• Journal of the Semiconductor & Display Technology
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• v.7 no.4
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• pp.35-39
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• 2008

We studied deposition of low-k SiOCH dielectric film by PECVD. DEMS(diethoxymethlysilane) precursor, which has two ethoxy groups along with one methyl group attached to the silicon atoms, was used as precursor. The SiOCH film was deposited as a function of oxygen flow rates ranging from 0 to 100sccm. The deposition rate($\AA$/min) of SiOCH film was increased due to the increase of oxygen radical as a function of $O_2$ flow rates. The dielectric constant was decreased from 3.0 to 2.77, as the film was annealed at $450^{\circ}C$ for 30 min. So, it could account that the dielectric constant changes sensitively with $O_2$ flow rates. Also, the leakage current of the annealed film exhibited stable curve than that of asdeposited. These results were caused by the increase of Si-O-Si group and decrease of Si-CH group and OH group within the film by annealing.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.70-75
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• 2016

GZO films prepared on ITO glasses were annealed at various temperatures in a vacuum condition to research the relationship between oxygen vacancies and optical properties. GZO films after annealing in a vacuum showed the various optical-chemical properties depending on the annealing temperatures and oxygen gas flow rate during the deposition. The oxygen vacancy of GZO film prepared by oxygen gas flows of 22 sccm increased with increasing the annealing temperatures, because of the extraction of oxygen by the annealing. But the intensity of photoluminance of GZO with 22 sccm decreased in accordance with the annealing temperature, because of the reduction of ionized charge carriers. The oxygen vacancy by the extraction of oxygen enhanced a depletion, so the widen depletion had the strong Schottky barrier and the PL intensity due to the low carrier density decreased.

• Journal of Environmental Science International
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• v.20 no.7
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• pp.907-917
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• 2011

This study investigated the application of experimental design methodology to optimization of conditions of air-plasma and oxygen-plasma oxidation of N, N-Dimethyl-4-nitrosoaniline (RNO). The reactions of RNO degradation were described as a function of the parameters of voltage ($X_1$), gas flow rate ($X_2$) and initial RNO concentration ($X_3$) and modeled by the use of the central composite design. In pre-test, RNO degradation of the oxygen-plasma was higher than that of the air-plasma though low voltage and gas flow rate. The application of response surface methodology (RSM) yielded the following regression equation, which is an empirical relationship between the RNO removal efficiency and test variables in a coded unit: RNO removal efficiency (%) = $86.06\;+\;5.00X_1\;+\;14.19X_2\;-\;8.08X_3\;+\;3.63X_1X_2\;-\;7.66X_2^2$ (air-plasma); RNO removal efficiency (%) = $88.06\;+\;4.18X_1\;+\;2.25X_2\;-\;4.91X_3\;+\;2.35X_1X_3\;+\;2.66X_1^2\;+\;1.72X_3^2$ (oxygen-plasma). In analysis of the main effect, air flow rate and initial RNO concentration were most important factor on RNO degradation in air-plasma and oxygen-plasma, respectively. Optimized conditions under specified range were obtained for the highest desirability at voltage 152.37 V, 135.49 V voltage and 5.79 L/min, 2.82 L/min gas flow rate and 25.65 mg/L, 34.94 mg/L initial RNO concentration for air-plasma and oxygen-plasma, respectively.

• Journal of the Korean Society of Combustion
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• v.12 no.4
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• pp.14-21
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• 2007

In order to enhance combustion efficiency, oxygen-enriched combustion is used by increasing the oxygen ratio in the oxidizer. However, since the flame temperature increases, NOx formation in the furnace seriously increases for low oxygen enrichment ratio. In this case, reburning is a useful technology for reducing nitric oxide. In this research, experimental studies have been conducted to evaluate the hybrid effects of reburning/selective non-catalytic reaction (SNCR) and reburning/air staging on NOx formation and also to examine heat transfer characteristics in various oxygen-enriched LPG flames. Experiments were performed in flames stabilized by a co-flow swirl burner, which were mounted at the bottom of the furnace. Tests were conducted using LPG gas as main fuel and also as reburn fuel. The paper reported data on flue gas emissions, temperature distribution in furnace and various heat fluxes at the wall for a wide range of experimental conditions. Overall temperature in the furnace, heat fluxes to the wall and NOx generation were observed to increase by low level oxygen-enriched combustion, but due to its hybrid effects of reburning, SNCR and Air staging, NOx concentration in the exhaust have decreased considerably.

• Corrosion Science and Technology
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• v.12 no.2
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• pp.85-92
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• 2013

This work is concerned with an evaluation of dynamic boric acid corrosion (BAC) of low alloy steel for reactor pressure vessel of a pressurized water reactor (PWR). Mockup test method was newly established to investigate dynamic BAC of the low alloy steel under various conditions simulating a primary water leakage incident. The average corrosion rate was measured from the weight loss of the low alloy steel specimen, and the maximum corrosion rate was obtained by the surface profilometry after the mockup test. The corrosion rates increased with the rise of the leakage rate of the primary water containing boric acid, and the presence of oxygen dissolved in the primary water also accelerated the corrosion. From the specimen surface analysis, it was found that typical flow-accelerated corrosion and jet-impingement occurred under two-phase fluid of water droplet and steam environment. The maximum corrosion rate was determined as 5.97 mm/year at the leakage rate of 20 cc/min of the primary water with a saturated content of oxygen within the range of experimental condition of this work.

