate temperature rate were varied in the wide range to optimize the properties of the deposited coatings. After deposition films were annealed in the hydrogen atmosphere in the wide range of temperatures. Structure of coatings was investigated using XRD and SEM. Chemical composition was analyzed using x-ray photoelectron spectroscopy. Sheet conductivity was measured by 4-point probe method. Optical properties of the transparent ZnO-based coatings were studied by the spectroscopy. It was shown that deposition by a DC Arc plasmatron can be used for low-cost production of zinc oxide films with good optical and electrical properties. Increasing of the oxygen content in the gas mixture during deposition allow to obtain high-resistive protective and insulation coatings with high adhesion to the metallic surface.

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