• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.302-305
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• 2000

It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.

• Elastomers and Composites
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• 제35권4호
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• pp.296-302
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• 2000

신발 중창용 EVA 발포체의 수용성 폴리우레탄계 접착제에 대한 접착력을 증가시키기 위하여 발포체 표면을 저온 플라즈마 처리하였다. 플라즈마 처리기체 종류, 플라즈마 처리시간, 전극과 시료와의 거리등의 조건에 따른 발포체의 표면형태, 접촉각 및 수성폴리우레탄에 대한 접착력 등을 주사전자현미경, 접촉각 측정기, 인장강도시험기 등을 사용하여 측정하였다. 플라즈마 처리시간이 증가함에 따라 플라즈마 에칭에 의한 표면 형태의 변화가 더욱 뚜렷하게 나타났으며, 물로 측정한 발포체의 표면 접촉각은 현저히 감소하였다. 플라즈마 처리시간이 증가함에 따라 접착력은 현저히 증가하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• 한국염색가공학회지
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• 제8권2호
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• pp.56-63
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• 1996

Low-temperature plasma treatment or sputter etching is of interest as one of the techniques to modify polymer surface. In this study, poly(ethylene terephthalate)(PET), nylon 6 and cotton fabrics dyed three black dyes were subjected to low-temperature argon plasma and also sputter etching. In relation to bathochromic effect, the surface characteristics of the treated fabrics and films were investigated by means of critical surface tension, SEM and ESCA measurement. The depth of shade of fabrics more increased by the sputter etching technique than argon plasma treatment. Many microcraters on the fiber surface formed by the sputter etching resulted in increase of surface area of the fiber and wettability, but the hydrophobic group was increased by the results of ESCA analysis. In particular the change in reflective index of the fibers was much more effective than the chemical composition of the fiber surface on increasing of the depth of shade.

• Fibers and Polymers
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• 제5권1호
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• pp.52-58
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• 2004

Previous investigation results revealed that after the Low Temperature Plasma (LTP) treatment, the hydrophilicity of wool fiber was improved significantly. Such improvement enhances the wool dyeing and finishing processes which might be due to the changes of the wool surface to a more reactive one. In this paper, wool fibers were treated with LTP with different gases, namely, oxygen, nitrogen and gas mixture (25 % hydrogen/75 % nitrogen). Investigations showed that chemical composition of wool fiber surface varied differently with the different plasma gas used. The surface chemical composition of the different LTP-treated wool fibers was evaluated with different characterization methods, namely FTIR-ATR, XPS and saturated adsorption value. The experimental results were thoroughly discussed.

• 한국염색가공학회지
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• 제20권4호
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• pp.43-52
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• 2008

Wool fabric was treated with oxygen low-temperature plasma (LTP) and dichloroisocyanuric acid. The effect of dimensional stability (relaxation shrinkage, hygral expansion, felting shrinkage), tensile strength and elongation, crease recovery, and hand of wool fabric between LTP, DCCA treated wool fabrics and control wool fabric were investigated. SEM photograph showed that a little micro crack was formed on the fiber surface by plasma treatment with hard condition and epicuticle scale was damaged by DCCA treatment. Felting shrinkage, tensile strength and total hand value were much different in each samples.

• 한국자동차공학회논문집
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• 제8권5호
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• pp.12-19
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• 2000

The increasing use of vehicles is causing air-pollution problems. Diesel vehicles are preferred to gasoline vehicles, because the diesel vehicles are superior to gasoline vehicles in terms of fuel consumption, durability, power and efficiency. But the emission reduction technologies for diesel vehicle are not developed well like those for gasoline vehicles. Moreover, the NOx and smoke emitted from diesel vehicle are recognized as a main source of the air-pollution in the urban areas. The emission reduction devices have been installed for each of the emission gas components. Using plasma(i.e. electrical energy)only, the emission gas was found to be reduced. The present paper investigate the effects of a low temperature plasma device in engine performance as well as in emission reduction with the change of the applied voltage and the loading rate of the engine.

• Fibers and Polymers
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• 제7권3호
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• pp.262-269
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• 2006

In this paper, the effects of low temperature plasma (LTP) treatment on the dyeing properties of the wool fiber were studied. The wool fibers were treated with oxygen plasma and three types of dye that commonly used for wool dyeing, namely: (i) acid dye, (ii) chrome dye and (iii) reactive dye, were used in the dyeing process. For acid dyeing, the dyeing rate of the LTP-treated wool fiber was greatly increased but the final dyeing exhaustion equilibrium did not show any significant change. For chrome dyeing, the dyeing rate of the LTP-treated wool fiber was also increased but the final dyeing exhaustion equilibrium was only increased to a small extent. In addition, the rate of afterchroming process was similar to the chrome dyeing process. For the reactive dyeing, the dyeing rate of the LTP-treated wool fiber was greatly increased and also the final dyeing exhaustion equilibrium was increased significantly. As a result, it could conclude that the LTP treatment could improve the dyeing behavior of wool fiber in different dyeing systems.

• 한국식품영양학회지
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• 제31권2호
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• pp.301-307
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• 2018

In this study, a relatively effective process is used to sterilize Escherichia coli on the surface of micro-sized calcium citrate powder using nitrogen and argon as process gases in a low-temperature vacuum plasma treatment. The purpose of this study is to confirm and to introduce the effectiveness of homogeneous surface treatment for the sterilization of fine inorganic powder by the rotatable low-temperature RF plasma system designed by ourselves. The results of the test using 3M petrifilm showed that there were no remarkable spots in the case of the surface of plasma treated powder, whereas the untreated powder showed many blue spots, which indicating that the E. coli was alive. After 5 days, in the same samples, the blue spots were seen to be larger and darker than before, while the plasma-treated powder showed no changes. The results from FE-SEM analysis showed that the E. coli was damaged and/or destroyed by reactive species generated in the plasma space, resulting in the E. coli being sterilized. Furthermore, the sterilization effects according to the selected parameters ($N_2$ and Ar; flow rate 30 and 50 sccm) adapted in this study were mutually similar, regardless of such different process parameters, and this indicates that homogeneous treatment of powder surfaces could be more effective than conventional methods. Therefore, the plasma apparatus used in this study may be a practical method to use in a powerful sterilization process in powder-type food.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1840-1842
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• 2003

This paper describes an experiment of detecting a temperature and components of arc plasma of electrical circuit breaker with a spectroscopic system. The system includes an optical fiber, a monochromator which has three gratings from low to high resolution and ICCD of which time resolution is 50 ns. This system enables measuring a temperature and components of arc plasma of a circuit breaker which is generated and extinguished in a few ms. We use a Planck's law and Boltzmann Plot method for calculating a temperature of arc plasma. A Xenon lamp is used for calibrating the system and this is very important for calculating a temperature of arc plasma. In this study, Arc plasma of Ag and Cu contact was investigated and these represent the contact of low voltage and extra-ultra high voltage circuit breaker, respectively. 8 $kA_{rms}$ test current was applied with a capacitor bank.