• Journal of Advanced Marine Engineering and Technology
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• v.36 no.6
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• pp.774-779
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• 2012

MILD (Moderate and Intense Low Oxygen Dilution) combustion is a technology that uses the recirculation of combustion gas to increase thermal efficiency not only by keeping down the concentration of Nitric Oxides and temperature but also by uniformizing the internal temperature of the combustion furnace. This study is a trial to obtain MILD combustion characteristics by adjusting the equivalence ratio with the air flow rate in the conical combustor while keeping the fuel flow rate and measuring the exhaust gas of the combustion furnace.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.12
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• pp.1690-1700
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• 1997

Entrained coal gasification tests with Datong coal were performed to assess the influence of oxygen/coal ration and pressure. When gasification condition in oxygen/coal ratio has changed from 0.5 to 1.0, optimal gasification condition from low pressure runs was oxygen/coal ratio of approximately 0.9 where CO was produced about 40% and H, about 20%. Under the pressure condition of 12-14 atmospheres, optimal oxygen/coal ratio value was in the region of 0.6 where CO was produced about 55% and H2about 25%. From these results, it was found that the oxygen/ coal ratio for the maximum production of CO and H, was decreasing with the increase in gasifier pressure and also, with increasing oxygen content, carbon conversion was increased. For the Chinese Datong coal, cold gas efficiency was in the range of 40-80%.

• Journal of Welding and Joining
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• v.15 no.1
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• pp.125-134
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• 1997

This study was conducted by L9 orthogonal array to obtain optimum spray parameters for This study was conducted by L9 orthogonal array to obtain optimum spray parameters for $Cr_3C_2 - 7wt%$(80wt%Ni-20wt%Cr) coating powder. The factors were hydrogen flow rate, oxygen flow rate, gun-to-work distance, powder feed rate. And evaluation methods for the coating were surface roughness, oxygen concentration, micro-hardness, pore size and distribution, low angle ($30^{\circ}$) erosion rate, and microstructure of coating. The optimum HVOF spray conditions were proved as follows : hydroen flow rate ; 681 SLPM, oxygen flow rate ; 215 SLPM $H^2/O^2 ratio= 3.16), gun-to-work distance ; 22cm, powder feed rate; 25g/min. The hardness (Hv300) was 1147 and the erosion rate ($30^{\circ}$degree) was $3.16\times10^{-4}$g/g. It is believed that the optimized spray conditions can be improved the wear-resistance and anti-erosion characteristics of the coating.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.168-168
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• 2010

Transparent conduction oxides (TCOs) films is extensively reported for optoelectronic devices application such as touch panels, solar cells, liquid crystal displays (LCDs), and organic light emitting diodes(OLEDs). Among the many TCO film, indium tin oxide(ITO) is in great demand due to the growth of flat panel display industry. However, indium is not only high cost but also its deposits dwindling. Therefore, many studies are being done on the transparent conductive oxides(TCOs). We fabricated a target of IZTO(In2O3:ZnO:SnO2=70:15:15 wt.%) reduced indium. Then, IZTO thin films were deposited on glass substrates by pulsed DC magnetron sputtering with various oxygen flow ratio. The substrate temperature was fixed at the room temperature. We investigated the electrical, optical, structural properties of IZTO thin films. The electrical properties of IZTO thin films were dependent on the oxygen partial pressure. As a result, the most excellent properties of IZTO thin films were obtained at the 3% of oxygen flow rate with the low resistivity of $7.236{\times}10^{-4}{\Omega}cm$. And also the optical properties of IZTO thin films were shown the good transmittance over 80%. These IZTO thin films were used to fabricated organic light emitting diodes(OLEDs) as anode and the device performances studied. The OLED with an IZTO anode deposited at optimized deposition condition showed good brightness properties. Therefore, IZTO has utility value of TCO electrode although it reduced indium and we expect it is possible for the IZTO to apply to flexible display due to the low processing temperature.

• Journal of The Korean Society of Agricultural Engineers
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• v.51 no.6
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• pp.25-31
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• 2009

In this study, pollutant loads delivery ratio by flow duration in Hwangryoung A watershed was estimated. The delivery ratio was estimated with measured data by Ministry of Environment(MOE) and the regression equation based on geomorphic parameters. Eight day interval flow data measured by the MOE were converted to daily flow to calculate daily load and flow duration curve by correlating data of neighboring station which has daily flow data. Regression equation developed by previous study was tested to study watershed and found to be satisfactory. The delivery ratios estimated by two methods were compared. For the case of Biochemical oxygen demand(BOD), the delivery ratios of low flow condition were 7.6 and 15.5% by measured and regression equation, respectively. Also, the delivery ratios of Total phosphorus(T-P) for normal flow condition were 13.3 and 6.3% by measured and regression equation, respectively.